• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.10
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• pp.838-843
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• 2002

Chemical mechanical polishing(CMP) process has been widely used to planarize dielectric layers, which can be applied to the integrated circuits for deep sub-micron technology. The reverse moat etch process has been used for the shallow trench isolation(STI)-chemical mechanical polishing(CMP) process with conventional low selectivity slurries. Thus, the process became more complex, and the defects were seriously increased. In this paper, we studied the direct STI-CMP process without reverse moat etch step using high selectivity slurry(HSS). As our experimental results show, it was possible to achieve a global planarization without the complicated reverse moat process, the STI-CMP process could be dramatically simplified, and the defect level was reduced. Therefore the throughput, yield, and stability in the ULSI semiconductor device fabrication could be greatly improved.

• KIEE International Transactions on Electrophysics and Applications
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• v.3C no.1
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• pp.28-32
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• 2003

In this paper, we have studied the in-situ end point detection (EPD) for direct chemical mechanical polishing (CMP) of shallow trench isolation (STI) structures without the reverse moat etch process. In this case, we applied a high selectivity $1n (HSS) that improves the silicon oxide removal rate and maximizes oxide to nitride selectivity Quite reproducible EPD results were obtained, and the wafer-to-wafer thickness variation was significantly reduced compared with the conventional predetermined polishing time method without EPD. Therefore, it is possible to achieve a global planarization without the complicated reverse moat etch process. As a result, the STI-CMP process can be simplified and improved using the new EPD method.

• Journal of Environmental Science International
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• v.32 no.2
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• pp.89-97
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• 2023

The purpose of this study is to examine the possibilities of use as a factor of the water landscape in modern urban spaces such as parks and, apartments, through a case study of the concept, functions, and culture of moats in the East and West from ancient times to the Middle Ages. This study aimed to examine the concept, origin, and function of the moat as a theoretical consideration. Asian castles with moats, including those in Korea, China and Japan, and Western castles with moats in Britain, France, Belgium, and Germany were investigated and analyzed. By reflecting on these cultures and the functions of the moat in modern urban spaces and converting the environment damaged due to industrialization and urbanization into an eco-friendly and environment symbiotic city the quality of life can be improved, and sustainable development can be achieved. This study was conducted through a literature survey and field investigation.

• Journal of the Korean Institute of Traditional Landscape Architecture
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• v.29 no.1
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• pp.105-120
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• 2011

A moat is a pond or waterway paved on the outside of a fortress that is one of the facilities to prevent enemy from approaching the fortress wall or classify it as the boundary space, moats had existed in Europe, Asia and the America from ancient times to medieval times. however it is has been disappeared in modem society. In addition, a moat is a great value in historical and cultural sense such as offering a variety of cultural activities and habitats for animals, but unfortunately there is little consideration of its restoration plan. This research is aimed to investigate historical and cultural meaning and significance of moats which had been existing from ancient times to medieval times in the Eastern and Western. For this purpose, this research analyzed concepts and functions in consideration with times and ideological backgrounds of moats in Korea, China, and Japan. Results were as follows: 1. Moats in Korea existed not only in the castle towns of Goguryeo but also in ancient castle towns of Baekje and Silla. Natural moats and artificial moats existed around castles that were built to prevent and disconnect accessibility of enemies In Goryeo Dynasty and Chosun Dynasty, moats were also used as a defensive function. 2. A moat was generally installed by digging in the ground deep and wide at regular intervals from the ramparts, A moat was installed not only around a castle but also in its interiors. Moats outside castles played an important role in stomping the ground hard besides enhancing its defensive power. In addition, water bodies around a facility often discouraged people's access and walls or fences segregated space physically, but a moat with its open space had an alert and defensive means while pertaining its visual characteristics. 3. The moat found at Nagan Eupseong rumor has it that a village officials' strength was extremely tough due to strong energy of the blue dragon[Dongcheon] in Pungsujiri aspects, so such worries could be eliminated by letting the stream of the blue dragon flow in the form of 'S'. 4. The rampart of the Forbidden City of China is 7.9 meters high, and 3,428 meters long in circumference. It was built with 15 layers of bricks which were tamped down after being mixed with glutinous rice and earth, so it is really solid. The moat of the Forbidden City is 52 meters in width and 6 meters in depth, which surrounds the rampart of the Forbidden City, possibly blocking off enemies' approach. 5. Japan moats functioned as waterways due to their location in cities, further, with the arrangement of leisure facilities nearby, such as boating, fishing from boats, and restaurants, it helped relieve city dwellers' stress and functions as a lively city space. 6. Korean moats are smaller in scale than those of the Forbidden City of China, and Edo, and Osaka castles in Japan, Moats were mostly installed to protect royal palaces or castles in the Eastern Asia whereas moats were installed to protect kings, lords, or properties of wealthy people in the west.

• Development and Reproduction
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• v.20 no.4
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• pp.283-288
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• 2016

The purpose of the present study was to investigate the morphological characteristics of the developing vallate papillae (VP) of Korean native goats using scanning electron microscopy. In prenatal development of the VP, primordia of the VP were observed and the moat was shallowly spread in 60-day-old fetuses. The moat of the vallate papillae was shallowly spread and still undifferentiated in 90-day-old fetuses. The trench wall of the moat of the VP was well developed in 120-day- old fetuses. In neonates, the moat of the VP was more widely and deeply engraved and VP were developed as completely as those of adults. In postnatal development, VP were observed to have continually increased in size with slight morphological changes until 90-days after birth. Taste pores of the VP were shaped like flower leaves in 120-days after birth. The microridges and microplicaes were well developed on the epithelial surface of the VP in goats ranging from 120-day-old fetuses to 120-day-old postnatal animals. These results suppose that the sensing ability for gestation of VP was already well developed by the time of its birth and VP were differentiated into a variety of different shape and size during development.

• 한국지구물리탐사학회:학술대회논문집
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• 2008.10a
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• pp.93-96
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• 2008

We analyze a precise seabed feature around the Hupo Bank by using Multi-beam echosounder. Multi-beam echosounder system can observe the topography undulation according to the navigation of the survey ship by shooting wide beam. It is possible to embody a precision seabed feature because it can be make high density of incompletion depth sounding between survey lines. Through this survey, there is the Hupo Bank which is 84 km long, 1-15 km wide, 5.3-160 m deep in the center, at the west is moat, at the east is scarp and submarine canyon. The top of the Hupo Bank is the Wangdol reef that has 5.3 m in depth of water at least. Moat in survey area is 30 m long, and 30-40 m wide and has a depressed channel. The gap of depth of water in scarp is approximately 60 m and shows a characteristic of cuttig plane. Submarine canyon is 3.5 - 13.5 km wide.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.18 no.10
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• pp.2509-2515
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• 2014

In this paper, the conventional vertical structure for VLSI circuits CMOS intend to improve the stress effects of active region and built-in threshold voltage. For these improvement, the proposed structure is shallow trench isolation of moat shape. We want to analysis the electron concentration distribution, gate bias vs energy band, thermal stress and dielectric enhanced field of thermal damage between vertical structure and proposed moat shape. Physically based models are the ambient and stress bias conditions of TCAD tool. As an analysis results, shallow trench structure were intended to be electric functions of passive as device dimensions shrink, the electrical characteristics influence of proposed STI structures on the transistor applications become stronger the potential difference electric field and saturation threshold voltage, are decreased the stress effects of active region. The fabricated device of based on analysis results data were the almost same characteristics of simulation results data.

• Journal of the Korean Wood Science and Technology
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• v.49 no.2
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• pp.154-168
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• 2021

Various types of wooden relics are being unearthed following the full-scale excavation in Wolseong palace site, Gyeongju in Korea. In particular, a large number of relics were found in the moat surrounding the Wolseong Fortress. This study attempted to secure basic data on the shields of the Silla era through species identification, radiocarbon dating, and shape analysis of the two wooden shields excavated from the Wolseong moat. As a result of the radiocarbon dating, it was confirmed that the shields were made of wood procured in the period between the mid-4th century and the early 5th century. The species identification confirmed that the body of the relic was made with Pinus soft pine group and the handle with Zelkova serrata. It was also confirmed that the excavated wooden shield was made by first marking a thin line on a flat grain board, then marking double concentric circles and perforating small holes. The distance between the division lines is constant at about 6cm, and spaces between them are colored in red and black. The shape analysis estimated that two artifacts were more than 50cm and 36cm in width, respectively.

• Journal of the Korean Institute of Traditional Landscape Architecture
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• v.32 no.3
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• pp.1-9
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• 2014

This article is the results of excavation data and it aims to interpret the composition facilities of the Royal garden at the Wanggung-ri site. The base of research was prepared through excavation and study on the royal garden at the Wanggung-ri site, which was constructed in Sa-bi period of Baek-je. The elements for the royal garden at the Wanggung-ri site were divided in 3 parts. - 1) Stonework facility 2) Installation for conveyance of water : Large moat-shaped ditch and Winding waterway(1~6 and water catchment) 3) Square cornerstone building. In this article, I arrange the basic data about facilities and function of the royal garden for making recovery of original form. First of all, I reason that stonework facilities were in charge to make space for catchment and boundary. Especially the Round angel rectangular stonework facility took charge of complex roles as catchment and water conveyance, and water can be transferred to the large moat-shaped ditch through joint between them. I confirmed that the round angel rectangular stonework facility and the large moat-shaped ditch which were connected by joint are one of the facilities in the royal garden. The large moat-shaped ditch protected the eastern, the northern walls and workshop site under the inclined plane to minimize the damage. Also, the large moat-shaped ditch took several roles, especially water catchments and landscaping. The large moat-shaped ditch was continually used from the period of Baek-je to the unified Silla, as a result it was completely deposited inside. After that, the 6 winding waterway were built in the western inclined plane with similar needs with the large moat-shaped ditch, and the square cornerstone building was built in same time. I noticed that the square cornerstone building was built as a part of the royal garden in Sa-bi period of Baek-je through the remains of Baek-je tiles around the building. After that, the square cornerstone building was built in same place as reconstruction.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.1
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• pp.1-5
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• 2001

STI(shallow trench isolation)-CMP(chemical mechanical polishing) process have been substituted for LOCOS(local oxidation of silicon) process to obtain global planarization in the below sub-0.5㎛ technology. However TI-CMP process, especially TI-CMP with RIE(reactive ion etching) etch back process, has some kinds of defect like nitride residue, torn oxide defect, etc. In this paper, we studied how to reduced torn oxide defects after STI-CMP with RIE etch back processed. Although torn oxide defects which can occur on trench area is not deep and not severe, torn oxide defects on moat area is not deep and not severe, torn oxide defects on moat area is sometimes very deep and makes the yield loss. Thus, we did test on pattern wafers which go through trench process, APECVD process, and RIE etch back process by using an IPEC 472 polisher, IC1000/SUVA4 PAD and KOH base slurry to reduce the number of torn defects and to study what is the origin of torn oxide defects.