• 제목/요약/키워드: SPC (Solid Phase Crystallization)

검색결과 40건 처리시간 0.032초

Solid Phase Crystallization Kinetics of Amorphous Silicon at High Temperatures

  • Hong, Won-Eui;Kim, Bo-Kyung;Ro, Jae-Sang
    • 한국표면공학회지
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    • 제41권2호
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    • pp.48-50
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    • 2008
  • Solid phase crystallization (SPC) of amorphous silicon is usually conducted at around $600^{\circ}C$ since it is used in the application of flat panel display using thermally susceptible glass substrate. In this study we conducted SPC experiments at temperatures higher than $600^{\circ}C$ using silicon wafers. Crystallization rate becomes dramatically rapid at higher temperatures since SPC kinetics is controlled by nucleation with high value of activation energy. We report SPC kinetics of high temperatures compared to that of low temperatures.

라만 분석을 통한 비정질 실리콘 박막의 고온 고상 결정화 거동 (Behavior of Solid Phase Crystallization of Amorphous Silicon Films at High Temperatures according to Raman Spectroscopy)

  • 홍원의;노재상
    • 한국표면공학회지
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    • 제43권1호
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    • pp.7-11
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    • 2010
  • Solid phase crystallization (SPC) is a simple method in producing a polycrystalline phase by annealing amorphous silicon (a-Si) in a furnace environment. Main motivation of the crystallization technique is to fabricate low temperature polycrystalline silicon thin film transistors (LTPS-TFTs) on a thermally susceptible glass substrate. Studies on SPC have been naturally focused to the low temperature regime. Recently, fabrication of polycrystalline silicon (poly-Si) TFT circuits from a high temperature polycrystalline silicon process on steel foil substrates was reported. Solid phase crystallization of a-Si films proceeds by nucleation and growth. After nucleation polycrystalline phase is propagated via twin mediated growth mechanism. Elliptically shaped grains, therefore, contain intra-granular defects such as micro-twins. Both the intra-granular and the inter-granular defects reflect the crystallinity of SPC poly-Si. Crystallinity and SPC kinetics of high temperatures were compared to those of low temperatures using Raman analysis newly proposed in this study.

Low temperature solid phase crystallization of amorphous silicon thin film by crystalline activation

  • Kim, Hyung-Taek;Kim, Young-Kwan
    • Journal of Korean Vacuum Science & Technology
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    • 제2권2호
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    • pp.97-100
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    • 1998
  • We have investigated the effects of crystalline activation on solid phase crystallization (SPC) of amorphous silicon (a-Si) thin films. Wet blasting and self ion implantation were employed as the activation treatments to induce macro or micro crystalline damages on deposited a-Si films. Low temperature and larger grain crystallization were obtained by the applied two-step activation. High degree of crystallinity was also observed on both furnace and rapid SPC. crystalline activations showed the promotion of nucleation on the activated regions and the retardation of growth in an amorphous matrix in SPC. The observed behavior of two-step SPC was strongly dependent on the applied activation and annealing processes. It was also found that the diversified effects by macro and micro activations on the SPC were virtually diminished as the annealing temperature increased.

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ELA 결정화와 SPC 결정화를 이용한 쇼트키 장벽 다결정 실리콘 박막 트랜지스터 (Schottky barrier Thin-Film-Transistors crystallized by Excimer laser annealing and solid phase crystallization method)

  • 신진욱;최철종;조원주
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.129-130
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    • 2008
  • Polycrystalline silicon (poly-Si) Schottky barrier thin film transistors (SB-TFT) are fabricated by erbium silicided source/drain for n-type SB-TFT. High quality poly-Si film were obtained by crystallizing the amorphous Si film with excimer laser annealing (ELA) or solid phase crystallization (SPC) method. The fabricated poly-Si SB-TFTs have a large on/off current ratio with a low leakage current. Moreover, the electrical characteristics of poly-Si SB TFTs are significantly improved by the additional forming gas annealing in 2 % $H_2/N_2$, because the interface trap states at the poly-Si grain boundaries and at the gate oxide/poly-Si channel decreased.

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AMFC system에서의 비정질 실리콘 박막의 결정화 특성 (Crystallization characteristics of the amorphous Si thin films in the AMFC system)

  • 강구현;이승재;김선호;이수경;남승의;김형준
    • 한국진공학회지
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    • 제14권1호
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    • pp.24-28
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    • 2005
  • a-Si을 poly-Si으로 결정화하는 전형적인 방법으로는 고상결정화(Solid Phase Crystallization, SPC)가 있다[1-3]. 고상결정화는 균일한 공정특성과 생산비가 저렴하다는 장점이 있으나, 고상결정화 공정에서 높은 공정온도와 긴 공정 시간은 유리 기판의 손상으로 인해 적용되기 어렵다. 본 논문에서는 고상결정화의 저온공정과 짧은 공정시간을 위해 교번자장결정화(Alternating Magnetic Field Crystallization, AMFC) 시스템 내에서 결정화하는 동안 교번자장(Alternating Magnetic Field)을 적용하는 새로운 방법을 소개한다. 고상결정화의 경우, 열처리 시간은 570℃에서 24시간이 소요되었으나, 교번자장결정화의 경우, 같은 온도에서 20분이 소요되었다.

스퍼터링 및 저압화학기상증착 비정질 실리곤 박막의 고상 결정화 특성 (Characterization of Solid Phase Crystallization in Sputtered and LFCVD Amorphous Silicon Thin Film)

  • 김형택
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1995년도 추계학술대회 논문집
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    • pp.89-93
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    • 1995
  • Effects of hydrogenation in amorphous silicon rile growths on Solid Phase Crystallization (SPC) was investigated using x-ray diffractometry, energy dispersive Spectroscopy, and Raman spectrum. Interdiffusion of barium(Ba) and aluminum(Al) compounds of corning substrate was observed in both of rf sputtering and LFCVD films under the low temperature(580$^{\circ}C$) annealing. Low degree of crystallinity resulted from the interdiffusion was obtained. Highly applicable degree of crystallinity was obtained through the mechanical damage induced surface activation on amorphous silicon films. X-ray diffraction intensity of (111) orientation was used to characterize the degree of crystallinity of SPC. Nucleation and growth rate in SPC could be controllable through the employed surface treatment. IIydrogenated LPCVD films showed the superior crystallinity to non-hydrogenated sputtering films. Insignificant effects of activation treatment in sputtered film was of activation treatment in sputtered film was observed on SPC.

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SPC 기판을 사용한 NVM 소자의 전기적 특성 (Electrical Characteristics of NVM Devices Using SPC Substrate)

  • 황인찬;이정인;이준신
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.60-61
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    • 2007
  • In this paper, the p-channel poly Si thin-film transistors (Poly-Si TFT's) using formed by solid phase crystallization (SPC) on glass substrate were fabricated. And we propose an ONO(Oxide-Nitride-Oxide) multilayer as the gate insulator for poly-Si TFT's to indicate non-volatile memory (NVM) effect. Poly-Si TFT is investigated by measuring the electrical properties of poly-Si films, such as I-V characteristics, on/off current ratio. NVM characteristics is showed by measuring the threshold voltage change of TFT through I-V characteristics.

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고상 결정화에 의해 제작된 다결정 실리콘 박막의 특성 연구 (A Study on the characteristics of polycrystalline silicon thin films prepared by solid phase cyrstallization)

  • 김용상
    • E2M - 전기 전자와 첨단 소재
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    • 제10권8호
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    • pp.794-799
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    • 1997
  • Poly-Si films have been prepared by solid phase crystallization of LPCVD(low-pressure CVD) amorphous silicon. The crystallinity of poly-Si films has been derived from UV reflectance spectrum and lies in the range between 70% and 80% . From XRD measurement the peak at 28.2$^{\circ}$from (111) plane is dominantly detected in the SPC poly-Si films, The average grain size of poly-Si film is determined by the image of SEM and varies from 4000 $\AA$ to 8000$\AA$. The electrical conductivity of as-deposited amorphous silicon film is about 2.5$\times$10$^{-7}$ ($\Omega$.cm)$^{-1}$ , and 3~4$\times$10$^{-6}$ ($\Omega$.cm)$^{-1}$ of room temperature conductivity is the SPC poly-Si films. The conductivity activation energies are 0.5~0.6 eV or the 500$\AA$-thick poly-Si films.

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PECVD 방법으로 증착한 Si박막의 SPC 성장 (SPC Growth of Si Thin Films Preapared by PECVD)

  • 문대규;임호빈
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1992년도 춘계학술대회 논문집
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    • pp.42-45
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    • 1992
  • The poly silicon thin films were prepared by solid phase crystallization at 600$^{\circ}C$ of amorphous silicon films deposited on Corning 7059 glass and (100) silicon wafer with thermally grown SiO$_2$substrate by plasma enhanced chemical vapor deposition with varying rf power, deposition temperature, total flow rate. Crystallization time, microstructure, absorption coefficients were investigated by RAMAN, XRD analysis and UV transmittance measurement. Crystallization time of amorphous silicon films was increased with increasing rf power, decreasing deposition temperature and decreasing total flow rate.

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SPC, MIC를 통해 만들어진 Poly-Ge Film의 Phosphorus 영향에 따른 전기적 특성 분석

  • 정현욱;임명훈;박진홍
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.356-356
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    • 2013
  • Monolithic 3D-IC는 현대 집적회로에서 interconnect로 인해 발생되는 여러 문제들을 해결하기 위해 새롭게 제시되고 있는 기술적 개념으로 구현 시 하위 소자 및 interconnet들에 영향을 주지 않는 저온공정이 필수적이다. 특히 germanium (Ge)은 낮은 녹는점 및 높은 캐리어 이동도 덕분에 3D-IC 구현 시 상위 소자의 channel 물질에 적합한 것으로 알려져 있다. 최근 이러한 Ge을 결정화하기 위해 solid phase crystallization (SPC), metal induced crystallization (MIC), laser annealing과 같은 결정화 방법들이 보고되고 있다. 현재까지 SPC 방법에 의해 얻어진 poly-Ge의 도핑농도 및 이동도와 같은 전기적 특성에 대한 분석은 수행된 바 있으나 3D-IC 공정에 적용이 가능한 MIC 기술을 통해 얻어진 poly Ge 필름에 대한 전기적 특성분석은 부족한 상황이다. 본 연구는 SPC 뿐만 아니라 MIC 방법을 통해 ${\alpha}$-Ge를 결정화시키고 얻어진 poly-Ge 필름의 전기적 특성을 XRD 및 hall effect measurement를 통해 분석하였다. 특히 일반적으로 Ge 내에서 p-type dopant로 동작을 하는 defect과 n-type dopant인 phosphorus 관계를 고려하여 여러 온도에서 SPC 및 MIC에 의해 얻어진 phosphorus doped poly-Ge 필름들의 전기적 특성을 분석하였다.

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