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http://dx.doi.org/10.5695/JKISE.2007.40.4.185

Statistical Analysis of Characteristics of Scanning Electron Microscope  

Kim, T.S. (School of Information, Communications & Electronics Engineering, The Catholic University of Korea)
Kim, W. (Department of Electronic Engineering, Sejong University)
Kim, D.H. (School of Mechanical Design & Automation Engineering, Seoul National University of Technology)
Kim, B. (Department of Electronic Engineering, Sejong University)
Publication Information
Journal of the Korean institute of surface engineering / v.40, no.4, 2007 , pp. 185-189 More about this Journal
Abstract
A scanning electron microscope (SEM) is a complex system, consisting of many sophisticated components. For a systematic characterization, a $2^4$ full factorial experiment was conducted. The SEM components examined include condenser lens 1 and 2 (denoted as A and B, respectively), and Objective lens (coarse and fine-denoted as C and D respectively). A statistical analysis was conduced to investigate factor effects and variations In response surfaces. Among four factors, main effect analysis revealed that A and D were Identified as the dominant factor. Moreover, B showed conflicting effect against C. The $R^2$ of statistical regression model constructed was about 69.6%. The model generated 3D response surface plots facilitated understanding of complex tactor effects.
Keywords
SEM; Statistical analysis; Main effect; Response surface model;
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