• JSTS:Journal of Semiconductor Technology and Science
• /
• v.2 no.4
• /
• pp.259-267
• /
• 2002

We present a novel 3D fabrication method with single X-ray process utilizing an X-ray mask in which a micro-actuator is integrated. An X-ray absorber is electroplated on the shuttle mass driven by the integrated micro-actuator during deep X-ray exposures. 3D microstructures are revealed by development kinetics and modulated in-depth dose distribution in resist, usually PMMA. Fabrication of X-ray masks with integrated electrothermal xy-stage and electrostatic actuator is presented along with discussions on PMMA development characteristics. Both devices use $20-\mu\textrm{m}$-thick overhanging single crystal Si as a structural material and fabricated using deep reactive ion etching of silicon-on-insulator wafer, phosphorous diffusion, gold electroplating, and bulk micromachining process. In electrostatic devices, $10-\mu\textrm{m}-thick$ gold absorber on $1mm{\times}1mm$ Si shuttle mass is supported by $10-\mu\textrm{m}-wide$, 1-mm-long suspension beams and oscillated by comb electrodes during X-ray exposures. In electrothermal devices, gold absorber on 1.42 mm diameter shuttle mass is oscillated in x and y directions sequentially by thermal expansion caused by joule heating of the corresponding bent beam actuators. The fundamental frequency and amplitude of the electrostatic devices are around 3.6 kHz and $20\mu\textrm{m}$, respectively, for a dc bias of 100 V and an ac bias of 20 VP-P (peak-peak). Displacements in x and y directions of the electrothermal devices are both around $20{\;}\mu\textrm{m}$at 742 mW input power. S-shaped and conical shaped PMMA microstructures are demonstrated through X-ray experiments with the fabricated devices.

• Journal of the Mineralogical Society of Korea
• /
• v.10 no.2
• /
• pp.75-81
• /
• 1997

High pressure X-ray diffraction study was carried out on a natural FeO(OH)-goethite to investigate its compressibility at room temperature. Energy dispersive X-ray diffraction method was employed using Mao-Bell type diamond anvil cell with Synchrotron Radiation. MgO powder was compressed together with goethite for the high pressure determinations. Bulk modullus was determined to be 147.9 GPa by the Birch-Murnaghan equation of state under assumption of K0' of 4. This value was subjected to compare with its structural analogs and related materials.

• Corrosion Science and Technology
• /
• v.19 no.5
• /
• pp.231-238
• /
• 2020

Radioactive corrosion product specimens were analyzed using an electron probe microanalyzer (EPMA) and X-ray image mapping. It is difficult to analyze the composition of radioactive corrosion products using an EPMA due to the size and rough shape of the surfaces. It is particularly challenging to analyze the composition of radioactive corrosion products in the form of piled up, small grains. However, useful results can be derived by applying a semi-quantitative analysis method using an EPMA with X-ray images. A standard-less, semi-quantitative method for wavelength dispersive spectrometry. EPMA analysis was developed with the objective of simplifying the analytical procedure required. In this study, we verified the reasonable theory of semi-quantitative analysis and observed the semi-quantitative results using a sample with a good surface condition. Based on the validated results, we analyzed highly rough-surface radioactive corrosion products and assessed their composition. Finally, the usefulness of the semi-quantitative analysis was reviewed by verifying the results of the analysis of radioactive corrosion products collected from spent nuclear fuel rods.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.16 no.5
• /
• pp.157-161
• /
• 2007

There are technological changes to reduce the size and weight of electronic components and to accommodate multi-functions in them. To meet this trend, more complicated technological processes are required. To maintain the processes, more accurate inspection systems are also necessary. Therefore, new inspection methods are needed, which is differ from conventional inspection methods such as electrical test methods ICT(In-Circuit Test), FCT(Function Test) and visual test using optical equipments. One of the possible approaches is non-destructive test using X-ray. In this paper, an inspection method using X-ray is developed and applied to inspection of soldering state and internal defects of electronic components.

• Journal of the Korean Institute of Telematics and Electronics D
• /
• v.35D no.2
• /
• pp.70-77
• /
• 1998

An aerial image simulator for the synchroton X-ray proximity lithography system has been developed. The modal expansion method and Rayleigh-Sommerfeld diffraction theory are used in calculating the aerial image which is formed by diffracting of the partially coherent X-ray, Experimental results of PALC(POSTECH Advanced Lithography Center) lighography system and simulated results are compared. The experimental and theoretical values of the width of replicated lines are consisted with the relative error less than ~5%. The method to determine the divergent angle of X-ray from the analysis of the width of replicated lines is given.

• Proceedings of the KWS Conference
• /
• 2005.11a
• /
• pp.73-75
• /
• 2005

The objective of this study is to estimate the feasibility of X-ray diffraction method application for fatigue life assessment of the high-temperature pipeline steel such as main steam pipe, reheater pipe and header etc. in power plant. In this study, X-ray diffraction tests using various types of specimen simulated low cycle fatigue damage were performed in order to analyze fatigue properties when fatigue damage conditions become various stages such as 1/4, 1/2 and 3/4 of fatigue life, respectively. As a result of X-ray diffraction tests for specimens simulated fatigue damages, we conformed that the variation of the full width at half maximum intensity decreased in proportion to the increase of fatigue life ratio.

• Transactions of the Korean Society of Automotive Engineers
• /
• v.7 no.8
• /
• pp.248-261
• /
• 1999

The fatigue life of mechanical components and structures has been influenced by mechanical, material and environmental conditions. It is important to search out the load type and size for accurate cause of fracture at the damaged surface of material. The fractographic method by x-ray diffraction can utilize residual stress $\sigma$_r and half-value breadth B and find out the types and the mechanical conditions of fracture. This study showed the relationship between fracture mechanical parameters $\Delta$K, $K_{max}$ and X-ray residual stress $\sigma$_r for normalized SS41 steel with homogeneous crystal structure and M.E.F. dual phase steel(martensite encapsulated islands of ferrite). The fatigue crack propagation tests were carried out under stress ratios 0.1 and 0.5. The x-ray diffraction technique according to crack propatation direction was applied to fatigue fractured surface. Residual stress $\sigma$_r was independent on stress ratios by arrangement of $\Delta$K. The equation of $\sigma$_r$\Delta$K was established by the experimental data. Therefore, fracture mechanical parameters can be estimated can be estimated by the measurement of X-ray parameters.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
• /
• 2010.10a
• /
• pp.771-772
• /
• 2010

X-ray equipment used to diagnose a patient has a big defect of a patient's exposure to radiation caused in irradiating X-ray to the human body, ICRP restricts the permissible exposure dose of the human body. A number of studies has been proceeded to reduce these exposures. In this study the high voltage generator with inverter system, which is possible to increase the generation efficiency of X-ray and to control the precise output power was produced. Also, to minimize the ripple which is possible to occur in the direct voltage that is applied to X-ray tube the propagation rectification method was applied and the radiation reproducibility and properties were evaluated to use this for the diagnosis of patient.

• The Korean Journal of Ceramics
• /
• v.6 no.4
• /
• pp.385-389
• /
• 2000

Residual stresses in epitaxial films were measured by X-ray diffraction method. Lattice strains of the (hkl) planes measured along particular Ψ-angles were converted to the in-plane stress according to the equation of stress-strain tensor conversion. Residual tensile stresses were observed in epitaxial PbTiO$_3$ films deposited on (100) SrTiO$_3$ substrate. Tensile stresses approximately 0.9 GPa were measured in Pb-rich films, while it increased to approximately 2.0 GPa with the decreasing of Pb content in the case of Pb-poor films, which ascribed to the formation of lead and oxygen vacancies (expressed as x in Pb$_1-x$TiO$_3-x$).

• Journal of the Korean Physical Society
• /
• v.73 no.10
• /
• pp.1466-1472
• /
• 2018

A key comparison has been made between the air-kerma standards of the National Institute of Metrology (NIM), China, and other Asia Pacific Metrology Programme (APMP) members in the medium-energy X-ray. This paper reviews the primary standard Free-air ionization chamber correction factor experimental method and Monte Carlo simulation method in the NIM. The experimental method and the Monte Carlo simulation method are adopted to obtain the correction factor for the medium-energy X-ray primary standard free-air ionization chamber at 100 kV, 135 kV, 180 kV, 250 kV four CCRI reference qualities. The correction factor has already been submitted to the APMP as key comparison data and the results are in good agreement with those obtained in previous studies. This study shows that the experimental method and the EGSnrc simulation method are usually used in the measurement of the correction factor. In particular, the application of the simulation methods is more common.