• 제목/요약/키워드: Source/Drain Contacts

검색결과 27건 처리시간 0.032초

Direct Printing법에 의해 제작된 OTFT용 source & drain 전극용 전도성 페이스트 제조 (The Manufacture of Conductive paste for OTFT source & drain contacts Fabricated by Direct printing method)

  • 이미영;남수용;김성현
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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    • pp.384-385
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    • 2006
  • We studied about conductive pastes of the source-drain contacts for OTFTs(organic thin-film transistors) fabricated by direct printing(screen printing) method. We used Ag and conductive carbon black powder as the conductive fillers of pastes. The conductive pastes were manufactured by various dispersing agents and dispersing conditions and source-drain contacts with $100{\mu}m$ of channel length were fabricated. We could obtain the OTFTs which exhibited different field-effect behaviors over a range of source-dram and gate voltages depending on a kind of conductive fillers used conductive pastes.

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스크린 인쇄법에 의해 제작된 유기 박막 트랜지스터용 전극에 관한 연구 (A Study on Contacts for Organic thin-film transistors fabricated by Screen Printing Method)

  • 이미영;남수용
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2006년도 춘계학술대회 논문집
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    • pp.591-592
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    • 2006
  • We studied about the manufacture of the drain-source contacts for OTFTs(organic thin-film transistors) by using screen printing method. The conductive fillers used Ag and carbon black. The conductive contacts with $100{\mu}m$ of channel length were screen printed on a silicon dioxide gate dielectric layer and, the pentacene semiconductor was deposited via vacuum deposition. As a result of studying various conductive pastes, we could obtain the OTFTs which exhibited field-effect behavior over arrange of drain-source and gate voltages, similar to devices employing deposited Au contacts. By using screen-printing with conductive paste, the contacts are processed at low temperature, thereby facilitating their integration with heat sensitive substrates.

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불규칙한 소오스/드레인 금속 접촉을 갖는 비대칭 n-MOSFET의 전기적 특성 및 모델 (Electrical Characteristics and Models for Asymmetric n-MOSFET′s with Irregular Source/Drain Contacts)

  • 공동욱;정환희;이재성;이용현
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 1999년도 추계종합학술대회 논문집
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    • pp.208-211
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    • 1999
  • Abstract - Electrical characteristics or asymmetric n-MOSFET's with different source and drain geometry are experimently investigated using test structures having various gate width. Saturation drain current and resistance in linear region are estimated by a simple schematic model, which consists of conventional device having parasitic resistor. A comparison of experimental results of symmetric and asymmetric devices gives the parasitic resistance caused by abnormal device structure. The suggested model shows good agreement with the measured drain current for both forward- and reverse-modes.

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미세접촉프린팅 공정을 이용한 유연성 유기박막소자(OTFT)설계 및 제작 (Design and Fabrication of Flexible OTFTs by using Nanocantact Printing Process)

  • 조정대;김광영;이응숙;최병오
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.506-508
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    • 2005
  • In general, organic TFTs are comprised of four components: gate electrode, gate dielectric, organic active semiconductor layer, and source and drain contacts. The TFT current, in turn, is typically determined by channel length and width, carrier field effect mobility, gate dielectric thickness and permittivity, contact resistance, and biasing conditions. More recently, a number of techniques and processes have been introduced to the fabrication of OTFT circuits and displays that aim specifically at reduced fabrication cost. These include microcontact printing for the patterning of metals and dielectrics, the use of photochemically patterned insulating and conducting films, and inkjet printing for the selective deposition of contacts and interconnect pattern. In the fabrication of organic TFTs, microcontact printing has been used to pattern gate electrodes, gate dielectrics, and source and drain contacts with sufficient yield to allow the fabrication of transistors. We were fabricated a pentacene OTFTs on flexible PEN film. Au/Cr was used for the gate electrode, parylene-c was deposited as the gate dielectric, and Au/Cr was chosen for the source and drain contacts; were all deposited by ion-beam sputtering and patterned by microcontact printing and lift-off process. Prior to the deposition of the organic active layer, the gate dielectric surface was treated with octadecyltrichlorosilane(OTS) from the vapor phase. To complete the device, pentacene was deposited by thermal evaporation and patterned using a parylene-c layer. The device was shown that the carrier field effect mobility, the threshold voltage, the subthreshold slope, and the on/off current ratio were improved.

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Screen-printed Source and Drain Electrodes for Inkjet-processed Zinc-tin-oxide Thin-film Transistor

  • Kwack, Young-Jin;Choi, Woon-Seop
    • Transactions on Electrical and Electronic Materials
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    • 제12권6호
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    • pp.271-274
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    • 2011
  • Screen-printed source and drain electrodes were used for a spin-coated and inkjet-processed zinc-tin oxide (ZTO) TFTs for the first time. Source and drain were silver nanoparticles. Channel length was patterned using screen printing technology. Different silver nanoinks and process parameters were tested to find optimal source and drain contacts Relatively good electrical properties of a screen-printed inkjet-processed oxide TFT were obtained as follows; a mobility of 1.20 $cm^2$/Vs, an on-off current ratio of $10^6$, a Vth of 5.4 V and a subthreshold swing of 1.5 V/dec.

펜타센 박막의 두께와 전극위치가 펜타센 TFT 성능에 미치는 영향 (Effects of Pentacene Thickness and Source/Drain Contact Location on Performance of Penatacene TFT)

  • 이명원;김광현;송정근
    • 대한전자공학회논문지SD
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    • 제39권12호
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    • pp.1001-1007
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    • 2002
  • 된 논문에서는 펜타센을 활성층으로 사용하는 유기박막트랜지스터(OTFT)의 펜타센의 두께, 그리고 소오스 및 드레인 전극의 위치에 따른 소자의 성능 변화에 대하여 연구하였다. 펜타센 박막의 두께가 증가하면 그레인 상태가 박막상태에서 벌크상태로 변화하면서 결정도가 악화되어 성능이 열화하였고, 소오스와 드레인 전극을 펜타센 위에 제작한 소자의 경우 접촉저항은 감소하였으나 누설전류가 증가하여 전류 점멸비가 감소하였다. 그러므로, 펜타센의 두께는, 300Å∼700Å 내외, 그리고 전극은 펜타센 아래에 위치하는 것이 적합한 것으로 확인되었다.

서로 다른 소스/드레인 전극물질을 이용한 비정질 In-Ga-Zn-O 박막트랜지스터 성능향상 (Performance Improvement of Amorphous In-Ga-Zn-O Thin-film Transistors Using Different Source/drain Electrode Materials)

  • 김승태;조원주
    • 한국전기전자재료학회논문지
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    • 제29권2호
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    • pp.69-74
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    • 2016
  • In this study, we proposed an a-IGZO (amorphous In-Ga-Zn-O) TFT (thin-film transistor) with off-planed source/drain structure. Furthermore, two different electrode materials (ITO and Ti) were applied to the source and drain contacts for performance improvement of a-IGZO TFTs. When the ITO with a large work-function and the Ti with a small work-function are applied to drain electrode and source contact, respectively, the electrical performances of a-IGZO TFTs were improved; an increased driving current, a decreased leakage current, a high on-off current ratio, and a reduced subthreshold swing. As a result of gate bias stress test at various temperatures, the off-planed S/D a-IGZO TFTs showed a degradation mechanism due to electron trapping and both devices with ITO-drain or Ti-drain electrode revealed an equivalent instability.

비정질 실리코 박막 트랜지스터의 직렬 저항에 관한 분석 (Analysis for Series Resistance of Amorphous Silicon Thin Film Transistor)

  • Kim, Youn-Sang;Lee, Seong-Kyu;Han, Min-Koo
    • 대한전기학회논문지
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    • 제43권6호
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    • pp.951-957
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    • 1994
  • We present a new model for the series resistance of inverted-staggered amorphous silicon (a-Si) thin film transistors (TFT's) by employing the current spreading under the source and the drain contacts as well as the space charge limited current model. The calculated results based on our model have been in good agreements with the measured data over a wide range of applied voltage, gate-to-source and gate-to-drain overlap length, channel length, and operating temperature. Our model shows that the contribution of the series resistances to the current-voltage (I-V) characteristics of the a-Si TFT in the linear regime is more significant at low drain and high gate voltages, for short channel and small overlap length, and at low operating temperature, which have been verified successfully by the experimental measurements.

소자 시뮬레이션을 이용한 ESD 보호용 NMOS 트랜지스터의 항복특성 분석 (Analysis on the breakdown characteristics of ESD-protection NMOS transistors based on device simulations)

  • 최진영;임주섭
    • 전자공학회논문지D
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    • 제34D권11호
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    • pp.37-47
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    • 1997
  • Utilizing 2-dimensional device simulations incorporating lattic eheating models, we analyzed in detail the DC breakdown characterisics of NMOS trasistors with different structures, which are commonly used as ESD protection transistors. The mechanism leading to device failure resulting from electrostatic discharge was explained by analyzing the 1st and 2nd breakdown characteristics of LDD devices. Also a criteria for more robust designs of NMOS transistor structures against ESD was suggested by examining the characteristics changes with changes in structural parameters such as the LDD doping concentration, the drain junction depth, the distance between source/drain contacts, and the source junction area.

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