• 대한금속재료학회지
• /
• 제46권9호
• /
• pp.585-592
• /
• 2008

Flip-chip bonding using Cu-Sn mushroom bumps composed of Cu pillar and Sn cap was accomplished, and the contact resistance and the thermal cycling reliability of the Cu-Sn mushroom bump joints were compared with those of the Sn planar bump joints. With flip-chip process at a same bonding stress, both the Cu-Sn mushroom bump joints and the Sn planar bump joints exhibited an almost identical average contact resistance. With increasing a bonding stress from 32 MPa to 44MPa, the average contact resistances of the Cu-Sn mushroom bump joints and the Sn planar bump joints became reduced from $30m{\Omega}/bump$ to $25m{\Omega}/bump$ due to heavier plastic deformation of the bumps. The Cu-Sn mushroom bump joints exhibited a superior thermal cycling reliability to that of the Sn planar bump joints at a bonding stress of 32 MPa. While the contact resistance characteristics of the Cu-Sn mushroom bump joints were not deteriorated even after 1000 thermal cycles ranging between $-40^{\circ}C$ and $80^{\circ}C$, the contact resistance of the Sn planar bump joints substantially increased with thermal cycling.

• 대한금속재료학회지
• /
• 제46권1호
• /
• pp.33-38
• /
• 2008

The interfacial reactions and shear strength of pure Sn solder bump were investigated with different under bump metallizations (UBMs) and reflow numbers. Two different UBMs were employed in this study: Cu and Ni. Cu6Sn5 and Cu3Sn intermetallic compounds (IMCs) were formed at the bump/Cu UBM interface, whereas only a Ni3Sn4 IMC was formed at the bump/Ni UBM interface. These IMCs grew with increasing reflow number. The growth of the Cu-Sn IMCs was faster than that of the Ni-Sn IMC. These interfacial reactions greatly affected the shear properties of the bumps.

• 마이크로전자및패키징학회지
• /
• 제15권3호
• /
• pp.9-17
• /
• 2008

전기도금법으로 Cu 머쉬룸 범프를 형성하고 Sn 기판 패드에 플립칩 본딩하여 Cu 머쉬룸 범프 접속부를 형성하였으며, 이의 접속저항을 Sn planar 범프 접속부와 비교하였다. $19.1\sim95.2$ MPa 범위의 본딩응력으로 형성한 Cu머쉬룸 범프 접속부는 $15m\Omega$/bump의 평균 접속저항을 나타내었다. Cu머쉬룸 범프 접속부는 Sn planar범프 접속부에 비해 더 우수한 접속저항 특성을 나타내었다. 캡 표면에 $1{\sim}w4{\mu}m$ 두께의 Sn 코팅층을 전기도금한 Cu 머쉬룸 범프 접속부의 접속저항은 Sn 코팅층의 두께에 무관하였으나 캡 표면의 Sn코팅층을 리플로우 처리한 Cu머쉬룸 범프 접속부에서는 접속저항이 Sn 코팅층의 두께와 리플로우 시간에 크게 의존하였다.

• 대한용접접합학회:학술대회논문집
• /
• 대한용접접합학회 2003년도 추계학술발표대회 개요집
• /
• pp.86-88
• /
• 2003

The characteristic of induction heating solder bump(solder ball: Sn-37Pb, Sn-3.5Ag, Sn-3.0Ag-0.5Cu) has analyzed in this paper. The initial condition of induction heating depends on the time and current. The shape of lead-free solder bump is better than lead solder. The shear strength of lead solder bump has decreased with aging time. The average of shear strength of solder bump is about 10N, 11N, and 11N respectively. The lead-free solder bump's shear strength is better than lead solder and varies irregularly with aging time.

• 한국마이크로전자및패키징학회:학술대회논문집
• /
• 한국마이크로전자및패키징학회 2002년도 추계기술심포지움논문집
• /
• pp.49-53
• /
• 2002

The Sn-Cu eutectic solder bump formation ($140{\mu}{\textrm}{m}$ diameter, $250{\mu}{\textrm}{m}$ pitch) by electroplating was studied for flip chip package fabrication. The effect of current density and plating time on Sn-Cu deposit was investigated. The morphology and composition of plated solder surface was examined by scanning electron microscopy. The plating thickness increased with increasing time. The plating rate increased generally according to current density. After the characteristics of Sn-Cu plating were investigated, Sn-Cu solder bumps were fabricated on optimal condition of 5A/dm$^2$, 2hrs. Ball shear test after reflow was performed to measure adhesion strength between solder bump and UBM (Under Bump Metallization). The shear strength of Sn-Cu bump after reflow was higher than that of before reflow.

• 마이크로전자및패키징학회지
• /
• 제10권4호
• /
• pp.39-46
• /
• 2003

플립칩용으로 Sn-Cu 공정 솔더 범프를 전해도금을 이용하여 제조하고 특성을 연구하였다. Si 웨이퍼 위에 UBM(Under Bump Metallization)으로 Al(400 nm)/Cu(300 nm)/Ni(400 nm)/Au(20 nm)를 전자빔 증착기로 증착하였다. 전류밀도가 1 A/d$\m^2$에서 8 A/d$\m^2$으로 증가함에 따라 Sn-Cu 솔더의 도금속도는 0.25 $\mu\textrm{m}$/min에서 2.7 $\mu\textrm{m}$/min으로 증가하였다. 이 전류밀도의 범위에서 전해도금된 Sn-Cu 도금 합금의 조성은 Sn-0.9∼1.4 wt%Cu의 거의 일정한 상태를 유지하였다. 도금 전류밀도 5 A/d$\m^2$, 도금시간 2hrs, 온도 $20^{\circ}C$의 조건에서 도금하였을 때, 기둥 직경 약 120 $\mu\textrm{m}$인 양호한 버섯 형태의 Sn-Cu 범프를 형성할 수 있었다. 버섯형 도금 범프를 $260^{\circ}C$에서 리플로우 했을 때 직경 약 140 $\mu\textrm{m}$의 구형 범프가 형성되었다. 화학성분의 균일성을 분석한 결과 버섯형 범프에서 존재하던 범프내 Sn 등 성분 원소의 불균일성은 구형 범프에서는 상당 부분 해소 되었다.

• Journal of Welding and Joining
• /
• 제20권5호
• /
• pp.72-77
• /
• 2002

Flip-chip interconnection that uses solder bump is an essential technology to improve the performance of microelectronics which require higher working speed, higher density, and smaller size. In this paper, the shear strength of Cr/Cr-Cu/Cu UBM structure of the high-melting solder b01p and that of low-melting solder bump after aging is evaluated. Observe intermetallic compound and bump joint condition at the interface between solder and UBM by SEM and TEM. And analyze the shear load concentrated to bump applying finite element analysis. As a result of experiment, the maximum shear strength of Sn-97wt%Pb which was treated 900 hrs aging has been decreased as 25% and Sn-37wt%Pb sample has been decreased as 20%. By the aging process, the growth of $Cu_6Sn_5$ and $Cu_3Sn$ is ascertained. And the tendency of crack path movement that is interior of a solder to intermetallic compound interface is found.

• 한국마이크로전자및패키징학회:학술대회논문집
• /
• 한국마이크로전자및패키징학회 2003년도 기술심포지움 논문집
• /
• pp.68-71
• /
• 2003

The reaction of ultra-small eutectic 58Bl-42Sn solder bump with Au/Ni/Ti and Au/Cu/Ti UBMs during reflow was studied. The eutectic Bi-Sn solder bumps of $46{\mu}m$ diameter were fabricated by using the evaporation method and were reflowed using the rapid thermal annealing system. The intermetallic compound was characterized using a SEM, an EDS, and an XRD. The $(Cu_xAu_{1-x})_6Sn_5$ compounds formed at the interface between Bi-Sn solder and Au/Cu/Ti UBM. On the other hand, in the Bi-Sn solder bump on Au/Ni/Ti UBM, the faceted and rectangular intermetallic compounds were observed on the solder bump surface and inside the solder bump as well as at the UBM interface. These intermetallic compounds were Identified as $(Au_{l-x-y}Bi_xNi_y)Sn_2$ phase.

• Journal of Welding and Joining
• /
• 제31권3호
• /
• pp.4-10
• /
• 2013

In electronic industry, the trend of future electronics will be flexible, bendable, wearable electronics. Until now, there is few study on bonding technology and reliability of bonding joint between chip with micro solder bump and flexible substrate. In this study, we investigated joint properties of Si chip with eutectic Sn-58Bi solder bump on Cu pillar bump bonded on flexible substrate finished with ENIG by flip chip process. After flip chip bonding, we observed microstructure of bump joint by SEM and then evaluated properties of bump joint by die shear test, thermal shock test, and bending test. After thermal shock test, we observed that crack initiated between $Cu_6Sn_5IMC$ and Sn-Bi solder and then propagated within Sn-Bi solder and/or interface between IMC and solder. On the other hands, We observed that fracture propated at interface between Ni3Sn4 IMC and solder and/or in solder matrix after bending test.

• Journal of Welding and Joining
• /
• 제19권5호
• /
• pp.520-525
• /
• 2001

The Sn-Pb eutectic solder bump formation ($150\mu\textrm{m}$ diameter, $250\mu\textrm{m}$ pitch) by electroplating was studied for flip chip package fabrication. The effect of current density and plating time on Sn-Pb deposit was investigated. The morphology and composition of plated solder surface was examined by scanning electron microscopy. The plating thickness increased wish increasing time. The plating rate became constant at limiting current density. After the characteristics of Sn-Pb plating were investigated, Sn-Pb solder bumps were fabricated in optimal condition of $7A/dm^$. 4hr. Ball shear test after reflow was performed to measure adhesion strength between solder bump and UBM (Under Bump Metallurgy). The shear strength of Sn-Pb bump after reflow was higher than that of before reflow.