• 한국표면공학회지
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• 제36권2호
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• pp.214-225
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• 2003

Trends in microelectronics packages such as low cost, miniaturization, high performance, and high reliability made area array interconnecting technologies including flip chip, CSP (Chip Scale Package) and BGA (Ball Grid Array) mainstream technologies. Underfill technology is used for the reliability of the area array technologies, thus electronics packaging industry regards it as very important technology In this paper, the underfill technology is reviewed and the recent advances in the underfill technology including new processes and materials are introduced. These includes reworkable underfills, no-flow underfills, molded underfills and wafer - level - applied underfills.

• ETRI Journal
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• 제38권6호
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• pp.1179-1189
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• 2016

A chemorheological analysis of a no-flow underfill was conducted using curing kinetics through isothermal and dynamic differential scanning calorimetry, viscosity measurement, and solder (Sn/27In/54Bi, melting temperature of $86^{\circ}C$) wetting observations. The analysis used an epoxy system with an anhydride curing agent and carboxyl fluxing capability to remove oxide on the surface of a metal filler. A curing kinetic of the no-flow underfill with a processing temperature of $130^{\circ}C$ was successfully completed using phenomenological models such as autocatalytic and nth-order models. Temperature-dependent kinetic parameters were identified within a temperature range of $125^{\circ}C$ to $135^{\circ}C$. The phenomenon of solder wetting was visually observed using an optical microscope, and the conversion and viscosity at the moment of solder wetting were quantitatively investigated. It is expected that the curing kinetics and rheological property of a no-flow underfill can be adopted in arbitrary processing applications.

• ETRI Journal
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• 제34권5호
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• pp.706-712
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• 2012

In previous work, novel maskless bumping and no-flow underfill technologies for three-dimensional (3D) integrated circuit (IC) integration were developed. The bumping material, solder bump maker (SBM) composed of resin and solder powder, is designed to form low-volume solder bumps on a through silicon via (TSV) chip for the 3D IC integration through the conventional reflow process. To obtain the optimized volume of solder bumps using the SBM, the effect of the volumetric mixing ratio of resin and solder powder is studied in this paper. A no-flow underfill material named "fluxing underfill" is proposed for a simplified stacking process for the 3D IC integration. It can remove the oxide layer on solder bumps like flux and play a role of an underfill after the stacking process. The bumping process and the stacking process using the SBM and the fluxing underfill, respectively, for the TSV chips are carefully designed so that two-tier stacked TSV chips are sucessfully stacked.

• Journal of Welding and Joining
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• 제25권3호
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• pp.45-50
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• 2007

The present study is devoted to investigate the transient flow and to estimate the filling time fur underfill process by using the numerical model established on the fluid momentum equation. For optimization of the design and selection of process parameters, this study extensively presents an estimation of the filling time in the view points of some important factors related to underfill materials and flip-chip geometry. From the results, we conclude that the filling time changes with respect to the under fill materials because of different viscosity, surface tension coefficient and contact angle. It reveals that, as the gap height increases, the filling time decreases substantially, and goes to the saturated values.

• 마이크로전자및패키징학회지
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• 제16권3호
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• pp.39-43
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• 2009

본 연구에서는 언더필 공정에서 플립칩과 기판사이의 모세관 작용에 의한 언더필 유동 경향에 대해 살펴보고, 언더필의 점도와 토출 위치에 따른 언더필 유동특성에 대해 살펴보았다. 플립칩의 사이즈는 $5mm{\times}5mm{\times}0.65^tmm$이며, 솔더 범프의 직경은 100 ${\mu}m$, 피치(pitch)간격은 150 ${\mu}m$, 총 1024 I/O(Input/Output)단자의 Full Grid 형태의 플립칩을 사용하였다. 기판으로 투명한 글래스 기판을 사용하였으며 플립칩 패키징의 접합 높이는 50 ${\mu}m$으로 제작하였다. 언더필의 점도 및 토출 위치가 유동특성에 미치는 영향을 살펴보기 위해, 세 종류의 점도 특성($2000{\sim}3700$cps)을 가지는 언더필과 토출 위치를 모서리와 중앙부위로 설정하였다. 언더필의 유동특성 및 충진 시간(filling time)은 CCD카메라를 사용하여 관찰하였다. 실험 결과, 언더필은 솔더 범프에 의한 유동 저항으로 인하여 가장자리 효과(edge effect)가 나타나 칩의 양쪽 측면 유동이 더 빠르게 진전되는 것을 알 수 있었다. 또한, 중앙 부위에서 토출한 경우에 비해 모서리에서 토출한 경우가, 가장자리 효과가 크고 이로 인해 칩의 양쪽 측면 유동이 더 빠르게 진전되어 충진 시간이 더 빠르다는 것을 알 수 있었다. 또한, 점도가 낮을수록, 언더필 유동이 빠르고 가장자리 효과가 크게 나타나며 전체 충진 시간이 감소됨을 알 수 있었다.

• 마이크로전자및패키징학회지
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• 제7권2호
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• pp.21-27
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• 2000

반도체 공정의 발전에 의해 새롭게 요구되어지는 underfill의 개발을 위해, epoxy/anhydride/ cobalt(II)촉매와 크기가 다른 두 종류(1 $\mu\textrm{m}$, 8 $\mu\textrm{m}$)의 용융 실리카를 충진제로 하여 충진율에 따른 시료의 물성을 측정하고 결과 값의 상호관계를 분석하였다. 우선 $80^{\circ}C$의 흐름공정에서는 경화반응을 일으키지 않고, 성형공정에서 빠른 경화와 100% 경화를 얻기 위해서는 15분간 $160^{\circ}C$로 경화시킨다는 조건에서 1.0 wt%의 촉매가 요구된다는 것을 경화 profile을 이용하여 알 수 있었다. 필러 충진에 따른 표면장력과 점도의 변화 관찰을 통해, real flow가 점도의 변화에 따라 급격한 변화를 보이는 것을 확인할 수 있었다. 1 $\mu\textrm{m}$의 필러가 충진된 시료의 경우 만족할 만한 흐름성을 보여주지 못하였지만 점도개선을 통해 gap크기가 작은 새로운 공정에 적절히 이용되리라 판단되며, 8 $\mu\textrm{m}$의 필러가 충진된 시료의 경우는 55~60 vol%에서 높은 흐름성을 나타내고 있다. 마지막으로 Matthew 모델은 높은 점도- 낮은 표면장력 underfill의 경우에만 침투거리 예측이 가능한 것을 확인할 수 있었다.

• Journal of Advanced Marine Engineering and Technology
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• 제37권4호
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• pp.351-357
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• 2013

플립칩 패키징에서 언더필 공정은 칩과 기판 사이를 에폭시로 채워서 본딩하는 공정으로 제품의 신뢰성 향상을 위해 수행되어 진다. 이 언더필 공정은 모세관 현상에 의해서 이루어지는데 유체의 계면과 범프의 배열이 계면 운동에 미치는 영향으로 인하여 공정 중 예기치 않은 공기층을 형성하게 된다. 본 연구에서는 모세관 언더필 유동에서 나타나는 비정상 계면 유동을 가시화하여 범프 배열에 따른 레이싱 효과와 계면의 병합 현상에 대하여 고찰하였다. 그 결과, 플립칩 내부의 범프가 고밀도일수록 유체의 흐름방향과 수직방향의 유동이 더욱 활발하게 진행되어 더 많은 공기층이 형성되었으며, 엇갈린 배열일 경우 직각 배열에 비해 이러한 현상이 더 지배적으로 나타난다.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2001년도 추계 기술심포지움
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• pp.134-137
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• 2001

The cure kinetics of a cycloalipatic epoxy / anhydride / Co(II) system for a no-flow underfill encapsulant, has been studied by using a differential scanning calorimetry(DSC) under isothermal and dynamic conditions over the temperature range of $160^{\circ}C ~220^{\circ}C$. The kinetic analysis was carried out by fitting dynamic/isothermal heating experimental data to the kinetic expressions to determine the reaction parameters, such as order of reaction and reaction constants. Diffusion-controlled reaction has been observed as the cure conversion increases and successfully analyzed by incorporating the diffusion control term into the rate equation. The prediction of reaction rates by the model equation corresponded well to experimental data at all temperature.

• 한국정밀공학회지
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• 제22권8호
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• pp.100-107
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• 2005

The objective of the study is to improve the quality of wheel bearing hub by the rigid-plastic finite element analysis and the response surface methodology. The rigid-plastic finite element codes, AFDEX-2D and DEFORM-3D, were used to analyze the two-dimensional and three-dimensional forging processes, respectively. The response surface analysis is used to find the minimum underfill by the variation of design variables such as the height of billet after upsetting and punch angles of blocker dies. The metal flow of forged product shows good agreement with the results from 2D and 3D analysis. Also, the quality of the wheel bearing hub has been improved by the optimization of design variables and the machining time has been reduced by the machining allowance.

• ETRI Journal
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• 제35권6호
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• pp.1152-1155
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• 2013

A cost-effective and simple solder on pad (SoP) process is proposed for a fine-pitch microbump interconnection. A novel solder bump maker (SBM) material is applied to form a 60-${\mu}m$ pitch SoP. SBM, which is composed of ternary Sn3.0Ag0.5Cu (SAC305) solder powder and a polymer resin, is a paste material used to perform a fine-pitch SoP through a screen printing method. By optimizing the volumetric ratio of the resin, deoxidizing agent, and SAC305 solder powder, the oxide layers on the solder powder and Cu pads are successfully removed during the bumping process without additional treatment or equipment. Test vehicles with a daisy chain pattern are fabricated to develop the fine-pitch SoP process and evaluate the fine-pitch interconnection. The fabricated Si chip has 6,724 bumps with a 45-${\mu}m$ diameter and 60-${\mu}m$ pitch. The chip is flip chip bonded with a Si substrate using an underfill material with fluxing features. Using the fluxing underfill material is advantageous since it eliminates the flux cleaning process and capillary flow process of the underfill. The optimized bonding process is validated through an electrical characterization of the daisy chain pattern. This work is the first report on a successful operation of a fine-pitch SoP and microbump interconnection using a screen printing process.