• 한국정밀공학회지
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• 제21권4호
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• pp.194-201
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• 2004

Optical fibers are indispensable fer optical communication systems that transmit large volumes of data at high speed. But the aligning technology under the sub-micron accuracy is required for the precise axis adjustment and connection. For the purpose of precise alignment of the optical arrays, in this research, we have developed the 12-axis(with 8 automated axis and 4 manual axis) automatic optical fiber alignment system including the image processing-based searching system, the automatic loading system using the robot and the suction toot and the automatic UV bonding system. In order to obtain the sub-micron alignment accuracy, two 4-axis PC-based motion controllers and the two 50nm resolution 6-aixs micro-stage actuated by micro stepping motors are adopted. The fiber aligning procedure consists of two steps. Firstly, the optical wave guide and an input optical array are aligned by the 6-axis input micro-stage with the IR camera. The image processing technique is introduced to reduce primary manual aligning time and result in achieving the 50% decrease of aligning time. Secondly, the IR camera is replaced by the output micro-stage and a wave guide and two optical arrays are aligned simultaneously before the laser power intensity delivered to the optical powermeter reached the threshold value. When the aligning procedure is finished, the wave guide and arrays are W bonded. The automatic loading/unloading system is also introduced and the entire wave guide handing time is reduced significantly compared to the former commercial aligning system.

• 대한전자공학회논문지SD
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• 제42권8호
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• pp.53-60
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• 2005

최근 낮은 기가비트급 광통신 집적회로의 구현에 sub-micron CMOS 공정이 적용되고 있다. 본 논문에서는 표준 0.35mm CMOS 공정을 이용하여 4채널 3.125Gb/s 차동 전치증폭기 어레이를 구현하였다. 설계한 각 채널의 전치증폭기는 차동구조로 regulated cascode (RGC) 설계 기법을 이용하였고, 액티브 인덕터를 이용한 인덕티브 피킹 기술을 이용하여 대역폭 확장을 하였다 Post-layout 시뮬레이션 결과, 각 채널 당 59.3dBW의 트랜스임피던스 이득, 0.5pF 기생 포토다이오드 캐패시턴스에 대해 2.450Hz의 -3dB 대역폭, 그리고 18.4pA/sqrt(Hz)의 평균 노이즈 전류 스펙트럼 밀도를 보였다. 전치증폭기 어레이의 공급전원은 단일전압 3.3V 이고, 전력소모는 92mw이다. 이는 4채널 RGC 전치증폭기 어레이가 저전력, 초고속 광인터컨넥트 분야에 적합함을 보여준다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1678-1683
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• 2003

DBD(Dielectric Barrier Discharge) plasma in air is well established for the production of large quantities of ozone and is more recently being applied to aftertreatment processes for HAPs(Hazardous Air Pollutants). Although DBD high electron density and energy, its potential use as nano and sub-micron sized particle charging are not well known. Aim of this work is to determine design and operating parameters of a two-stage ESP with DBD. DBD and ESP are used as particle charger and precipitator, respectively. We measured particle precipitation efficiency of two-stage ESP and estimated ozone decomposition of both pelletized $MnO_2$ catalyst and pelletized activated carbon. To examine the particle precipitation efficiency, nano and sub-micron sized particles were generated by a tube furnace and an atomizer. AC voltage of $7{\sim}10$ kV(rms) and 60 Hz is used as DBD plasma source. DC -8 kV is applied to the ESP for particle precipitation. The overall particle collection efficiency for the two-stage ESP with DBD is over 85 % under 0.64 m/s face velocity. Ozone decomposition efficiency with pelletized $MnO_2$ catalyst or pelletized activated carbon packed bed is over 90 % when the face velocity is under 0.4 m/s in dry air.

• 한국진공학회지
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• 제6권1호
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• pp.20-27
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• 1997

0.25$\mu\textrm{m}$이하의 최소선폭을 같는 초고집적회로에 사용할 수 있는 구리박막의 형성기술 을 조사하였다. 본 실험에서는 측면박막 형성에 적합한 화학적 증착을 시도하였으며 (hfac)Cu(VTMS)(hexafluoroacetylacetonate vinyltrimethylisilane copper(I))로 명명된 금속 유기 화합물을 원료로 사용하였다. 구리박막의 형성은 TiN와 $SiO_2$모재 위에 이루어 졌으며, 형성 중에 모재의 온도와 증착용기 내 압력의 함수로서 집적회로 공정상 주요 변수인 박막 의 비저항, 박막의 증착선택도를 측정하였다. 구리박막은 모재온도 $180^{\circ}C$와 증착용기의 압력 0.6Torr의 조건에서 가장 좋은 전기적 성질을 보여 주었다. 이 조건에서 형성된 구리박막은 다결정 구조를 나타내었으며 구리박막의 증착속도는 120nm/min, 비저항은 0.25$mu \Omega$.cm, 평균거칠기는 15.5nm로서 0.25$\mu\textrm{m}$이하 선폭의 집적회로에서 요구되는 전기적, 재료적 사양에 근접한 구리박막을 얻었다. 또한 140-$250^{\circ}C$의 모재 온도 범위에서 TiN모재와 $SiO_2$모재 사 이에 뚜렸한 증착선택성이 관측되었다.

• 한국분말재료학회지
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• 제8권3호
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• pp.151-156
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• 2001

MgO based nanocomposite powder including ferromagnetic iron particle dispersions, which can be available for the magnetic and catalytic applications, was fabricated by the spray pyrolysis process using ultra-sonic atomizer and reduction processes. Liquid source was prepared from iron (Fe)-nitrate, as a source of Fe nano-dispersion, and magnesium (Mg)-nitrate, as a source of MgO materials, with pure water solvent. After the chamber were heated to given temperatures (500~$^800{\circ}C$), the mist of liquid droplets generated by ultrasonic atomizer carried into the chamber by a carrier gas of air, and the ist was decomposed into Fe-oxide and MgO nano-powder. The obtained powders were reduced by hydrogen atmosphere at 600~$^800{\circ}C$. The reduction behavior was investigated by thermal gravity and hygrometry. After reduction, the aggregated sub-micron Fe/MgO powders were obtained, and each aggregated powder composed of nano-sized Fe/MgO materials. By the difference of the chamber temperature, the particle size of Fe and MgO was changed in a few 10 nm levels. Also, the nano-porous Fe-MgO sub-micron powders were obtained. Through this preparation process and the evaluation of phase and microstructure, it was concluded that the Fe/MgO nanocomposite powders with high surface area and the higher coercive force were successfully fabricated.

• 천문학회지
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• 제45권2호
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• pp.39-48
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• 2012

We investigate non-LTE effects on the $H_3^+$ level populations to help the analysis of the observed 2 and 3.5 micron $H_3^+$ emissions from the Jovian ionosphere. We begin by constructing a simple three-level model, in order to compute the intensity ratio of the R(3,4) line in the hot band to the Q(1,0) line in the fundamental band, which have been observed in the Jovian auroral regions. We find that non-LTE effects produce only small changes in the intensity ratios for ambient $H_2$ densities less than or equal to $5{\times}10^{11}cm^{-3}$. We then construct two comprehensive models by including all the collisional and radiative transitions between pairs of more than a thousand known $H_3^+$ rovibrational levels with energies less than 10000 $cm^{-1}$. By employing these models, we find that the intensity ratios of the lines in the hot and fundamental bands are affected greatly by non-LTE effects, but the details depend sensitively on the number of collisional and radiative transitions included in the models. Non-LTE effects on the rovibrational population become evident at about the same ambient $H_2$ densities in the comprehensive models as in the three-level model. However, the models show that rotational temperatures derived from the intensities of rotational lines in the ${\nu}_2$ and $2{\nu}_2$ bands may differ significantly from the ambie temperatures in the non-LTE regime. We find that significant non-LTE effects appear near and above the $H_3^+$ peak, and that the kinetic temperatures in the Jovian thermospheric temperatures derived from the observed line ratios in the 2 and 3.5 micron $H_3^+$ emissions are highly model dependent.

• 한국세라믹학회지
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• 제49권6호
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• pp.586-591
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• 2012

$Zr_2WP_2O_{12}$ powder, which has a negative thermal expansion coefficient, was synthesized by a solid-state reaction with $ZrO_2$, $WO_3$ and $NH_4H_2PO_4$ as the starting materials. The synthesis behavior was dependent on the solvent media used in the wet mixing process. The $Zr_2WP_2O_{12}$ powder prepared with a solvent consisting of D. I. water was fully crystallized at $1200^{\circ}C$, showing a sub-micron particle size. According to the results obtained from a thermal analysis, a $ZrP_2O_7$ was synthesized at a low temperature of $310^{\circ}C$, after which it was reacted with $WO_3$ at $1200^{\circ}C$. A new sintering additive, $Al(OH)_3$, was applied for the densification of the $Zr_2WP_2O_{12}$ powders. The cold isostatically pressed samples were densified with 1 wt% $Al(OH)_3$ additive or more at $1200^{\circ}C$ for 4 h. The main densification mechanism was liquid-phase sintering due to the liquid which resulted from the reaction with amorphous or unstable $Al_2O_3$ and $WO_3$. The densified $Zr_2WP_2O_{12}$ ceramics showed a relative density of 90% and a negative thermal expansion coefficient of $-3.4{\times}10^{-6}/^{\circ}C$. When using ${\alpha}-Al_2O_3$ as the sintering agent, densification was not observed at $1200^{\circ}C$.

• 한국분말재료학회지
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• 제19권6호
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• pp.416-423
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• 2012

This paper introduces an effect of a preparing $ZrO_2$-Ag composite on its mechanical properties and microstructure. In present study, $ZrO_2$-Ag was prepared by reduction-deposition route and wetting dispersive milling method, respectively. Two type of Ag powders (nano Ag and micron Ag size, respectively) were dispersed into $ZrO_2$ powder during wetting dispersive milling in D.I. water. Each sample was sintered at $1450^{\circ}C$ for 2hr in atmosphere, and then several mechanical tests and analysis of microstructure were carried out by bending test, hardness, fracture toughness and fracture surface microstructure. As for microstructure, the Ag coated $ZrO_2$ showed homogeneously dispersed Ag in $ZrO_2$ in where pore defect did not appear. However, $ZrO_2$-nano Ag and $ZrO_2$-micro Ag composite appeared Ag aggregation and its pore defect, which carried out low mechanical property and wide error function value.

• JSTS:Journal of Semiconductor Technology and Science
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• 제8권2호
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• pp.134-138
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• 2008

We present a power gating turn-on mechanism that digitally suppresses ground-bounce noise in ultra-deep submicron technology. Initially, a portion of the sleep transistors are switched on in a pseudo-random manner and then they are all turned on fully when VVDD is above a certain reference voltage. Experimental results from a realistic test circuit designed in 65nm bulk CMOS technology show the potential of our approach.

• 비파괴검사학회지
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• 제32권2호
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• pp.115-121
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• 2012

Exploration in microelectromechanical systems(MEMS) and nanotechnology requires evaluation techniques suitable for sub-micron length scale so that thermal and mechanical properties of novel materials can be investigated for optimal design of miro/nanostructures. The ultrafast optical pump-probe technique provides a contact-free and non-destructive way to characterize nanoscale thin-films, and its ultrahigh temporal resolution enables the study of heat-transport phenomena down to a sub-picosecond regime. This paper reviews the principle of optical pump-probe technique and introduces its application to the area of micro/nano-NDE.