• Journal of the Korean Crystal Growth and Crystal Technology
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• v.31 no.3
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• pp.103-111
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• 2021

Hexagonal shape Si crystals were grown by the mixed-source hydride vapor phase epitaxy (HVPE) method of mixing solid materials such as Si, Al and Ga. In the newly designed atmospheric pressure mixed-source HVPE method, nuclei are formed by the interaction between GaCl_n, AlCl_n and SiCl_n gases at a high temperature of 1200℃. In addition, it is designed to generate a precursor gas with a high partial pressure due to the rapid reaction of Si and HCl gas. The properties of hexagonal Si crystals were investigated through scanning electron microscopy (FE-SEM), energy dispersive X-ray spectroscopy (EDS), high-resolution X-ray diffraction (HR-XRD), and Raman spectrum. From these results, it is expected to be applied as a new material in the Si industry.

• Korean Journal of Materials Research
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• v.13 no.8
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• pp.497-502
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• 2003

Crystallographic characteristics and interfacial structures of $Al_2$$O_3$and $ZrO_2$dielectric films prepared by atomic layer chemical vapor deposition (ALCVD) were investigated at atomic scale by high-resolution transmission electron microscopy (HRTEM) and energy dispersive X-ray spectroscopy (EDS)/electron energy-loss spectroscopy (EELS) coupled with a field-emission transmission electron microscope. The results obtained from cross-sectional and plan-view specimens showed that the $Al_2$$O_3$film was crystallized by annealing at a high temperature and its crystal system might be evaluated as either cubic or tetragonal phase. Whereas the $ZrO_2$film crystallized during deposition at a low temperature of ∼$300^{\circ}C$ was composed of both tetragonal and monoclinic phase. The interfacial thickness in both films was increased with the increased annealing temperature. Further, the interfacial structures of X$ZrO_2$$O_3$and $ZrO_2$films were discussed through analyses of EDS elemental maps and EELS spectra obtained from the annealed films, respectively.

• Korean Journal of Mineralogy and Petrology
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• v.35 no.4
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• pp.409-421
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• 2022

Achieving a highly resolved spatial distribution of Mn-bearing minerals and elements in the natural ferromanganese nodules can provide detailed knowledge of the temporal variations of geochemical conditions affecting the formation processes of nodules. While a recent study utilizing Raman spectroscopy has reported the changes in the manganate mineral phases with growth for spherical nodules from the Arctic Sea, the distributions of minerals and elements in the nodules from the shallow Arctic Sea with non-spherical forms have not yet fully elucidated. Here, we reported the micro-laser Raman spectra with varying data acquisition points along three different profiles from the center to the outermost rim of the non-spherical ferromanganese nodules collected from the East Siberian Sea (~73 m). The elemental distributions in the nodule (such as Mn, Fe, etc.) were also investigated by energy dispersive X-ray spectroscopy (EDS) analysis to observe the internal structure and mineralogical details. Based on the microscopic observation, the internal structures of a non-spherical nodule can be divided into three different regions, which are sediment-rich core, iron-rich substrate, and Mn-Fe layers. The Raman results show that the Mn-bearing mineral phases vary with the data acquisition points in the Mn-Fe layer, suggesting the changes in the geochemical conditions during nodule formation. In addition, we also observe that the mineral composition and structural characteristics depend on the profile direction from the core to the rim. Particularly, the Raman spectra obtained along one profile show the lack of Fe-(oxy)hydroxides and the noticeably high crystallinity of Mn-bearing minerals such as birnessite and todorokite. On the other hand, the spectra obtained along the other two profiles present the presence of significant amount of amorphous or poorly-ordered Fe-bearing minerals and the low crystallinity of Mn-bearing minerals. These results suggest that the diagenetic conditions varied with the different growth directions. We also observed the presence of halite in several layers in the nodule, which can be evidence of the alteration of seawater after nodule formation. The current results can provide the opportunity to obtain detailed knowledge of the formation process and geochemical environments recorded in the natural non-spherical ferromanganese nodule.

• Journal of the Society of Disaster Information
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• v.15 no.4
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• pp.479-492
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• 2019

Purpose: The purpose of this study is to accurately analyze the damage of bridges in order to determine whether fire bridges can be used continuously or to provide information on maintenance augmentation data. Method: XRD, SEM and EDS analyzes of concrete were carried out to estimate the fire temperature transferred to the structure, and analyzed by depth and area from PSCI beam and bottom plate concrete surface. Results: Test results G_12,11 for the fire zone concrete were confirmed to be affected by heat up to depth of 60mm and the temperature of the hydrothermal heat was above 1000℃. Also, the girder G_10,9,8 was relatively weakly damaged compared to G_12,11, and the degree of damage was confirmed to be affected by heat up to a depth of 40 mm. Conclusion: Based on the analyzed data, it is considered that if the repair / reinforcement and periodic inspection are carried out, the bridge can secure sufficient safety even considering the damage caused by the fire.

• Conservation and Restoration of Cultural Heritage
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• v.1 no.1
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• pp.9-22
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• 2012

The most widely excavated iron artifacts used as weapons or farm tools from central southern regions of Korea were subjects of non-metallic inclusion analysis through metallographic examination, microhardness measurement, and scanning electron microscopy with energy dispersive X-ray spectroscopy. Through metallographic interpretation and study of the analyzed results, the steel manufacturing and iron smelting using heat processing in the iron artifacts excavated from the central southern region of the ancient Korean peninsula was studied, and the analysis of the non-metallic inclusions mixed within the metallic structures was interpreted as the ternary phase diagram of the oxide to infer the type of iron ores for the iron products and the temperature of the furnace used to smelt them. Most of the ancient forged iron artifacts showed $Al_2O_3/SiO_2$ with high $SiO_2$ contents and relatively low $Al_2O_3$ contents for iron ore, indicating t hat for $Al_2O_3$ below 5%, it is presumed that magnetic iron ores were reduced to bloom iron (sponge iron) with direct-reduction process for production. The temperature for extraction of wustite for $Al_2O_3$ below 1% was found to be $1,020{\sim}1,050^{\circ}C$. Considering the oxide ternary constitutional diagram of glassy inclusions, the steel-manufacturing temperature was presumed to have been near $1,150{\sim}1,280^{\circ}C$ in most cases, and minimum melting temperature of casting iron part excavated in Daeseong-ri. Gyeonggi was near $1,400^{\circ}C$, and it is thought that hypoeutectic cast iron of about 2.3% carbon was casted and fragility of cast iron was improved by decarburizing in solid state.

• Journal of the Microelectronics and Packaging Society
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• v.9 no.2
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• pp.1-9
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• 2002

The intermetallic formation between Sn-Ag-(Cu) solders and metal pads in a real BGA package was characterized using SEM, EDS, and XRD. The intermetallic phase formed in the interface between Sn-Ag-Cu and Au/Ni/Cu pad is likely to be ternary compound of $(Cu,Ni)_6Sn_5$ from EDS analysis High concentration of Cu was observed in the solder/Ni interface. XRD analysis confirmed that $\eta -Cu_6 Sn_5$ type was intermetallic phase formed in the interface between Cu containing solders and Ni substrates and $Ni_3$Sn_4$ intermetallic was formed in the Sn-Ag solder/Ni interface. The thickness of intermetallic phase increased with the reflow times and Cu concentration in solder.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.25 no.1
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• pp.36-44
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• 2015

Objectives: This study aimed to elucidate the physicochemical properties of silica powder and airborne particles as by-products generated from fabrication processes to reduce unknown risk factors in the semiconductor manufacturing work environment. Materials and Methods: Sampling was conducted at 200 mm and 300 mm semiconductor wafer fabrication facilities. Thirty-two powder and airborne by-product samples, diffusion(10), chemical vapor deposition(10), chemical mechanical polishing(5), clean(5), etch process(2), were collected from inner chamber parts from process and 1st scrubber equipment during maintenance and process operation. The chemical composition, size, shape, and crystal structure of silica by-product particles were determined by using scanning electron microscopy and transmission electron microscopy techniques equipped with energy dispersive spectroscopy, and x-ray diffractometry. Results: All powder and airborne particle samples were composed of oxygen(O) and silicon(Si), which means silica particle. The by-product particles were nearly spherical $SiO_2$ and the particle size ranged 25 nm to $50{\mu}m$, and most of the particles were usually agglomerated within a particle size range from approximately 25 nm to 500 nm. In addition, the crystal structure of the silica powder particles was found to be an amorphous silica. Conclusions: The silica by-product particles generated from the semiconductor manufacturing processes are amorphous $SiO_2$, which is considered a less toxic form. These results should provide useful information for alternative strategies to improve the work environment and workers' health.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.25 no.1
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• pp.82-88
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• 2015

Objectives: This study is designed to analyze the penetration performance into ceiling materials containing asbestos of scattering prevention agents and investigate the change in penetration depth and viscosity according to the dilution rate of anti-scattering agents diluted with distilled water. Methods: Five different types of scattering prevention agents were spread on plate-type asbestos ceiling materials. The penetration depth of each coated ceiling material was measured by energy dispersive spectroscopy (EDS) analysis, based on X-ray fluorescence (XRF) results of the non-coated ceiling materials. Test equipment installed the ceiling materials and 60 minutes were collected at a flow rate of $10{\ell}/min$ at a filter of 25 mm. Results: An EDS analysis of the cross-section of ceiling materials constructed with a scattering prevention agent revealed that potassium is detected in the process of penetrating hardener solidification and this element could be an indicator for infiltration. When anti-scattering agents with different viscosities were constructed and the penetration depth was analyzed by potassium detection assessment using EDS, the depth results with viscosities of 5.0, 2.5, and 1.9 cP were 98.5, 103, and $147{\mu}m$, respectively. Penetration performance improved with decrease in viscosity. Conclusions: For asbestos ceiling materials, it is concluded that a higher dilution rate of the scattering prevention agent leads to lower viscosity, and hence a deeper penetration depth from $156{\mu}m$ to 3 mm. The asbestos anti-scattering properties according to the penetration depth will be confirmed through further study.

• Journal of Powder Materials
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• v.22 no.1
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• pp.52-59
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• 2015

As well-known wrought stainless steel, sintered stainless steel (STS) has excellent high-temperature anti-corrosion even at high temperature of $800^{\circ}C$, and exhibits good corrosion resistance in air. However, when temperature increases above $900^{\circ}C$, the corrosion resistance of STS begins to deteriorate and dramatically decreases. In this study, the effects of phase and composition of STS on high-temperature corrosion resistances are investigated for STS 316L, STS 304 and STS 434L above $800^{\circ}C$. The morphology of the oxide layers are observed. The oxides phase and composition are identified using X-ray diffractometer and energy dispersive spectroscopy. The results demonstrate that the best corrosion resistance of STS could be improved to that of 434L. The poor corrosion resistance of the austenitic stainless steels is due to the fact that $NiFe_2O_4$ oxides forming poor adhesion between the matrix and oxide film increase the oxidation susceptibility of the material at high temperature.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.484-484
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• 2009

반도체 소자가 차세대 초미세 공정 기술 도입의 가속화를 통해 고속화 및 고집적화 되어 감에 따라 나노 (nano) 크기의 회로 선폭 미세화를 극복하고자 최적의 CMP (chemical mechanical polishing) 공정이 요구되어지고 있다. 최근, 금속배선공정에서 높은 전도율과 재료의 값이 싸다는 이유로 Cu를 사용하였으나, 디바이스의 구조적 특성을 유지하기 위해 높은 압력으로 인한 새로운 다공성 막(low-k)의 파괴와, 디싱과 에로젼 현상으로 인한 문제점이 발생하게 되었다. 이러한 문제점을 해결 하고자 본 논문에서는 Cu의 ECMP 적용을 위해 LSV (Linear sweep voltammetry)법을 통하여 알칼리 성문인 $NaNO_3$ 전해액과 산성성분인 $HNO_3$ 전해액의 전압 활성화에 의한 active, passive, transient, trans-passive 영역을 I-V 특성 곡선을 통해 알아보았고, 알칼리와 산성 성분의 전해액이 Cu 표면에 미치는 영향을 SEM (Scanning electron microscopy), EDS (Energy Dispersive Spectroscopy), XRD(X-ray Diffraction)를 통하여 전기화학적 특성을 비교 분석하였다.