• Proceedings of the Korea Information Processing Society Conference
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• 2016.10a
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• pp.801-803
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• 2016

반도체 공정에서는 제조 장비의 운영을 위한 장비 제어 및 점검에서 데이터 처리가 높은 해상도의 데이터 수집을 필요로 하고 있다. 이 논문에서는 반도체 스마트 팩토리의 환경 적용을 위해 필요한 EDA(Equipment Data Acquisition) 시스템의 구성을 기술한다. 이를 위해 반도체 세정장비 AutoFOUP의 장비 구성 정보를 수집하는 EDA 시스템의 프로토타입을 SEMI 표준을 기반으로 설계한다. 구성된 EDA 시스템은 분산 시스템 환경에서 높은 상호 운영성 및 확장성을 지원하기 위해 WCF 프로그래밍 모델로 작성된 웹서비스로 구성한다. 개발된 EDA 시스템은 반도체 제조 공정에서 웹서비스 기술을 활용함으로서 이기종 운영 플랫폼에서 유용성을 제시한다.

• International Journal of Fuzzy Logic and Intelligent Systems
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• v.2 no.3
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• pp.191-193
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• 2002

Insulation aging diagnosis system provides early warning in regard to electrical equipment defects. Early warning is very important in that it can avoid great losses resulting from unexpected shutdown of the production line. For solving this problem, many researchers proposed a method that diagnose power plant by using partial discharge. In this paper, we design the intelligent sensor to diagnose insulation degradation state that uses a Microprocessor and Al. Proposed sensor has MCU that is used to diagnose insulation degradation and communicate with main IDD system. And we use a fuzzy model to diagnose insulation degradation.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.3
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• pp.50-53
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• 2007

Improving the reliability or long-term dependability of a system requires a different approach from the previous emphasis on short-term concerns. The purpose of this paper is to present a reliability evaluation method for an oil cooler intended for high-precision machining centers. The oil cooler system in question is a cooling device that minimizes the deformation caused from the heat generated by driving devices. This system is used for machine tools and semiconductor equipment. We predicted the reliability of the system based on the failure rate database and conducted the reliability test using a test-bed to evaluate the life of the oil cooler. The results provided an indication of the reliability of the system in terms of the failure rate and the MTBF of the oil cooler system and its components, as well as a distribution of the failure mode. These results will help increase the reliability of oil cooler systems. The evaluation method can also be used to determine the reliability of other machinery products.

• JSTS:Journal of Semiconductor Technology and Science
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• v.9 no.1
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• pp.67-74
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• 2009

Monte Carlo simulation is widely used for predicting ion implantation profiles in amorphous targets. Here, we compared Monte Carlo simulation results with a vast database of ion implantation secondary ion mass spectrometry (SIMS), and showed that the Monte Carlo data sometimes deviated from the experimental data. We modified the electron stopping power model, calibrated its parameters, and reproduced most of the database. We also demonstrated that Monte Carlo simulation can accurately predict profiles in a low energy range of around 1keV once it is calibrated in the higher energy region.

• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.1383-1385
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• 2009

This paper suggests that testing method and equipment structure to detect potential failures of LCD cells. LCD Cell Aging Tester is the unique process to detect failures related with ASG circuits. This system consists of four components that is Aging chamber, work table, probe contact unit, and pattern generator. The key factor of the concept is temperature aging and HVS driving. Complicated combination of test parameters including voltage, temperature and frequency provided practical burn-in conditions eligible for prediction of mass production.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.05a
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• pp.414-417
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• 1999

According to development of power electric technology from industrial field to electronic home appliances, recent SMPS using semiconductor is spread widely. Electric converting instrument uses a sine wave voltage source, namely an usual power source, and it gets a non-sines power source from power source because current flows through one part in waveform of one cycle. This injects higher harmonic source in source part, absorb pollution source. And this cause quality deterioration, durability shortage of electric power instrument, spreading accident of electric solver system, and so on. It can't supply an electric source of good quality in industry, so become an impedimental element in improving productivity and reliance. This study can be used in prediction of hindrance and diagnosis material and intends to suggest a countermeasure about measurement data.

• Journal of the Korea Society for Simulation
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• v.14 no.3
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• pp.1-12
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• 2005

Designing a production and equipment investment plan for semiconductors, many variables must be taken into account. However, depending on these variables could bring many changes to the plans, and the end result is hard to predict. Because it's hard to predict the end result, it's never easy to make a standard production plan. So, the goal of this project is to design a production plan based on past marketing patterns to satisfyall the variables and come up with a reasonable thesis on a standardized process.

• Journal of the Korea Safety Management & Science
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• v.12 no.2
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• pp.25-33
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• 2010

Nowadays worldwide leading companies try to establish more efficient and comprehensive management system for getting high quality, reliability and safety. In this paper, we investigate standards for quality management, dependability management and risk management. We also suggest an integrated and comprehensive system of quality(ISO/TS16949), dependability (IEC60300)and risk(JIS Q2001). The evaluation method on the performance of dependability management systems are developed and applied for the semiconductor equipment company.

• ETRI Journal
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• v.37 no.4
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• pp.787-792
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• 2015

To accomplish a high-speed test on low-speed automatic test equipment (ATE), a new instruction-based fully programmable memory built-in self-test (BIST) is proposed. The proposed memory BIST generates a highspeed internal clock signal by multiplying an external low-speed clock signal from an ATE by a clock multiplier embedded in a DRAM. For maximum programmability and small area overhead, the proposed memory BIST stores the unique sets of instructions and corresponding test sequences that are implicit within the test algorithms that it receives from an external ATE. The proposed memory BIST is managed by an external ATE on-the-fly to perform complicated and hard-to-implement functions, such as loop operations and refresh-interrupts. Therefore, the proposed memory BIST has a simple hardware structure compared to conventional memory BIST schemes. The proposed memory BIST is a practical test solution for reducing the overall test cost for the mass production of commodity DDRx SDRAMs.

• Proceedings of the Korea Information Processing Society Conference
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• 2004.11a
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• pp.681-684
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• 2004

본 논문에서는 기존의, 3C-3D 구조의 반도체 Spinner 장비가 동시에 처리할 수 있는 웨이퍼의 양이 3개고 제한적이며 HP와 CP Unit이 따로 존재하기 때문에 웨이퍼의 생산성을 저하시키는 단점을 보완하기 위하여 6C-6D 형태의 구조를 갖고 HP와 CP의 Unit을 HCP와 PEB Unit으로 변경시킨 새로운 구조의 Spinner를 설계하였으며, 이 장비의 로봇들을 학습시키고 테스트하기 위한 GTP 개발에 관하여 논한다. 새로운 구조의 Spinner 장비에서 각 Unit 로봇들을 효과적으로 학습시키기 위하여 장비의 구성 요소에 따라 사용자 인터페이스용 레이아웃을 능동적으로 설계하도록 하였으며 구성 요소들 간의 관계를 정의하고 사용자 편의성에 적합한 구성 요소들을 유연성 있게 배치하도록 하였다.