• Title/Summary/Keyword: Si through-via

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Effect of chemical vapor depositon capacity on the physical characteristics of carbon-coated SiOx (화학기상증착 코팅로의 용량에 따른 탄소 코팅 SiOx의 물리적 특성 변화 분석)

  • Maeng, Seokju;Kwak, Woojin;Park, Heonsoo;Kim, Yong-Tae;Choi, Jinsub
    • Journal of the Korean institute of surface engineering
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    • v.55 no.6
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    • pp.441-447
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    • 2022
  • Silicon-based materials are one of the most promising anode active materials in lithium-ion battery. A carbon layer decorated on the surface of silicon particles efficiently suppresses the large volume expansion of silicon and improves electrical conductivity. Carbon coating through chemical vapor deposition (CVD) is one of the most effective strategies to synthesize carbon- coated silicon materials suitable for mass production. Herein, we synthesized carbon coated SiOx via pilot scale CVD reactor (P-SiOx@C) and carbon coated SiOx via industrial scale CVD reactor (I-SiOx@C) to identify physical characteristic changes according to the CVD capacity. Reduced size silicon domains and local non-uniform carbon coating layer were detected in I-SiOx@C due to non-uniform temperature distribution in the industrial scale CVD reactor with large capacity, resulting in increased surface area due to severe electrolyte consumption.

Synthesis of an oxynitride-based green phosphor $Ba_3Si_6O_{12}N_2:Eu^{2+}$ via an aqueous-solution process, using propylene-glycol-modified silane

  • Yasushita, Chihiro;Kato, Hideki;Kakihana, Masato
    • Journal of Information Display
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    • v.13 no.3
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    • pp.107-111
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    • 2012
  • An almost pure phase of $Ba_3Si_6O_{12}N_2$ doped with $Eu^{2+}$ was successfully synthesized through the ammonia nitridation of an oxide precursor prepared through an aqueous-solution method, using propylene- glycol-modified silane. The emission peak intensity of the obtained $Ba_3Si_6O_{12}N_2:Eu^{2+}$ was -2.2 times higher than that of the sample prepared through a solid-state reaction method.

A cross-linking poly(urethane acrylate) binder for Si negative electrode in Li-ion batteries (LIBs)

  • Jang, Suk-Yong
    • Journal of the Korean Applied Science and Technology
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    • v.32 no.4
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    • pp.718-723
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    • 2015
  • For the fabrication of the Si negative electrode in Li-ion batteries (LIBs) containing the cross-linking polymer binder, in this work, the urethane acrylate (UA) oligomer was synthesized via a simple synthetic process. The cross-linked poly(urethane acrylate) (CPUA)/carbone black (CB)/Si composite (CPUA/CB/Si composite) was fabricated through reactions between their reactive vinyl segments in the UA oligomer. Interestingly, the CPUA/CB/Si composite showed better cycle performance than the poly(vinylidene fluoride) (PVdF)/CB/Si composite (PVdF/CB/Si composite) and the polyurethane (PU)/CB/Si composite (PU/CB/Si composite). The CPUA/CB/Si composite had the best lithiation of about $2586mAh\;g^{-1}$. The UA oligomer showed a good compatibility with the electrode materials and current collector after and before a curing process.

Study of Cu filling characteristic on Silicon wafer via according to seed layer (Silicon wafer via 상의 기능성 박막층 종류에 따른 Cu filling 특성 연구)

  • Kim, In-Rak;Lee, Wang-Gu;Lee, Yeong-Gon;Jeong, Jae-Pil
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2009.10a
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    • pp.171-172
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    • 2009
  • TSV(through via silicon)를 이용한 Via의 Cu 충전에서 Seed 층의 역할은 전류의 흐름을 가능하게 하는 중요한 역할을 하고 있다. Via에 각각 Ti/Au, Ti/Cu를 증착한 후 Ti/Cu가 Ti/Au를 대체 할 수 있는지를 알아보기 위해 먼저 실리콘 웨이퍼에 via를 형성하고, 형성된 via에 기능성 박막층으로 절연층(SiO2) 및 시드층을 형성하였다. 전해도금을 이용하여 Cu를 충전한 결과 Ti/Au 및 Ti/Cu를 증착한 두 시편 모두 via와 seed층 접합면에 박리 등의 결함이 없었고, via 내부 또한 void나 seam 등이 관찰되지 않고 우수하게 충전된 것을 확인할 수 있었다.

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Synthesis of Silicon Carbide Whiskers (I) : Reaction Mechanism and Rate-Controlling Reaction (탄화규소 휘스커의 합성(I) : 반응기구의 율속반응)

  • 최헌진;이준근
    • Journal of the Korean Ceramic Society
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    • v.35 no.12
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    • pp.1329-1336
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    • 1998
  • A twt -step carbothermal reduction scheme has been employed for the synthesis of SiC whiskers in an Ar or a H2 atmosphere via vapor-solid two-stage and vapor-liquid-solid growth mechanism respectively. It has been shown that the whisker growth proceed through the following reaction mechanism in an Ar at-mosphere : SiO2(S)+C(s)-SiO(v)+CO(v) SiO(v)3CO(v)=SiC(s)whisker+2CO2(v) 2C(s)+2CO2(v)=4CO(v) the third reaction appears to be the rate-controlling reaction since the overall reaction rates are dominated by the carbon which is participated in this reaction. The whisker growth proceeded through the following reaction mechaism in a H2 atmosphere : SiO2(s)+C(s)=SiO(v)+CO(v) 2C(s)+4H2(v)=2CH4(v) SiO(v)+2CH4(v)=SiC(s)whisker+CO(v)+4H2(v) The first reaction appears to be the rate-controlling reaction since the overall reaction rates are enhanced byincreasing the SiO vapor generation rate.

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Interconnection Processes Using Cu Vias for MEMS Sensor Packages (Cu 비아를 이용한 MEMS 센서의 스택 패키지용 Interconnection 공정)

  • Park, S.H.;Oh, T.S.;Eum, Y.S.;Moon, J.T.
    • Journal of the Microelectronics and Packaging Society
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    • v.14 no.4
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    • pp.63-69
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    • 2007
  • We investigated interconnection processes using Cu vias for MEMS sensor packages. Ag paste layer was formed on a glass substrate and used as a seed layer for electrodeposition of Cu vias after bonding a Si substrate with through-via holes. With applying electrodeposition current densities of $20mA/cm^2\;and\;30mA/cm^2$ at direct current mode to the Ag paste seed-layer, Cu vias of $200{\mu}m$ diameter and $350{\mu}m$ depth were formed successfully without electrodeposition defects. Interconnection processes for MEMS sensor packages could be accomplished with Ti/Cu/Ti line formation, Au pad electrodeposition, Sn solder electrodeposition and reflow process on the Si substrate where Cu vias were formed by Cu electrodeposition into through-via holes.

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Scallop-free TSV, Copper Pillar and Hybrid Bonding for 3D Packaging (3D 패키징을 위한 Scallop-free TSV와 Cu Pillar 및 하이브리드 본딩)

  • Jang, Ye Jin;Jung, Jae Pil
    • Journal of the Microelectronics and Packaging Society
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    • v.29 no.4
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    • pp.1-8
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    • 2022
  • High-density packaging technologies, including Through-Si-Via (TSV) technologies, are considered important in many fields such as IoT (internet of things), 6G/5G (generation) communication, and high-performance computing (HPC). Achieving high integration in two dimensional packaging has confronted with physical limitations, and hence various studies have been performed for the three-dimensional (3D) packaging technologies. In this review, we described about the causes and effects of scallop formation in TSV, the scallop-free etching technique for creating smooth sidewalls, Cu pillar and Cu-SiO2 hybrid bonding in TSV. These technologies are expected to have effects on the formation of high-quality TSVs and the development of 3D packaging technologies.

Effect of Fe Addition on Mechanical Properties and Microstructure of As-Extruded Hypereutectic Al-Si-Fe Alloy (Fe가 첨가된 과공정 Al-Si-Fe합금 압출재의 기계적특성 및 미세조직에 관한 연구)

  • Lee, S.D.;Kim, D.H.;Beck, A.R.;Lim, S.G.
    • Transactions of Materials Processing
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    • v.28 no.3
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    • pp.123-129
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    • 2019
  • Hypereutectic Al-Si alloys have been widely utilized for wear-resistant components in the automotive industry. In order to expand the application of Hypereutectic Al-Si alloys, the addition of alloying elements forming a stable precipitate at high temperature is required. Thermally stable inter metallic compounds can be formed through the addition of transition elements such as Fe, Ni to Al alloys. However, the amount of transition element to be added to Al alloys is limited due to their low solid solubility. Also, hypereutectic Al-Si-Fe alloys form coarse primary Si phases and needle-shaped intermetallic compounds during solidification in the general casting processes. In this study, the effects of the destruction of Intermetallic compound and Si phase are investigated via hot extrusion. Both the microstructure and mechanical properties are discussed under different extrusion conditions.

Effects of Pressure on Properties of SiC-$ZrB_2$ Composites through SPS (SPS법에 의한 SiC-$ZrB_2$ 복합체의 특성에 미치는 압력의 영향)

  • Shin, Yong-Deok;Lee, Jung-Hoon;Kim, Chul-Ho;Jin, Beom-Soo;Wu, Na
    • Proceedings of the KIEE Conference
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    • 2011.07a
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    • pp.1449-1450
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    • 2011
  • The SiC-$ZrB_2$ composites were produced by subjecting a 40:60 (vol.%) mixture of zirconium diboride($ZrB_2$) powder and ${\beta}$-silicon carbide (SiC) matrix to spark plasma sintering(SPS) under argon atmosphere at 50MPa(P50) and 60MPa(P60) pressure. The relative density, 94.13% of P60 sample was lower than that, 94.75% of P50 sample. Reactions between ${\beta}$-SiC and $ZrB_2$ were not observed via x-ray diffraction (hereafter, XRD) analysis. The trend of flexural strength of SiC-$ZrB_2$ composites were in accordance with the relative density. The properties of a SiC-$ZrB_2$ composites through SPS under argon atmosphere were positive temperature coefficient resistance in the temperature range from $25^{\circ}C$ to $500^{\circ}C$, and electrical resistivity of P50 and P60 sample were $6.75{\times}10^{-4}$ and $7.22{\times}10^{-4}{\Omega}{\cdot}cm$ at room temperature, respectively.

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