• Title/Summary/Keyword: trench structure

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Characteristic Analysis of The Vertical Trench Hall Sensor using SOI Structure (SOI 구조를 이용한 수직 Hall 센서에 대한 특성 연구)

  • 이지연;박병휘
    • Journal of the Microelectronics and Packaging Society
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    • v.9 no.4
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    • pp.25-29
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    • 2002
  • We have fabricated a vertical trench Hall device which is sensitive to the magnetic field parallel to the sensor surface. The vertical trench Hall device has been built on SOI wafer which is produced by silicon direct bonding technology using bulk micromachining, where buried $SiO_2$ layer and surround trench define active device volume. Sensitivity up to 150 V/AT has been measured.

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A SOI LDMOS with Trench Drain and Graded Gate (트렌치 드레인과 경사진 게이트를 갖는 SOI LDMOS)

  • Kim, Sun-Ho;Choi, Yearn-Ik
    • Proceedings of the KIEE Conference
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    • 2000.07c
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    • pp.1797-1799
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    • 2000
  • A SOI LDMOS with trench drain and graded gate is proposed to improve the on resistance. The proposed structure can decrease the on resistance by reducing the path of electron current. Simulation results by SUPREM and MEDICI have shown that the on resistance of the LDMOS with trench drain and graded gate was 14.8 % lower than conventional LDMOS with graded gate.

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The Characteristics Analysis of Novel Moat Structures in Shallow Trench Isolation for VLSI (초고집적용 새로운 회자 구조의 얕은 트랜치 격리의 특성 분석)

  • Lee, Yong-Jae
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.18 no.10
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    • pp.2509-2515
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    • 2014
  • In this paper, the conventional vertical structure for VLSI circuits CMOS intend to improve the stress effects of active region and built-in threshold voltage. For these improvement, the proposed structure is shallow trench isolation of moat shape. We want to analysis the electron concentration distribution, gate bias vs energy band, thermal stress and dielectric enhanced field of thermal damage between vertical structure and proposed moat shape. Physically based models are the ambient and stress bias conditions of TCAD tool. As an analysis results, shallow trench structure were intended to be electric functions of passive as device dimensions shrink, the electrical characteristics influence of proposed STI structures on the transistor applications become stronger the potential difference electric field and saturation threshold voltage, are decreased the stress effects of active region. The fabricated device of based on analysis results data were the almost same characteristics of simulation results data.

A Novel Inserted Trench Cathode IGBT Device with High Latching Current (높은 latch-up 전류특성을 갖는 트랜치 캐소드 삽입형 IGBT)

  • 조병섭;곽계달
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.30A no.7
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    • pp.32-37
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    • 1993
  • A novel insulated gate bipolar transister (IGBT), called insulated trench cathode IGBT (ISTC-IGBT), is proposed. ISTC-IGBT has a trenched well with the shallow P$^{+}$ juction in the conventional IGBT structure. The proposed structure has the capability of effectively suppressing the parasitic thyristor latchup. The holding current of ISTC-IGBT is about 2.2 times greater than that of the conventional IGBT. Detailed analysis of the latchup characteristics of ISTC-IGBT is performed by using the two-dimensional device simulator, PISCES-II B.

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Design of Main Body and Edge Termination of 100 V Class Super-junction Trench MOSFET

  • Lho, Young Hwan
    • Journal of IKEEE
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    • v.22 no.3
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    • pp.565-569
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    • 2018
  • For the conventional power MOSFET (metal-oxide semiconductor field-effect transistor) device structure, there exists a tradeoff relationship between specific on-state resistance (Ron,sp) and breakdown voltage (BV). In order to overcome this tradeoff, a super-junction (SJ) trench MOSFET (TMOSFET) structure with uniform or non-uniform doping concentration, which decreases linearly in the vertical direction from the N drift region at the bottom to the channel at the top, for an optimal design is suggested in this paper. The on-state resistance of $0.96m{\Omega}-cm2$ at the SJ TMOSFET is much less than that at the conventional power MOSFET under the same breakdown voltage of 100V. A design methodology for the edge termination is proposed to achieve the same breakdown voltage and on-state resistance as the main body of the super-junction TMOSFET by using of the SILVACO TCAD 2D device simulator, Atlas.

Design of Super-junction TMOSFET with Embedded Temperature Sensor

  • Lho, Young Hwan
    • Journal of IKEEE
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    • v.19 no.2
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    • pp.232-236
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    • 2015
  • Super-junction trench MOSFET (SJ TMOSFET) devices are well known for lower specific on-resistance and high breakdown voltage (BV). For a conventional power MOSFET (metal-oxide semiconductor field-effect transistor) such as trench double-diffused MOSFET (TDMOSFET), there is a tradeoff relationship between specific on-state resistance and breakdown voltage. In order to overcome the tradeoff relationship, a SJ TMOSFET structure is suggested, but sensing the temperature distribution of TMOSFET is very important in the application since heat is generated in the junction area affecting TMOSFET. In this paper, analyzing the temperature characteristics for different number bonding for SJ TMOSFET with an embedded temperature sensor is carried out after designing the diode temperature sensor at the surface of SJ TMOSFET for the class of 100 V and 100 A for a BLDC motor.

Study on Industrial Inverters for Driving High-efficiency High-voltage Field-stop IGBT Optimization Design (산업용 인버터 구동을 위한 고효율 고내압 Field-stop IGBT 최적화 설계에 관한 연구)

  • Lee, Myung Hwan;Kim, Bum June;Jung, Eun Sik;Jung, Hun Suk;Kang, Ey Goo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.26 no.4
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    • pp.257-263
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    • 2013
  • In this paper, Solar, Wind, fuel cell used in a Power conversion devices and industrial inverter motor to increase the efficiency of energy consumption, which is a core part of high-efficiency, high-voltage Trench Gate Field Stop IGBT was studied. For this purpose Planar type NPT IGBT and Planar type Field Stop IGBT have designed a basic structure designed to Trench Gate Field Stop IGBT based on the completed structure by analyzing the energy consumption of electrical characteristics, efficiency is a key part, high-efficiency and high-voltage inverter for industry regarding the optimization design for Trench Gate Field Stop IGBT.

A Latch-Up Immunized Lateral Trench IGBT with $p^{+}$ Diverter Structure for Smart Power IC (스마트 파워 IC를 위한 $p^{+}$ Diverter 구조의 횡형 트랜치 IGBT)

  • 문승현;강이구;성만영;김상식
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.7
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    • pp.546-550
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    • 2001
  • A new Lateral Trench Insulated Gate Bipolar Transistor(LTIGBT) with p$^{+}$ diverter was proposed to improve the characteristics of the conventional LTIGBT. The forward blocking voltage of the proposed LTIGBT with p$^{+}$ diverter was about 140V. That of the conventional LTIGBT of the same size was 105V. Because the p$^{+}$ diverter region of the proposed device was enclosed trench oxide layer, he electric field moved toward trench-oxide layer, and punch through breakdown of LTIGBT with p$^{+}$ diverter was occurred, lately. Therefore, the p$^{+}$ diverter of the proposed LTIGBT didn't relate to breakdown voltage in a different way the conventional LTIGBT. The Latch-up current densities of the conventional LTIGBT and proposed LTIGBT were 540A/$\textrm{cm}^2$, and 1453A/$\textrm{cm}^2$, respectively. The enhanced latch-up capability of the proposed LTIGBT was obtained through holes in the current directly reaching the cathode via the p$^{+}$ divert region and p$^{+}$ cathode layer beneath n$^{+}$ cathode layer./ cathode layer.

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The Analysis of Specification of Submarine Trench Affecting the Breakwater System (방파제 시스템에 영향을 미치는 해저 Trench 준설 제원 설정의 분석)

  • Kim, Sung-Duk;Lee, Ho-Jin
    • Journal of the Korea Safety Management & Science
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    • v.11 no.2
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    • pp.95-101
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    • 2009
  • The present study is to estimate the effect of wave height affecting at the front face of breakwater systems due to specification of submarine trench such as distance from breakwater to dredged area and width of dredge. The wave diffraction field, which is important hydraulic factor in the ocean, is considered to be two dimensional(2D) plane and the configuration of the submarine dredge on the sea bed designated by single horizontal long-rectangular pit system according to the various specific conditions of dredged locations. The numerical simulation is performed by using Green function based on the boundary integral equation and meshed at moving boundary conditions. The results of present numerical simulations are illustrated by applying the normal incidence. It is shown that the ratios of wave height at the front face of breakwater was varied by dependance of distant from breakwater to dredged area and width of dredge. It means that, when the navigation channel or pit breakwater is dredged on seabed, engineers have to consider the specification of dredge. This study can effectively be utilized for safety assessment to various breakwater systems in the ocean field and provided for safety construction of offshore structure.

A New SOI LDMOSFET Structure with a Trench in the Drift Region for a PDP Scan Driver IC

  • Son, Won-So;Kim, Sang-Gi;Sohn, Young-Ho;Choi, Sie-Young
    • ETRI Journal
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    • v.26 no.1
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    • pp.7-13
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    • 2004
  • To improve the characteristics of breakdown voltage and specific on-resistance, we propose a new structure for a LDMOSFET for a PDP scan driver IC based on silicon-on-insulator with a trench under the gate in the drift region. The trench reduces the electric field at the silicon surface under the gate edge in the drift region when the concentration of the drift region is high, and thereby increases the breakdown voltage and reduces the specific on-resistance. The breakdown voltage and the specific on-resistance of the fabricated device is 352 V and $18.8 m{\Omega}{\cdot}cm^2$ with a threshold voltage of 1.0 V. The breakdown voltage of the device in the on-state is over 200 V and the saturation current at $V_{gs}=5V$ and $V_{ds}$=20V is 16 mA with a gate width of $150{\mu}m$.

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