Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Statistical Analysis of Characteristics of Scanning Electron Microscope

주사전자현미경 특성의 통계적 해석

  • Kim, T.S. (School of Information, Communications & Electronics Engineering, The Catholic University of Korea) ;
  • Kim, W. (Department of Electronic Engineering, Sejong University) ;
  • Kim, D.H. (School of Mechanical Design & Automation Engineering, Seoul National University of Technology) ;
  • Kim, B. (Department of Electronic Engineering, Sejong University)
  • 김태선 (가톨릭대학교 정보통신전자공학부) ;
  • 김우석 (세종대학교 전자공학과) ;
  • 김동환 (서울산업대학교 기계설계자동화공학부) ;
  • 김병환 (세종대학교 전자공학과)
  • Published : 2007.08.31
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Abstract

A scanning electron microscope (SEM) is a complex system, consisting of many sophisticated components. For a systematic characterization, a $2^4$ full factorial experiment was conducted. The SEM components examined include condenser lens 1 and 2 (denoted as A and B, respectively), and Objective lens (coarse and fine-denoted as C and D respectively). A statistical analysis was conduced to investigate factor effects and variations In response surfaces. Among four factors, main effect analysis revealed that A and D were Identified as the dominant factor. Moreover, B showed conflicting effect against C. The $R^2$ of statistical regression model constructed was about 69.6%. The model generated 3D response surface plots facilitated understanding of complex tactor effects.

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References

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