• 한국재료학회지
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• 제25권1호
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• pp.1-8
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• 2015

This study suggested comprehensive structural characterization methods for the commercial blue light emitting diodes(LEDs). By using the Z-contrast intensity profile of Cs-corrected high-angle annular dark field scanning transmission electron microscope(HAADF-STEM) images from a commercial lateral GaN-based blue light emitting diode, we obtained important structural information on the epilayer structure of the LED, which would have been difficult to obtain by conventional analysis. This method was simple but very powerful to obtain structural and chemical information on epi-structures in a nanometer-scale resolution. One of the examples was that we could determine whether the barrier in the multi-quantum well(MQW) was GaN or InGaN. Plan-view TEM observations were performed from the commercial blue LED to characterize the threading dislocations(TDs) and the related V-pit defects. Each TD observed in the region with the total LED epilayer structure including the MQW showed V-pit defects for almost of TDs independent of the TD types: edge-, screw-, mixed TDs. The total TD density from the region with the total LED epilayer structure including the MQW was about $3.6{\times}10^8cm^{-2}$ with a relative ratio of Edge- : Screw- :Mixed-TD portion as 80%: 7%: 13%. However, in the mesa-etched region without the MQW total TD density was about $2.5{\times}10^8cm^{-2}$ with a relative ratio of Edge- : Screw- :Mixed-TD portion of 86%: 5%: 9 %. The higher TD density in the total LED epilayer structure implied new generation of TDs mostly from the MQW region.

• 한국정보통신학회논문지
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• 제17권8호
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• pp.1885-1890
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• 2013

본 연구에서는 극저온에서 다중 게이트 구조인 나노스케일 p-채널 무접합(junctionless) 과 축적모드(accumulation mode) 다중 게이트 FET의 전기적 특성을 분석하였다. 헬륨을 사용하는 극저온 프로브 스테이션을 사용하여 소자를 측정하였다. 극저온과 낮은 드레인 전압에서 무접합 트랜지스터의 드레인 전류의 진동 현상이 축적모드 보다 심한 것을 알 수 있었다. 이는 무접합 트랜지스터에서는 채널이 실리콘 박막의 가운데 형성되므로 전기적 채널 폭이 축적모드 트랜지스터 보다 작기 때문이다. 온도가 증가할수록 드레인 전류가 증가하며 최대 전달 컨덕턴스도 증가하는 것을 알 수 있었다. 이는 온도가 증가할수록 문턱전압이 감소하며 이동도가 증가하는 데서 기인된 것을 알 수 있었다. 소자의 크기가 나노미터 레벨로 축소되면 양자현상에 의한 드레인 전류 진동이 상온에도 일어날 수 있다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.111-111
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• 2007

Further scaling the semiconductor devices down to low dozens of nanometer needs the extremely shallow depth in junction and the intentional counter-doping in the silicon gate. Conventional ion beam ion implantation has some disadvantages and limitations for the future applications. In order to solve them, therefore, plasma source ion implantation technique has been considered as a promising new method for the high throughputs at low energy and the fabrication of the ultra-shallow junctions. In this paper, we study about the effects of DC bias and base pressure as a process parameter. The diluted mixture gas (5% $PH_3/H_2$) was used as a precursor source and chamber is used for vacuum pressure conditions. After ion doping into the Si wafer(100), the samples were annealed via rapid thermal annealing, of which annealed temperature ranges above the $950^{\circ}C$. The junction depth, calculated at dose level of $1{\times}10^{18}/cm^3$, was measured by secondary ion mass spectroscopy(SIMS) and sheet resistance by contact and non-contact mode. Surface morphology of samples was analyzed by scanning electron microscopy. As a result, we could accomplish the process conditions better than in advance.

• Macromolecular Research
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• 제16권6호
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• pp.549-554
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• 2008

Proton conducting crosslinked membranes were prepared using polymer blends of polystyrene-b-poly(hydroxyethyl acrylate)-b-poly(styrene sulfonic acid) (PS-b-PHEA-b-PSSA) and poly(vinyl alcohol) (PVA). PS-b-PHEA-b-PSSA triblock copolymer at 28:21:51 wt% was synthesized sequentially using atom transfer radical polymerization (ATRP). FT-IR spectroscopy showed that after thermal ($120^{\circ}C$, 2 h) and chemical (sulfosuccinic acid, SA) treatments of the membranes, the middle PHEA block of the triblock copolymer was crosslinked with PVA through an esterification reaction between the -OH group of the membrane and the -COOH group of SA. The ion exchange capacity (IEC) decreased from 1.56 to 0.61 meq/g with increasing amount of PVA. Therefore, the proton conductivity at room temperature decreased from 0.044 to 0.018 S/cm. However, the introduction of PVA resulted in a decrease in water uptake from 87.0 to 44.3%, providing good mechanical properties applicable to the membrane electrode assembly (MEA) of fuel cells. Transmission electron microscopy (TEM) showed that the membrane was microphase-separated with a nanometer range with good connectivity of the $SO_3H$ ionic aggregates. The power density of a single $H_2/O_2$ fuel cell system using the membrane with 50 wt% PVA was $230\;mW/cm^2$ at $70^{\circ}C$ with a relative humidity of 100%. Thermogravimetric analysis (TGA) also showed a decrease in the thermal stability of the membranes with increasing PVA concentration.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.75.2-75.2
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• 2013

Atomic layer deposition (ALD), utilizing self-limiting surface reactions, could offer promising perspectives for future efficient energy conversion devices. The capabilities of ALD for surface/interface modification and construction of novel architectures with sub-nanometer precision and exceptional conformality over high aspect ratio make it more valuable than any other deposition methods in nanoscale science and technology. In the context, a variety of researches on fabrication of active materials for energy conversion applications by ALD are emerging. Among those materials, one-dimensional nanotubular titanium dioxide, providing not only high specific surface area but also efficient carrier transport pathway, is a class of the most intensively explored materials for energy conversion systems, such as photovoltaic cells and photo/electrochemical devices. The monodisperse, stoichiometric, anatase, TiO2 nanotubes with smooth surface morphology and controlled wall thickness were fabricated via low-temperature template-directed ALD followed by subsequent annealing. The ALD-grown, anatase, TiO2 nanotubes in alumina template show unusual crystal growth behavior which allows to form remarkably large grains along axial direction over certain wall thickness. We also fabricated dye-sensitized solar cells (DSCs) introducing our anatase TiO2 nanotubes as photoanodes, and studied the effect of blocking layer, TiO2 thin films formed by ALD, on overall device efficiency. The photon convertsion efficiency ~7% were measured for our TiO2 nanotubebased DSCs with blocking layers, which is ~1% higher than ones without blocking layer. We also performed open circuit voltage decay measurement to estimate recombination rate in our cells, which is 3 times longer than conventional nanoparticulate photoanodes. The high efficiency of our ALD-grown, anatase, TiO2 nanotube-based DSCs may be attributed to both enhanced charge transport property of our TiO2 nanotubes photoanode and the suppression of recombination at the interface between transparent conducting electrode and iodine electrolytes by blocking layer.

• 한국표면공학회지
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• 제47권5호
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• pp.263-268
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• 2014

Nanocrystalline diamond(NCD) coated SiC balls were applied in a ball-on-disk tribometer. After seeding in an ultrasonic bath containing nanometer diamond powders, $2.2{\mu}m$ thick NCD films were deposited on sintered 3 mm diameter SiC balls at $600^{\circ}C$ in a 2.45 GHz microwave plasma CVD system. Bare $ZrO_2$ and SiC balls were prepared for comparison as test balls. Tribology tests were performed in air with pairs of three different balls and mirror polished steel(SKH51) disk. The wear tracks on balls and disks were examined by optical microscope and alpha step profiler. Under the load of 3 N, the friction coefficients of steel against $ZrO_2$, SiC and NCD-coated balls were between 0.4 and 0.8. After a few thousands sliding laps, the friction coefficient of NCD-coated balls dropped from 0.45 to below 0.1 and maintained thereafter. Under a higher load of 10 N or 20 N with a long sliding distance of 2 km, $ZrO_2$ and SiC balls exhibited the similar friction coefficients as above. The friction coefficient of NCD-coated balls was less than 0.1 from the beginning and increased to above 0.1 steadily or with some fluctuations as sliding distance increased. NCD coating layers were found worn out after long duration and/or high load sliding test, which resulted in the friction coefficient higher than 0.1.

• 공업화학
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• 제32권4호
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• pp.379-384
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• 2021

마이크로니들은 약물전달 및 진단에 사용되는 미세바늘로 일반 주사와 달리 길이가 짧아 효과적으로 약물을 전달하는 한편 고통과 감염위험은 최소화시킬 수 있는 도구이다. 기존의 마이크로니들은 MEMS 기술을 기반으로 정밀하게 나노미터 수준으로 제작되었으나 장비와 유지비가 비싸고 공정이 복잡하여, 최근에는 3D 프린팅을 이용해 경제적이고 간단하며 신속하게 마이크로니들을 제작하는 연구가 진행 중이다. 3D 프린팅 기술은 프로토타입의 제작이 간단하고 수정 보완이 용이하기 때문에 마이크로니들 의약품 및 화장품의 상용화에 유리하다. 이에 본 총설은 SLA, 2PP, DLP, CLIP, FDM 3D 프린팅 기술에 대해 소개하고, 이를 이용한 마이크로니들 제작 연구동향에 대해 소개하고자 한다. 또한 현재 마이크로니들 기술의 한계점과 앞으로 해결해야 할 부분에 대해서 논해보고자 한다.

• Advances in nano research
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• 제13권2호
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• pp.187-197
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• 2022

The synthesis of organic and hybrid organic-inorganic perovskites directly from solution improves the cost- and energy-efficiency of processing. To date, numerous research efforts have been devoted to investigating the influence of the various solvent parameters for the synthesis of lead halide perovskites, focused on the effects of different single solvents on the efficiency of the resulting perovskites. In this work, we investigated the effect of solvent blends for the first time on the structure and phase of perovskites produced via the Lewis base vapor diffusion method to develop a new synthetic approach for water-stable CsPbBr₃ particles with nanometer-sized dimensions. Solvent blends prepared with DMF and water-miscible solvents with different Gutmann's donor numbers (D_N) affect the Pb ions differently, resulting in a variety of lead bromide species with various colors. The use of a DMF/isopropanol solvent mixture was found to induce the formation of the Ruddlesden-Popper perovskite based on lead bromide. This perovskite undergoes a blue color shift in the solvated state owing to the separation of nanoplatelets. In contrast, the replacement of isopropanol with DMSO, which has a high DN, induces the formation of spherical CsPbBr₃ perovskite nanoparticles that exhibit green emission. Finally, the integration of acetone in the solvent system leads to the formation of lead bromide complexes with a yellow-orange color and the perovskite CsPbBr₃.

• 한국결정성장학회지
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• 제32권5호
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• pp.205-211
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• 2022

GSV (Granule Spray in Vacuum)는 상온의 진공하에서 나노 크기의 치밀한 세라믹 코팅층을 형성하는 방법이다. 일반적으로, 단사정의 지르코니아는 1150℃에서 정방정으로 변태하며, 이때 6.5 %의 체적변화를 일으켜 치밀한 단사정의 지르코니아를 만들기 어렵다. 본 연구에서는 코팅 효율에 대한 두 가지 처리 변수의 효과를 조사하는 데 중점을 두었다. 아울러, 특별한 가열과정 없이 형성된 필름의 미세구조에 관찰하였다. 샘플 기판에 증착된 지르코니아 필름에 대한 X-ray diffractometer (XRD) 분석은 단사정 지르코니아 필름이 성공적으로 증착되었음을 보여주었다.

• 한국입자에어로졸학회지
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• 제18권4호
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• pp.129-136
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• 2022

The line width of circuits in semiconductor devices continues to decrease down to a few nanometers. Since nanoparticles attached to the patterned wafer surface may cause malfunction of the devices, it is crucial to remove the contaminant nanoparticles. Physical cleaning that utilizes momentum of liquid for detaching solid nanoparticles has recently been tested in place of the conventional chemical method. Dropwise impaction has been employed to increase the removal efficiency with expectation of more efficient momentum exchange. To date, most of relevant studies have been focused on drop spreading behavior on a horizontal surface in terms of maximum spreading diameters and average spreading velocity of drop. More important is the local liquid velocity at the position of nanoparticle, very near the surface, rather than the vertical average value. In addition, there are very scarce existing studies dealing with microdroplet impaction that may be desirable for minimizing pattern demage of the wafer. In this study, we investigated the local velocity distribution in spreading liquid film under various impaction conditions through the CFD simulation. Combining the numerical results with the particle removal model, we estimated an effective cleaning diameter (ECD), which is a measure of the particle removal capacity of a single drop, and presented the predicted ECD data as a function of droplet's velocity and diameter particularly when the droplets are microns in diameter.