Micromirrors Driven by Detached Piezoelectric Microactuators For Low-voltage and Wide-angle Rotation

저전압 대회전을 위한 분리된 압전 구동기에 의한 미소거울

  • Published : 2006.03.01

Abstract

This paper presents a torsional micromirror detached from PZT actuators (TMD), whose rotational motion is achieved by push bars in the PZT actuators detached from the micromirror. The push bar mechanism is intended to reduce the bending, tensile and torsional constraints generated by the conventional bending bar mechanism, where the torsional micromirror is attached to the PZT actuators (TMA). We have designed, fabricated and tested prototypes of TMDs for single-axis and dual-axis rotation, respectively. The single-axis TMD generates the static rotational angle of $6.1^{\circ}$ at 16 VDC, which is 6 times larger than that of single-axis TMA, $0.9^{\circ}$. However, the rotational response curve of TMD shows hysteresis due to the static friction between the cover and the push bar in the PZT actuator. We have shown that 63.2% of the hysteresis is due to the static friction caused by the initial contact force of the PZT actuaor. Without the initial contact force, the rotational response curve of TMD shows linear voltage-angle characteristics. The dual-axis TMD generates the static rotational angles of $5.5^{\circ}$ and $4.7^{\circ}$ in x-axis and y-axis, respectively at 16 VDC. The measured resonant frequencies of dual-axis TMD are $2.1\pm0.1$ kHz in x-axis and $1.7\pm0.1$ kHz in y-axis. The dual-axis TMD shows stable operation without severe wear for 21.6 million cycles driven by 16 Vp-p sinusoidal wave signal at room temperature.

Keywords

References

  1. H. Laor, 'MEM Mirrors Application in Optical Cross-Connects,' IEEE LEOS '98, pp.II/21- II/22, 1998 https://doi.org/10.1109/LEOSST.1998.689712
  2. H. Toshiyosh, et. al., 'Linearization of Electrostatically Actuated Surface Micromachined 2-D Optical Scanner,' Journal of Microelectromechanical Systems, Vol.10, No.2, pp. 205--214, June 2001 https://doi.org/10.1109/84.925744
  3. V. Aksyuk, 'LambdaRouter,' Proc. IEEE Optical MEMS (Invited Talk), 2001
  4. Y.J. Yee, et. al., 'Fabrication and Characterization of a PZT Actuated Micromirror with Two-axis Rotational Motion for Free Space Optics,' Proc. IEEE MEMS Workshop 01, pp.317-320, 2001 https://doi.org/10.1109/MEMSYS.2001.906542
  5. M. Ikeda, et. al., 'PZT Thins-Film Actuator Driven Micro Optical Scanning Sensor by 3D Integration of Optical and Mechanical Devices.' Proc. IEEE MEMS Workshop 99, pp.435-440, 1999
  6. D.L. DeVoe and A.P. Pisano, 'Modeling and Optimal Design of Piezoelectric Cantilever Actuators,' Journal of Microelectromechanical Systems, Vol.6, No.3, pp.266-270, Sep. 1997 https://doi.org/10.1109/84.623116
  7. W.C. Young, Roark's Formulas for Stress and Strain, McGraw-Hill, 6th edition, pp.348
  8. M.-J. Kim and Y.-H. Cho, 'Design, Fabrication and Characterization of Piezoelectric Multi-layer Cantilever Actuators for the Minimum Initial Deflection,' Proc. 10th Int. Conf. Solid-State Sensors and Actuators (Transducers '99), pp.1758-1761, 1999
  9. Dicon Fiberoptics, 2001 Measurement Products Catalog, 2001