Pressure Sensing Properties of AlN Thin Films Sputtered at Room Temperature |
Seok, Hye-Won
(Electronic Materials & Module Team, Korea Institute of Ceramic Engineering & Technology (KICET))
Kim, Sei-Ki (Electronic Materials & Module Team, Korea Institute of Ceramic Engineering & Technology (KICET)) Kang, Yang-Koo (Electronic Materials & Module Team, Korea Institute of Ceramic Engineering & Technology (KICET)) Lee, Youn-Jin (Electronic Materials & Module Team, Korea Institute of Ceramic Engineering & Technology (KICET)) Hong, Yeon-Woo (Electronic Materials & Module Team, Korea Institute of Ceramic Engineering & Technology (KICET)) Ju, Byeong-Kwon (Department of semiconductor and Nano system, Korea University) |
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