Browse > Article
http://dx.doi.org/10.7779/JKSNT.2012.32.2.115

Non-Destructive Evaluation of Material Properties of Nanoscale Thin-Films Using Ultrafast Optical Pump-Probe Methods  

Kim, Yun-Young (Department of Mechanical Engineering, Northwestern University)
Krishnaswamy, Sridhar (Department of Mechanical Engineering, Northwestern University)
Publication Information
Journal of the Korean Society for Nondestructive Testing / v.32, no.2, 2012 , pp. 115-121 More about this Journal
Abstract
Exploration in microelectromechanical systems(MEMS) and nanotechnology requires evaluation techniques suitable for sub-micron length scale so that thermal and mechanical properties of novel materials can be investigated for optimal design of miro/nanostructures. The ultrafast optical pump-probe technique provides a contact-free and non-destructive way to characterize nanoscale thin-films, and its ultrahigh temporal resolution enables the study of heat-transport phenomena down to a sub-picosecond regime. This paper reviews the principle of optical pump-probe technique and introduces its application to the area of micro/nano-NDE.
Keywords
Picosecond Ultrasonics; Laser-Based Non-Destructive Evaluation; Thin-Film; Materials Characterization;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Y. Y. Kim, H. A. Alwi, R. Awang and S. Krishnaswamy, "Photoacoustic measurements on thermal properties of hydrogenated amorphous carbon films: the effect of hydrogen dilution," J. Phys.: Conf. Ser. Vol. 278, 012006 (2010)
2 Y. Y. Kim, H. A. Alwi, R. Awang and S. Krishnaswamy, "Influence of radio frequency power on thermal diffusivity of plasma enhanced chemical vapor deposition-grown hydrogenated amorphous carbon thin-films," J. Appl. Phys. Vol. 109, 113503 (2011)   DOI   ScienceOn
3 Y. Y. Kim, H. A. Alwi, R. Awang and S. Krishnaswamy, "Effects of deposition time duration on thermal diffusivity of hydrogenated amorphous carbon films," Jpn. J. Appl. Phys. Vol. 50, 125602 (2011)   DOI
4 M. A. Panzer, G. Zhang, D. Mann, X. Hu, E. Pop, H. Dai and K. E. Goodson, "Thermal properties of metal-coated vertically aligned single-wall nanotube arrays," J. Heat Transfer Vol. 130, 052401 (2008)   DOI   ScienceOn
5 K. F. Mak, C. H. Lui and T. F. Heinz, "Measurement of the thermal conductance of the graphene/$SiO_{2}$ interface," Appl. Phys. Lett. Vol. 97, 221904 (2010)   DOI   ScienceOn
6 S. T. Huxtable, D. G. Cahill, S. Shenogin, L. P. Xue, R. Ozisik, P. Barone, M. Usrey, M. S. Strano, G. Siddons, M. Shim and P. Keblinski, "Interfacial heat flow in carbon nanotube suspensions," Nature Mater. Vol. 2, pp. 731-734 (2003)   DOI   ScienceOn
7 S. Krishnaswamy, "Photoacoustic methods of materials characterization," in Springer Handbook of Experimental Solid Mechanics, W. N. Sharpe, Ed., Springer, New York, USA (2008)
8 Y. Y. Kim, H. A. Alwi, Q. Huang, R. Abd-Shukor, C. F. Tsai, H. Wang, K. W. Kim, D. G. Naugle and S. Krishnaswamy, "Thermal diffusivity measurement of $YBa_{2}Cu_{3}O_{7-x}$ thin film with a picosecond thermoreflectance technique," Physica C, Vol. 470, pp. 365-368 (2010)   DOI   ScienceOn
9 C. J. K. Richardson and J. B. Spicer, "Characterization of heat-treated tungsten thin films using picosecond duration thermoelastic transients," Opt. Laser Eng. Vol. 40, pp. 379-391 (2003)   DOI   ScienceOn
10 C. Casiraghi, A. C. Ferrari, and J. Robertson, "Raman spectroscopy of hydrogenated amorphous carbons," Phys. Rev. B Vol. 72, 085401 (2005)   DOI   ScienceOn
11 A. Erdemir and C. Donnet, "Tribology of diamond-like carbon films: recent progress and future prospects," J. Phys. D: Appl. Phys. Vol. 39 pp. R311-R327 (2006)   DOI   ScienceOn
12 G. Thorwarth, C. V. Falub, U. Müller, B. Weisse, C. Voisard, M. Tobler and R. Hauert, "Tribological behavior of DLCcoated articulating joint implants," Acta Biomater. Vol. 6, pp. 2335-2341 (2010)   DOI   ScienceOn
13 V. I. Polyakov, A. Yu. Mityagin, A. I. Rukovishnikov, B. Druz, I. Zaritsky and Y. Yervtukchov, "Effect of various adsorbates on electronic states of the thin diamond-like carbon films," Diamond Relat. Mater. Vol. 15, pp. 1926-1929 (2006)   DOI   ScienceOn
14 D. S. da Silva, A. D. S. Côrtes, M. H. Jr. Oliveira, E. F. Motta, G. A. Viana, P. R. Mei and F. C. Marques, "Application of amorphous carbon based materials as antireflective coatings on crystalline silicon solar cells," J. Appl. Phys. Vol. 110, 043510 (2011)   DOI   ScienceOn
15 J. K. Luo, J. H. He, Y. Q. Fu, A. J. Flewitt, S. M. Spearing, N. A. Fleck and W. I. Milne, "Fabrication and characterization of diamond-like carbon/Ni bimorph normally closed microcages," J. Micromech. Microeng. Vol. 15, pp. 1406-1413 (2005)   DOI   ScienceOn
16 E. J. Gonzalez, J. E. Bonevich, G. R. Stafford, G. White and D. Josell, "Thermal transport through thin films: Mirage technique measurements on aluminum/ titanium multilayers," J. Mater. Res. Vol. 15, pp. 764-771 (2000)   DOI   ScienceOn
17 T. Murmu and S. C. Pradhan, "Small-scale effect on the vibration of nonuniform nanocantilever based on nonlocal elasticity theory," Physica E, Vol. 41, pp. 1451-1456 (2009)   DOI   ScienceOn
18 J. K. Luo, Y. Q. Fu, H. R. Le, J. A. Williams, S. M. Spearing and W. I. Milne, "Diamond and diamond-like carbon MEMS," J. Micromech. Microeng. Vol. 17, pp. S147-S163 (2007)   DOI   ScienceOn
19 O. Kraft, and C. A. Volkert, "Mechanical testing of thin films and small structures," Adv. Eng. Mater. Vol. 3, pp. 99-110 (2001)   DOI
20 O. R. Shojaei and A. Karimi, "Comparison of mechanical properties of TiN thin films using nanoindentation and bulge test," Thin Sol. Films Vol. 332, pp. 202-208 (1998)   DOI   ScienceOn
21 D. G. Cahill, M. Katiyar and J. R. Abelson, "Thermal conductivity of a-Si:H thin films," Phys. Rev. B Vol. 50, pp. 6077-6081 (1994)   DOI   ScienceOn
22 G. A. Antonelli, B. Perrin, B. C. Daly, and D. G. Cahill, "Characterization of mechanical and thermal properties using ultrafast optical metrology," MRS Bulletin, Vol. 31, pp. 607-613 (2006)   DOI
23 J. L. Arlein, S. E. M. Palaich, B. C. Daly, P. Subramonium and G. A. Antonelli, "Optical pump-probe measurements of sound velocity and thermal conductivity of hydrogenated amorphous carbon films," J. Appl. Phys. Vol. 104, 033508 (2008)   DOI   ScienceOn
24 H. Maune, H. Y. Chiu and M. Bockrath, "Thermal resistance of the nanoscale constrictions between carbon nanotubes and solid substrates," Appl. Phys. Lett. Vol. 89, 013109 (2006)   DOI   ScienceOn
25 C. J. Morath, H. J. Maris, J. J. Cuomo, D. L. Pappas, A. Grill, V. V. Patel, J. P. Doyle and K. L. Saenger, "Picosecond optical studies of amorphous diamond and diamondlike carbon: thermal conductivity and longitudinal sound velocity," J. Appl. Phys. Vol. 76, pp. 2636-2640 (1994)   DOI   ScienceOn
26 D. G. Cahill and R. O. Pohl, "Heat flow and lattice vibrations in glasses," Solid State Commun. Vol. 70, pp. 927-930 (1989)   DOI   ScienceOn