한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1992년도 춘계학술대회 논문집
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- Pages.42-45
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- 1992
PECVD 방법으로 증착한 Si박막의 SPC 성장
SPC Growth of Si Thin Films Preapared by PECVD
초록
The poly silicon thin films were prepared by solid phase crystallization at 600
키워드