• 한국재료학회지
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• 제23권10호
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• pp.550-554
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• 2013

As continued scaling becomes increasingly difficult, 3D integration has emerged as a viable solution to achieve higher bandwidths and good power efficiency. 3D integration can be defined as a technology involving the stacking of multiple processed wafers containing integrated circuits on top of each other with vertical interconnects between the wafers. This type of 3D structure can improve performance levels, enable the integration of devices with incompatible process flows, and reduce form factors. Through silicon vias (TSVs), which directly connect stacked structures die-to-die, are an enabling technology for future 3D integrated systems. TSVs filled with copper using an electro-plating method are investigated in this study. DC and pulses are used as a current source for the electro-plating process as a means of via filling. A TiN barrier and Ru seed layers are deposited by plasma-enhanced atomic layer deposition (PEALD) with thicknesses of 10 and 30 nm, respectively. All samples electroplated by the DC current showed defects, even with additives. However, the samples electroplated by the pulse current showed defect-free super-filled via structures. The optimized condition for defect-free bottom-up super-filling was established by adjusting the additive concentrations in the basic plating solution of copper sulfate. The optimized concentrations of JGB and SPS were found to be 10 and 20 ppm, respectively.

• 마이크로전자및패키징학회지
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• 제21권4호
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• pp.117-123
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• 2014

써멀비아나 수직 배선으로 사용하기 위한 Cu 관통비아를 열린 비아 hole의 top-down filling 도금공정과 bottom-up filling 도금공정으로 형성 후 미세구조를 관찰하였다. 직류도금전류를 인가하면서 열린 비아 홀 내를 top-down filling 도금하거나 bottom-up filling 도금함으로써 내부기공이 없는 건전한 Cu 관통비아를 형성하는 것이 가능하였다. 열린 비아 홀의 top-down filling 공정에서는 Cu filling 도금 후 시편의 윗면과 밑면에서 과도금된 Cu 층을 제거하기 위한 chemical-mechanical polishing(CMP) 공정이 요구되는데 비해, 열린 비아 홀의 bottom-up filling 공정에서는 과도금된 Cu층을 제거하기 위한 CMP 공정이 시편 윗면에서만 요구되는 장점이 있었다.

• 마이크로전자및패키징학회지
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• 제19권4호
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• pp.71-78
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• 2012

본 논문은 기존의 미세화 경향에 대한 bumpless through-silicon via (TSV)를 적용한 웨이퍼 레벨3차원 적층기술과 그 장점에 대해 소개한다. 3차원 적층을 위한 박막화 공정, 본딩 공정, TSV 공정별로 문제점과 그 해결책에 대해 자세히 설명하며, 특히 $10{\mu}m$ 이하로 박막화한 로직 디바이스의 특성 변화에 대한 결과를 보고한다. 웨이퍼 박막화 공정에서는 기계적 강도 변동 요인, 금속 불순물에 대한 gettering 대책에 대해 논의되며, 본딩 공정에서는 웨이퍼의 두께 균일도를 높이기 위한 방법에 대해 설명한다. TSV형성 공정에서는 누설 전류 발생 원인과 개선 방법을 소개한다. 마지막으로 본 기술을 적용한 3차원 디바이스에 대한 roadmap에 관해 논의할 것이다.

• JSTS:Journal of Semiconductor Technology and Science
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• 제16권2호
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• pp.204-209
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• 2016

The analyses on self-heating effect in 7 nm node non-rectangular Bulk FinFET device were performed using 3D device simulation with consideration to contact via and pad. From self-heating effect simulation, the position where the maximum lattice temperature occurs in Bulk FinFET device was investigated. Through the comparison of thermal resistance at each node, main heat transfer path in Bulk FinFET device can be determined. Self-heating effect with device parameter and operation temperature was also analyzed and compared. In addition, the impact of interconnects which are connected between the device on self-heating effect was investigated.

• ETRI Journal
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• 제36권4호
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• pp.635-642
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• 2014

Three-dimensional integrated circuits (3D ICs) implement heterogeneous systems in the same platform by stacking several planar chips vertically with through-silicon via (TSV) technology. 3D ICs have some advantages, including shorter interconnect lengths, higher integration density, and improved performance. Thermal-aware design would enhance the reliability and performance of the interconnects and devices. In this paper, we propose thermal-aware floorplanning with min-cut die partitioning for 3D ICs. The proposed min-cut die partition methodology minimizes the number of connections between partitions based on the min-cut theorem and minimizes the number of TSVs by considering a complementary set from the set of connections between two partitions when assigning the partitions to dies. Also, thermal-aware floorplanning methodology ensures a more even power distribution in the dies and reduces the peak temperature of the chip. The simulation results show that the proposed methodologies reduced the number of TSVs and the peak temperature effectively while also reducing the run-time.

• JSTS:Journal of Semiconductor Technology and Science
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• 제4권3호
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• pp.196-203
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• 2004

A three-dimensional (3D) IC technology platform is presented for high-performance, low-cost heterogeneous integration of silicon ICs. The platform uses dielectric adhesive bonding of fully-processed wafer-to-wafer aligned ICs, followed by a three-step thinning process and copper damascene patterning to form inter-wafer interconnects. Daisy-chain inter-wafer via test structures and compatibility of the process steps with 130 nm CMOS sal devices and circuits indicate the viability of the process flow. Such 3D integration with through-die vias enables high functionality in intelligent wireless terminals, as vertical integration of processor, large memory, image sensors and RF/microwave transceivers can be achieved with silicon-based ICs (Si CMOS and/or SiGe BiCMOS). Two examples of such capability are highlighted: memory-intensive Si CMOS digital processors with large L2 caches and SiGe BiCMOS pipelined A/D converters. A comparison of wafer-level 3D integration 'lith system-on-a-chip (SoC) and system-in-a-package (SiP) implementations is presented.

• 한국세라믹학회지
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• 제47권1호
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• pp.86-91
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• 2010

Among various fuel cells, solid oxide fuel cells (SOFCs) offer the highest energy efficiency, when taking into account the thermal recycling of waste heat at high temperature. However, the highest efficiency and lowest pollution for a SOFC can be achieved through the sophisticated control of its constituent components such as electrodes, electrolytes, interconnects and sealing materials. The electrochemical conversion efficiency of a SOFC is particularly dependent upon the performance of its electrode materials. The electrode materials should meet highly stringent requirements to optimize cell performance. In particular, both mass and charge transport should easily occur simultaneously through the electrode structure. Matter transport or charge transport is critically related to the configuration and spatial disposition of the three constituent phases of a composite electrode, which are the ionic conducting phase, electronic conducting phase, and the pores. The current work places special emphasis on the quantification of this complex microstructure of composite electrodes. Digitized images are exploited in order to obtain the quantitative microstructural information, i.e., the size distributions and interconnectivities of each constituent component. This work reports regarding zirconia-based composite electrodes.

• ETRI Journal
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• 제40권6호
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• pp.759-773
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• 2018

Uncore components such as on-chip memory systems and on-chip interconnects consume a large amount of energy in emerging embedded applications. Few studies have focused on next-generation analytical models for future chip-multiprocessors (CMPs) that simultaneously consider the impacts of the power consumption of core and uncore components. In this paper, we propose a convex-optimization approach to design heterogeneous uncore architectures for embedded CMPs. Our convex approach optimizes the number and placement of memory banks with different technologies on the memory layer. In parallel with hybrid memory architecting, optimizing the number and placement of through silicon vias as a viable solution in building three-dimensional (3D) CMPs is another important target of the proposed approach. Experimental results show that the proposed method outperforms 3D CMP designs with hybrid and traditional memory architectures in terms of both energy delay products (EDPs) and performance parameters. The proposed method improves the EDPs by an average of about 43% compared with SRAM design. In addition, it improves the throughput by about 7% compared with dynamic RAM (DRAM) design.

• 반도체디스플레이기술학회지
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• 제21권4호
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• pp.45-49
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• 2022

Through Silicon Via (TSV) is a technology that interconnects chips through silicon vias. TSV technology can achieve shorter distance compared to wire bonding technology with excellent electrical characteristics. Due to this characteristic, it is currently being used in many fields that needs faster communication speed such as memory field. However, there is performance degradation issue on TSV technology due to the parasitic capacitance. To deal with this problem, in this study, the parasitic capacitance with TSV design factors is analyzed using commercial tool. TSV design factors were set in three categories: size, aspect ratio, pitch. Each factor was set by dividing the range with TSV used for memory and package. Ansys electronics desktop 2021 R2.2 Q3D was used for the simulation to acquire parasitic capacitance data. DOE analysis was performed based on the reaction surface method. As a result of the simulation, the most affected factors by the parasitic capacitance appeared in the order of size, pitch and aspect ratio. In the case of memory, each element interacted, and in the case of package, it was confirmed that size * pitch and size * aspect ratio interact, but pitch * aspect ratio does not interact.

• 전자통신동향분석
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• 제39권1호
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• pp.62-73
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• 2024

Artificial intelligence relies on data-driven analysis, and the data processing performance strongly depends on factors such as memory capacity, bandwidth, and latency. Fast and large-capacity memory can be achieved by composing numerous high-performance memory units connected via high-performance interconnects, such as Compute Express Link (CXL). CXL is designed to enable efficient communication between central processing units, memory, accelerators, storage, and other computing resources. By adopting CXL, a composable computing architecture can be implemented, enabling flexible server resource configuration using a pool of computing resources. Thus, manufacturers are actively developing hardware and software solutions to support CXL. We present a survey of the latest software for CXL memory utilization and the most recent CXL memory emulation software. The former supports efficient use of CXL memory, and the latter offers a development environment that allows developers to optimize their software for the hardware architecture before commercial release of CXL memory devices. Furthermore, we review key technologies for improving the performance of both the CXL memory pool and CXL-based composable computing architecture along with various use cases.