• Korean Journal of Materials Research
• /
• v.16 no.9
• /
• pp.564-570
• /
• 2006

Silicides have been required to be below 40 nm-thick and to have low contact resistance without agglomeration at high silicidation temperature. We fabricated composite silicide layers on the wafers from Ni(20 nm)/Co(20 nm)/poly-Si(70 nm) structure by rapid thermal annealing of $700{\sim}1100^{\circ}C$ for 40 seconds. The sheet resistance, surface composition, cross-sectional microstructure, and surface roughness were investigated by a four point probe, a X-ray diffractometer, an Auger electron spectroscopy, a field emission scanning electron microscope, and a scanning probe microscope, respectively. The sheet resistance increased abruptly while thickness decreased as silicidation temperature increased. We propose that the fast metal diffusion along the silicon grain boundary lead to the poly silicon mixing and inversion. Our results imply that we may consider the serious thermal instability in designing and process for the sub-0.1 um CMOS devices.

• Proceedings of the KWS Conference
• /
• 2006.05a
• /
• pp.266-268
• /
• 2006

The effects of the brazing temperature and homogenizing time for brazed specimens on the joint of Ni-based superalloys such as Haynes 250, Inconel 617 and Hastelloy-X were investigated. The brazing alloy is nickel base MBF 15. The foil had a thickness of $38{\mu}m$, which was used two sheets of that for the all experiments. The experimental brazing was carried out by a brazing process in a vacuum of approximately $2{\times}10^{-5}$ Torr, an applied pressure of about 0.74MPa and the three kinds of brazing temperatures were 1100, 1150, and $1190^{\circ}C$ for a holding time of 5 to 1440 minutes. Microstructural observations were made on the cross-sectional samples by using an optical microscope(OM), scanning electron microscope(SEM), and electron probe X-ray microanalyzer(EPMA). The tensile tests were performed at room temperature with a cross head speed 1.5 mm/min according to ASTM E8M. The results show that excellent joint tensile strengths of as high as 788MPa were obtained when processed at $1190^{\circ}C$ for 5 minutes.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.24 no.3
• /
• pp.270-277
• /
• 2015

In this paper, we describe the production of a specific electrostatic-type scanning electron microscope based on miniaturization for application in other types of vacuum equipment. The initial configuration of the SEM starts with a minimal configuration that allows people to view sample images. After improving the stability of the SEM operation and resolution, we conducted experiments on identifying the characteristics and development of an einzel-type condenser lens with reference to the demagnification lens system of an SEM. The experiments were conducted at an acceleration voltage of 5 kV and we found the shape of the lens to be more reliable than a conventional lens. The lens was then added to improve the resolution in the nanometer region. The current measured on the sample was approximately 40 pA and its magnification was 4,000 times.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.369.2-369.2
• /
• 2014

Diamond-like Carbon(DLC) films doping Si were deposited by linear ion source(LIS)-physical vapor deposition method on Si wafer. We have studied the effects of Si content on friction and wear properties of DLC films and the characteristics of the films were investigated using Nano-indentation, Micro raman spectroscopy, Field Emission-Scanning Electron Microscope (FM-SEM) and X-ray Photoelectron Spectroscopy (XPS). The films has been various low-friction and low-stress by varying the flow rates of silane gas. Under the about 2% of Si doping is very suitable for improving the adhesion of films and reducing internal stress while maintaining the surfaces hardness of DLC films. Linear ion source (LIS)를 사용하여 Si wafer위에 Si 이온이 첨가된 DLC 박막을 증착하였다. 참가된Si 이온의 양에 따라 DLC 박막에 미치는 영향을 분석하기 위하여 마찰 계수 및 경도를 비교하였고, Micro raman spectroscopy, Field Emission-Scanning Electron Microscope (FM-SEM) and X-ray Photoelectron Spectroscopy (XPS)를 통하여 표면 상태를 분석하였다. 천체 주입된 가스량의 약 2%까지 Si 이온 주입이 늘어날수록 DLC 박막의 마찰계수는 낮아졌고, 경도는 Si 이온이 주입되지 않았을 경우와 비슷한 값(약 20~23 GPa)을 가졌다. 2% 이상의 주입량에서는 마찰계수는 주입량이 늘어날수록 높아졌으며 경도는 떨어지는 경향을 보였다. 이는 Si이온이 2%이하로 첨가되었을 경우, DLC 박막의 생성시 탄소 이온들의 결합 Stress를 줄여 마찰계수가 줄어든다고 볼 수 있으며, 그 양이 2%이상이 되면 오히려 불순물로 작용하여 DLC 박막의 Stress는 급격히 증가하고 마찰계수도 높아짐을 알 수 있다.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2015.05a
• /
• pp.112-112
• /
• 2015

The purposed of this work was to determine nanotube shape variation on the Ti-xNb alloys with alloying elements and applied potentials. Samples were prepared by arc melting, followed by followed by homogenization for 12 hr at $1000^{\circ}C$ in argon atmosphere. This study was evaluated the phase and microstructure of Ti-xNb alloys using an X-ray diffraction (XRD) and optical microscopy (OM). The morphology of the samples was investigated with a field-emission scanning electron microscope (FE-SEM) and energy dispersive X-ray spectroscopy (EDS). The nanotube on the alloy surface was formed in 1 M $H_3PO_4$ with small additions of NaF 0.8 wt.%. All anodization treatments were carried out using a scanning potentiostat (Model 362, EG&G, USA) at constant voltage 30 V for 120 min, respectively. The morphology of the samples was investigated with a field-emission scanning electron microscope (FE-SEM) and energy dispersive X-ray spectroscopy (EDS). Surface characteristics of nanotbue formed on Ti-xNb alloys was investigated by potentiodynamic test and potentiostatic in 0.9% NaCl solution at $36.5{\pm}1^{\circ}C$. It was observed that the changed ${\alpha}$ phase to ${\beta}$ phase with Nb content.

• Journal of the Korean institute of surface engineering
• /
• v.40 no.4
• /
• pp.185-189
• /
• 2007

A scanning electron microscope (SEM) is a complex system, consisting of many sophisticated components. For a systematic characterization, a $2^4$ full factorial experiment was conducted. The SEM components examined include condenser lens 1 and 2 (denoted as A and B, respectively), and Objective lens (coarse and fine-denoted as C and D respectively). A statistical analysis was conduced to investigate factor effects and variations In response surfaces. Among four factors, main effect analysis revealed that A and D were Identified as the dominant factor. Moreover, B showed conflicting effect against C. The $R^2$ of statistical regression model constructed was about 69.6%. The model generated 3D response surface plots facilitated understanding of complex tactor effects.

• Korean Journal of Materials Research
• /
• v.31 no.8
• /
• pp.433-438
• /
• 2021

In this study, microstructural characteristics and constituent elements of fiberglass splint and cast are examined using a scanning electron microscope and an energy dispersive X-ray spectrometer. As observed by the scanning electron microscope, fiberglass splint and cast had a porous structure with many bundles of fiberglass textures well assembled. Spaces between bundles of the fiberglass splint are triangular or elliptical shaped and the long-axis diameter is measured at about 1 mm. The thickness of fiber bundles covered with plaster is measured at 600 ㎛ and the diameter of a single strand of fiberglass is up to 10 ㎛. The thickness of the fiberglass bundle of the fiberglass splint is measured at about 700 ㎛. Spaces between bundles are formed in the shape of triangles with gentle edges and long-axis diameter of up to 1.4 mm, which is larger than that of the splint. The thickness of a single strand of fiberglass of the plaster-coated cast is 11.5 ㎛, which is thicker than that of fiberglass of the splint. As a result of analyzing constituent elements of the fiberglass cast and the splint with an energy dispersive X-ray spectrometer, Ca, Si, and Al components are identically detected. This result shows that the fiberglass cast has a smoother surface with hardened plaster than the fiberglass splint. The thickness of the fiberglass bundle and the thickness of a single strand of the fiberglass are also larger than those of the fiberglass splint.

• Journal of the Korean Society of Food Culture
• /
• v.31 no.3
• /
• pp.250-260
• /
• 2016

This study was conducted to determine the reasonable soaking period of glutinous rice for laver Bugak (Korean traditional fried dishes) processing and to identify the sensory characteristics of three kinds of laver Bugak made with different starch pastes: GRice_1d using glutinous rice soaked for 1 day; GRice_7d using glutinous rice fermented for 7 days; and Wheat using flour. Descriptive analysis was performed by 10 trained panelists, and the 92 consumers evaluated the overall acceptance (OL), acceptance of appearance (APPL), odor (ODL), flavor (FLL), and texture (TXTL) of the samples using a 9-point hedonic scale. From the measurement result by scanning electron microscope (SEM), there were differences in the surface characteristics among soaking period for 1 day and 7 days. Ten panelists were trained, and they evaluated the appearance, odor/aroma, flavor/taste, texture/mouth feel, and after taste attributes of these samples. 36 attributes were generated by panelists and 12 attribute were significantly different across products (p<0.05). It was found that the Grice_7d sample was characterized by mouthfeel of crispiness and uniformity of bubbles, and the Wheat sample was characterized by surface of roughness, mouthfeel of crispiness and adhesiveness, relatively. And the Grice_1d sample was characterized by surface of roughness, mouthfeel of roughness, hardness, cohesiveness, toughness, and adhesiveness.

• Korean Journal of Medicinal Crop Science
• /
• v.14 no.1
• /
• pp.36-40
• /
• 2006

This study was carried out to investigate histological characteristics of Korean ginseng in steaming process. The Korean red ginseng were prerared with 6-years-old ginseng according to the steaming prcess and dried with $13{\pm}0.5%$ moisture and than cut in vertical section and horizontal section. The tissues are separated into epidermis, cortex, and xylem observed with Scanning Electron Microscope. The materials dried without steaming process contain cell membrane and crystallization of starch particle within them. But Korean red ginseng with prolonged steaming process are condensed, and the large hollows and cell membranes of vessel and resin duct are disappeared. In addition, Ca-oxalate rosette crystal is not found in the case of above 60-minute steaming time. The reason is that the tissues are condensed because of dry after elements' gelatinization.

• Journal of the Mineralogical Society of Korea
• /
• v.13 no.4
• /
• pp.196-204
• /
• 2000

We present characteristics of hydrothermal chlorite and its interstratification with 7-$\AA$ mineral phase that occur in the propylitic alteration zone of the Bobae sericite deposit formed in rhyodacitic tuff. Chlorite is found as disseminated fine-grained aggregate or replacement materials of precursor minerals such as Fe-oxides and amphibole. Based on X-ray diffraction(XRD), all chlorites belong to IIb polytype and the (060) reflections averaging $1.53~1.54\AA$ indicate a trioctahedral structure. Chemical compositions of chlorite show that the Fe/(Fe+Mg) values are mostly in the range of 0.44~0.53, and cation deficiencies in octahedral sites range from 0.06 to 0.37. Under scanning electron microscope(SEM) chlorite occurs as well-crystallized aggregates and is subparallely stacked in interstices or between grain boundaries of associated minerals. transmission electron microscopic(TEM) images reveal that chlorite shows regular layers with $14-\AA$ spacings, locally interstratified with $7-\AA$ or $21-\AA$ periodicities. The $21- \AA$ periodicity corresponds to the sum of the $d_{001}$ values of chlorite and $7-\AA$ phase. The chlorite packet coexisting with 7-$\AA$ layers displays abundant defects such as edge dislocations and layer terminations. Selected-area electron diffraction(SAED) indicates that chlorite and $7-\AA$ phase are randomly interstratified in the mixed-layer areas. We propose a lateral change of layers for the polymorphic transition of $7-\AA$ phase to chlorite.e.