• Title/Summary/Keyword: Stable diffusion

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Thermal Stability Enhancement of Nickel Monosilicides by Addition of Iridium (이리듐 첨가에 의한 니켈모노실리사이드의 고온 안정화)

  • Yoon, Ki-Jeong;Song, Oh-Sung
    • Korean Journal of Materials Research
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    • v.16 no.9
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    • pp.571-577
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    • 2006
  • We fabricated thermal evaporated 10 nm-Ni/(poly)Si and 10 nm-Ni/1 nm-Ir/(poly)Si films to investigate the thermal stability of nickel monosilicide at the elevated temperatures by rapid annealing them at the temperatures of $300{\sim}1200^{\circ}C$ for 40 seconds. Silicides for salicide process was formed on top of both the single crystal silicon actives and the polycrystalline silicon gates. A four-point tester is used for sheet resistance. Scanning electron microscope and field ion beam were employed for thickness and microstructure evolution characterization. An x-ray diffractometer and an auger depth profile scope were used for phase and composition analysis, respectively. Nickel silicides with iridium on single crystal silicon actives and polycrystalline silicon gates showed low resistance up to $1200^{\circ}C$ and $800^{\circ}C$, respectively, while the conventional nickel monosilicide showed low resistance below $700^{\circ}C$. The grain boundary diffusion and agglomeration of silicides led to lower the NiSi stable temperature with polycrystalline silicon substrates. Our result implies that our newly proposed Ir added NiSi process may widen the thermal process window for nano CMOS process.

A Study on the Formation of Ti-capped NiSi and it′s Thermal Stability (Ti-capped NiSi 형성 및 열적안정성에 관한 연구)

  • 박수진;이근우;김주연;배규식
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07a
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    • pp.288-291
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    • 2002
  • Application of metal silicides such as TiSi$_2$ and CoSi$_2$ as contacts and gate electrodes are being studied. However, TiSi$_2$ due to the linewidth-dependance, and CoSi$_2$ due to the excessive Si consumption during silicidation cannot be applied to the deep-submicron MOSFET device. NiSi shows no such problems and can be formed at the low temperature. But, NiSi shows thermal instability. In this investigation, NiSi was formed with a Ti-capping layer to improve the thermal stability. Ni and Ti films were deposited by the thermal evaporator. The samples were then annealed in the N$_2$ ambient at 300-800$^{\circ}C$ in a RTA (rapid thermal annealing) system. Four point probe, FESEM, and AES were used to study the thermal properties of Ti-capped NiSi layers. The Ti-capped NiSi was stable up to 700$^{\circ}C$ for 100 sec. RTA, while the uncapped NiSi layers showed high sheet resistance after 600$^{\circ}C$. The AES results revealed that the Ni diffusion further into the Si substrate was retarded by the capping layer, resulting in the suppression of agglomeration of NiSi films.

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Ionic Liquid-based Electrolytes for Li Metal/Air Batteries: A Review of Materials and the New 'LABOHR' Flow Cell Concept

  • Bresser, Dominic;Paillard, Elie;Passerini, Stefano
    • Journal of Electrochemical Science and Technology
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    • v.5 no.2
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    • pp.37-44
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    • 2014
  • The $Li-O_2$ battery has been attracting much attention recently, due to its very high theoretical capacity compared with Li-ion chemistries. Nevertheless, several studies within the last few years revealed that Li-ion derived electrolytes based on alkyl carbonate solvents, which have been commonly used in the last 27 years, are irreversibly consumed at the $O_2$ electrode. Accordingly, more stable electrolytes are required capable to operate with both the Li metal anode and the $O_2$ cathode. Thus, due to their favorable properties such as non volatility, chemical inertia, and favorable behavior toward the Li metal electrode, ionic liquid-based electrolytes have gathered increasing attention from the scientific community for its application in $Li-O_2$ batteries. However, the scale-up of Li-$O_2$ technology to real application requires solving the mass transport limitation, especially for supplying oxygen to the cathode. Hence, the 'LABOHR' project proposes the introduction of a flooded cathode configuration and the circulation of the electrolyte, which is then used as an oxygen carrier from an external $O_2$ harvesting device to the cathode for freeing the system from diffusion limitation.

Two Novel 3-D Zinc Compounds with Mixture Ligands of H3BTB and 4,4'-Bipy: Crystal Structures, Blue Fluorescence and Single Point Energy Calculation

  • Zhang, Xiu-Cheng;Xu, Ling;Liu, Wen-Guang;Liu, Bing
    • Bulletin of the Korean Chemical Society
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    • v.31 no.9
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    • pp.2598-2602
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    • 2010
  • Two 3-D zinc framework compounds, $[Zn_6(BTB)_4(4,4'-bipy)_4(H_2O)_4]{\cdot}9H_2O$ (1) and $[Zn_3(BTB)_2(4,4'-bipy)_2(H_2O)_2]{\cdot}5H_2O$ (2) ($H_3BTB$ = 1,2,3-benzenetricarboxylic acid, 4,4'-bipy = 4,4'-bipyridine), are obtained from the diffusion method and hydrothermal reaction respectively. Though 1 and 2 has the same coordination geometries of zinc atoms and coordination mode of $BTB^{3-}$, their 2-D layers are different: mirror symmetric layers in 1; parallel ones in 2, further connecting by 4,4'-bipy into 3-D frameworks. The hydrothermal reaction of 2 results in a more stable 3-D framework than the one in 1, which is supported by the single point energy calculations. 1 and 2 show similar blue fluorescence at 417 nm, which can be assigned to LMCT.

Estimation and Analysis of MIMO Channel Parameters using the SAGE Algorithm (SAGE 알고리즘을 이용한 MIMO 채널 파라미터 추정과 분석)

  • Kim, Joo-Seok;Yeo, Bong-Gu;Choi, Hong-Rak;Kim, Kyung-Seok
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.17 no.5
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    • pp.79-84
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    • 2017
  • This paper is a multi-input multi-path (Multiple-input multiple-output: MIMO) using a space-alternating generalized expectation maximization(SAGE) algorithm in the parameter channel and determine the channel estimation performance. Estimated by the algorithm, SAGE time-varying channel environment, the channel parameters estimated from the parameters of the channel measured in the island region 781 of the band in order to compare the performance and compares the original data. This allows you to check the performance of the algorithm SAGE and is highly stable to delay spread (Delay Spread), the diffusion angle of arrival (Arrive of Angular Spread) performance in terms of accuracy down through the SAGE algorithm for estimating a more general calculation parameters.

A Study on EPMA on Ni-Cr Alloy by Nb content for Porcelain Fused to Metal Crown (Nb이 첨가된 금속소부도재관용 Ni-Cr 합금 표면의 EPMA 관찰)

  • Kim, Chi-Young;Choi, Sung-Min;Cho, Hyeon-Seol
    • Journal of Technologic Dentistry
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    • v.28 no.1
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    • pp.19-26
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    • 2006
  • The effect of Nb on interfacial bonding characteristics of Ni-Cr alloy for porcelain fused to metal crown (PFM) has been studied in order to investigate oxide layer. A specimens of Ni-Cr alloy, which is 0.8mm in thickness, within the porcelain furnace of 1,000$^{\circ}C$ with four tests such as air, vacuum, air for 5 minutes and vacuum for 5 minutes in order to examine an oxide behavior of alloy surface generated by the adding of Nb to be controlled at a rate of 0, 1, 3 and 5. Oxide film was observed form of the fired specimens with scanning electron microscope (SEM), and at the same time it measured Electron Probe Micro Analyzer (EPMA). The result of this study were as follows: 1. Cr oxide film and Nb oxide film were observed from the surface of specimen to be controlled at a rate of Nb 1%. 2. Nb oxide film was observed from the interface of specimens to be controlled at a rate of Nb 1% and 3%. 3. The stability of oxide films that treated in air were more stable than treated under vacuum.

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Inhibitory Effect of Sorbus cortex Extract on (1,3)-$\beta$-Glucan Synthase (정공피 추출물의 (1,3)$\beta$-Glucan Synthase에 대한 억제효과)

  • You, Myung-Ja;Kim, Bo-Mi;Lee, Jeong-Ho;Lee, Young-Hang;Chai, Kyu-Yun;Baek, Seung-Hwa
    • Journal of Physiology & Pathology in Korean Medicine
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    • v.22 no.5
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    • pp.1196-1201
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    • 2008
  • A examination of the kinetic properties of UDP-glucose : (1,3)-$\beta$-glucan (callose) synthase from mung bean seedings (Sorbus cortex) shows that these enzymes have a complex interaction with UDP-glucose and various effectors. Deoxynojirimycin increased the inhibitory effect of (1,3)-$\beta$-glucan synthase at the concentration-dependent manner by fluorescence assay. The inhibitory effect of Fr. 2-16 (97.15%) showed higher than that of deoxynojirimycin (80.63%). Fr. 2-3 inhibited the growth of the Candida albicans at 1 mm inhibition zone by disk diffusion method. These results suggest that Sorbus cortex extract can be used as a stable antifungal material.

Synthesis of (Ti,Al)N Powder by the Direct Nitridation(II) (직접질화법에 의한 (Ti,Al)N계 복합질화물의 합성(II))

  • Cho, Young-Soo;Lee, Young-Ki;Sohn, Yong-Un;Park, Kyong-Ho;Kim, Seok-Yoon
    • Journal of the Korean Society for Heat Treatment
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    • v.9 no.3
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    • pp.219-227
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    • 1996
  • The purpose of this research is to develop the technology for the synthesis of (Ti,Al)N powder, which shows simultaneously the excellent properties of TiN and AlN, from the Ti-Al intermetallic compounds by the direct nitriding method. The effects of variables such as temperature, Ti-Al intermetallic compounds ($TiAl_3$, TiAl and $Ti_3Al$) were investigated by TG, XRD and SEM. The (Ti,Al)N powder can be easily synthesized from the intermetallic compounds by the direct nitriding method. Among the intermetallic compounds, the nitriding behavior increased with TiAl> $Ti_3Al$ > $TiAl_3$, as the difference of diffusion coefficient for nitrogen in each materials. The ternary nitride such as $Ti_2AlN$ and $Ti_3Al_2N_2$ can be synthesized by the direct nitriding method, although the ternary nitride coexist with TiN and AlN. The ternary nitrides are stable below $1400^{\circ}C$, but these are gradually decomposed into TiN and AlN above $1400^{\circ}C$.

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The Effect of Disaster Prevention of Industrial Field and Failure Detection of Very Small Components for IT (IT용 초소형부품의 불량검출과 산업현장의 재해방지 효과)

  • Park, Dea-Young;Jeong, Yang Guen;Choi, Sun Mi;Byun, Jea Young;Choi, Won-Sik
    • Journal of the Korean Society of Industry Convergence
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    • v.18 no.1
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    • pp.18-29
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    • 2015
  • This paper presents a feasibility study of a fresh air load reduction system by using an underground double floor space. The system was introduced into a real building and was examined by the field measurement. Judging from the measurements during three years(1999~2001), the state of the system operation was very stable through this period and it was clear that the system contributes to reduction of energy consumption for air-conditioning. Futhermore, a simulation model used the simple heat diffusion equation was developed to simulate its thermal characteristics and performances. The simulations resulted in air temperature in good agreement with the measurements. Also, from the result of numerical analysis, it is clear that the amount of heat supply by using this system is more than the amount of energy loss to the room above it. Therefore, it is concluded that this systems is very useful and the proposed numerical model can be used for the prediction of system thermal performance.

Preparation and properties of BST (Barium Strontium Titanate) thin films for the capacitor dielectrics of ULSI DRAM's (ULSI DRAM의 capacitor 절연막용 BST(Barium Strontium Titanate)박막의 제작과 특성에 관한 연구)

  • 류정선;강성준;윤영섭
    • Electrical & Electronic Materials
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    • v.9 no.4
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    • pp.336-343
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    • 1996
  • We have studied the preparation and the properties of $Ba_{1-x}$Sr$_{x}$TiO$_{3}$(BST) thin films by using the sol-gel method. Through the comparison of the effects of various solvents and additives in making solutions, we establish the production method of the stable solution which generates the high quality of BST film. We also set up the heat-treatment conditions for depositing the BST thin film through the TGA and XRD analyses. Through the comparison of the surface conditions of BST films deposited on Pt/Ta/SiO$_{2}$/Si and Pt/Ti/SiO$_{2}$/Si substrates, we find that Ta is more efficient diffusion barrier of Si than Ti so that Ta layer prevents the formation of hillocks. We fabricate the planar type capacitor and measure the dielectric properties of the BST thin film deposited on the Pt/Ta/SiO$_{2}$/Si substrate. Dielectric constant and dielectric loss tangent at 1V, 10kHz, and leakage current density at 3V of the BST thin film are 339, 0.052 and 13.3.mu.A/cm$^{2}$, respectively.ely.

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