• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07b
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• pp.585-588
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• 2002

The USM uses friction between a mobile part (rotor) and a vibration part(stator), which is different from the principle of the conventional motor based on the interaction of electric and magnetic fields. In this thesis, a flat-type $L_1-B_8$ mode USM was designed and fabricated the characteristics of an ultrasonic vibration. The results of fabricated USM are as follows: (1) In case of ultrasonic motor with elastic-body of stainless, when applied voltage, frequency, pressing force of rotor were 50 [V], 27.9 [kHz], 1.5 [N], 5.0[mN m] respectively, the speed of revolution could be presented up to 0 [cm/s]. (2) In case of ultrasonic motor with elastic-body of brass, when applied voltage, frequency, pressing force of rotor were 50 [V], 21.4 [kHz], 1.5 [N], 1.4[mN m]respectively, the speed of rotor revolution was presented up to 0 [cm/s]. (3) The USM of elastic-body of stainless showing 1.17[%], somewhat low, in the maximum efficiency according to torque was superior to the USM of elastic-body of brass showing 0.34 [%]. The Flat-type $L_1-B_8$ mode USM had characteristics of typical drooping torque-speed, large torque and high speed, and operating in both directions by phase reversal.

• Composites Research
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• v.13 no.6
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• pp.47-54
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• 2000

One promising method for impact detection of composite structures is based on the use of piezopolymer thin fim (PVDf) sensor. In this paper, the relationship between the contact force and the signals of the attached strain gage and PVDF sensor to the composite plate subjected to low-velocity impact were derived. The relation for the open circuit and short circuit voltage of PVDF sensor was derived based on the equivalent circuit model of the piezoelectric sensor. The work was then extended to include experimental investigation into the use of short circuit voltage of PVDF sensor without using charge amplifier to detect low-velocity impact. The natural frequencies and damping ratio of the composite plate obtained from the vibration test were used to modify the analytical model and therefore the differences between measured and simulated signal of the modified analytical model in both forward and backward problem were considerably reduced. The reconstructed contact force and simulated sensor signals agreed well with the measured contact force, strain gage signal, and PVDF sensor singanl.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.3
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• pp.149-155
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• 2006

This paper presents a torsional micromirror detached from PZT actuators (TMD), whose rotational motion is achieved by push bars in the PZT actuators detached from the micromirror. The push bar mechanism is intended to reduce the bending, tensile and torsional constraints generated by the conventional bending bar mechanism, where the torsional micromirror is attached to the PZT actuators (TMA). We have designed, fabricated and tested prototypes of TMDs for single-axis and dual-axis rotation, respectively. The single-axis TMD generates the static rotational angle of $6.1^{\circ}$ at 16 VDC, which is 6 times larger than that of single-axis TMA, $0.9^{\circ}$. However, the rotational response curve of TMD shows hysteresis due to the static friction between the cover and the push bar in the PZT actuator. We have shown that 63.2% of the hysteresis is due to the static friction caused by the initial contact force of the PZT actuaor. Without the initial contact force, the rotational response curve of TMD shows linear voltage-angle characteristics. The dual-axis TMD generates the static rotational angles of $5.5^{\circ}$ and $4.7^{\circ}$ in x-axis and y-axis, respectively at 16 VDC. The measured resonant frequencies of dual-axis TMD are $2.1\pm0.1$ kHz in x-axis and $1.7\pm0.1$ kHz in y-axis. The dual-axis TMD shows stable operation without severe wear for 21.6 million cycles driven by 16 Vp-p sinusoidal wave signal at room temperature.

• Journal of Sensor Science and Technology
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• v.23 no.2
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• pp.94-98
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• 2014

Aluminum nitride (AlN) thin films with a TiN buffer layer have been fabricated on SUS430 substrate by RF reactive magnetron sputtering at room temperature under 25~75% $N_2$ /Ar. The characterization of film properties were performed using surface profiler, X-ray diffraction, X-ray photoelectron spectroscopy(XPS), and pressure-voltage measurement system. The deposition rates of AlN films were decreased with increasing the $N_2$ concentration owing to lower mass of nitrogen ions than Ar. The as-deposited AlN films showed crystalline phase, and with increasing the $N_2$ concentration, the peak of AlN(100) plane and the crystallinity became weak. Any change in the preferential orientation of the as-deposited AlN films was not observed within our $N_2$ concentration range. But in the case of 50% $N_2$ /Ar condition, the peak of (002) plane, which is determinant in pressure sensing properties, appeared. XPS depth profiling of AlN/TiN/SUS430 revealed Al/N ratio was close to stoichiometric value (45:47) when deposited under 50% $N_2/Ar$ atmosphere at room temperature. The output signal voltage of AlN sensor showed a linear behavior between 26~85 mV, and the pressure-sensing sensitivity was calculated as 7 mV/MPa.

• The Journal of the Acoustical Society of Korea
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• v.35 no.6
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• pp.436-444
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• 2016

Uniformity in transducer performance is a must-have to ensure the reliable acoustic performance of a tile projector, used for active echo reduction. However, practical limitations imposed by variations in material properties and fabrication errors lead to performance variations among unit transducers, which could degrade the radiation characteristics (transmitting voltage response and directivity) of the tile projector and ultimately the echo reduction performance. In this paper we present a method to minimize these adverse effects via an appropriate placement of unit transducers within the tile projector. To this end, we perform a series of coupled acoustic-piezoelectric simulations, assuming a group of 36 unit transducers having 6 dB variations in transmitting voltage response, to analyze and compare the radiation characteristics of tile projectors under different transducer placement schemes.

• Advances in nano research
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• v.9 no.3
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• pp.133-145
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• 2020

In this study, nonlinear vibrations and dynamic instabilities of a smart embedded micro shell conveying varied fluid flow and subjected to the combined electro-thermo-mechanical loadings are investigated. With the aim of designing new hydraulic sensors and actuators, the piezoelectric materials are employed for the body and the effects of applying electric field on the stability of the system as well as the induced voltage due to the dynamic behavior of the system are studied. The nonlocal piezoelasticity theory and the nonlinear cylindrical shell model in conjunction with the energy approach are utilized to mathematically modeling of the structure. The fluid flow is assumed to be isentropic, incompressible and fully develop, and for more generality of the problem both steady and time dependent flow regimes are considered. The mathematical modeling of fluid flow is also carried out based on a scalar potential function, time mean Navier-Stokes equations and the theory of slip boundary condition. Employing the modified Lagrange equations for open systems, the nonlinear coupled governing equations of motion are achieved and solved via the state space problem; forth order numerical integration and Bolotin's method. In the numerical results, a comprehensive discussion is made on the dynamical instabilities of the system (such as divergence, flutter and parametric resonance). We found that applying positive electric potential field will improve the stability of the system as an actuator or vibration amplitude controller in the micro electro mechanical systems.

• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.913-916
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• 2005

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 sccm at a supplied voltage of 100 V with a 50 % duty cycle, maximum non-linearity was 2.24 % FS and leak rate was $3.03{\times}10^{-8}pa$. $m^3/cm^2$.

• Transactions on Electrical and Electronic Materials
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• v.17 no.6
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• pp.335-340
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• 2016

The vibrational energy is prevalent in the natural environment, which is studied by energy researchers as a new energy resource in recent years. Vibration generation utilizes electromagnetic induction technology, piezoelectric technology and certain characteristics of smart materials to convert mechanical energy into electrical energy. In this paper, a new method of using MSMA (magnetic shape memory alloy) to generate electricity is proposed and the principle of generating electricity is demonstrated. Martensitic variants and magnetic domain characteristics of MSMA are analyzed. Combining with Gibbs free energy function thermal theory, the mathematics model of MSMA vibration generator is established. The basic structure of MSMA vibration generator is designed and simulation is done to analyze that the effects of generator output voltage when the input amplitude and frequency of vibration stress change. The simulation experiments verify the feasibility of using MSMA to make the micro vibration generators and the correctness of the mathematical model, which lays a good foundation for the further research and application of MSMA vibration generator.

• Transactions of the Korean Society of Automotive Engineers
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• v.14 no.4
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• pp.164-173
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• 2006

In the electro-hydraulic injector for the common rail Diesel fuel injection system, the injection nozzle is being opened and closed by movement of a injector's needle which is balanced by pressure at the nozzle seat and at the needle control chamber, at the opposite end of the needle. In this study, the piezo actuator was considered as a prime movers in high pressure Diesel injector. Namely a piezo-driven Diesel injector, as a new method driven by piezoelectric energy, has been applied with a purpose to develop the analysis model of the piezo actuator to predict the dynamics characteristics of the hydraulic component(injector) by using the AMESim code. Aimed at simulating the hydraulic behavior of the piezo-driven injector, the circuit model has been developed and verified by comparison with the experimental results. As this research results, we found that the input voltage exerted on piezo stack is the dominant factor which affects on the initial needle behavior of piezo-driven injector than the hydraulic force generated by the constant injection pressure. Also we know the piezo-driven injector has more degrees of freedom in controlling the injection rate with the high pressure than a solenoid-driven injector.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2005.04a
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• pp.1-4
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• 2005

A higher order zig-zag shell theory is developed to refine accurately predict deformation and stress of smart shell structures under the mechanical, thermal, and electric loading. The displacement fields through the thickness are constructed by superimposing linear zig-zag field to the smooth globally cubic varying field. Smooth parabolic distribution through the thickness is assumed in the transverse deflection in order to consider transverse normal deformation. The mechanical, thermal, and electric loading is applied in the sinusoidal distribution function in the in-surface direction. Thermal and electric loading is given in the linear variation through the thickness. Especially, in electric loading case, voltage is only applied in piezo-layer. The layer-dependent degrees of freedom of displacement fields are expressed in terms of reference primary degrees of freedom by applying interface continuity conditions as well as bounding surface conditions of transverse shear stresses. In order to obtain accurate transverse shear and normal stresses, integration of equilibrium equation approach is used. The numerical examples of present theory demonstrate the accuracy and efficiency of the proposed theory. The present theory is suitable for the predictions of behaviors of thick smart composite shell under mechanical, thermal, and electric loadings combined.