• Journal of the Korean Vacuum Society
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• v.18 no.1
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• pp.73-78
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• 2009

Zinc Oxide (ZnO) nanorods arrays were deposited on ZnO buffered p-Si(100) substrates by hydrothermal method. The ZnO buffer layer with a thickness of 30 nm was deposited by metal oxide chemical vapor deposition at $500^{\circ}C$. The structural and optical properties of ZnO nanorods arrays controlled by precursor concentrations from 0.06 to 0.5 M were studied by FE-SEM(field emission scanning electron microscopy), XRD(X-ray diffraction), and PL(photoluminescence), respectively. It was found that the structural and optical properties of ZnO nanorods arrays are changed significantly with increase of precursor concentration. The sizes of diameter and length of nanorods were increased as the concentration increase, and good optical property was shown with the concentration of 0.3 M.

• Journal of the Korean Ceramic Society
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• v.39 no.5
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• pp.479-483
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• 2002

Silicon dioxide thick film using silica optical waveguide cladding was fabricated by Plasma Enhanced Chemical Vapor Deposition(PECVD) method, at a low temperature ($320^{\circ}$C) and from $(SiH_4+N_2O)$ gas mixtures. The effects of deposition parameters on properties of $SiO_2$ thick films were investigated by variation of $N_2O/SiH_4$ flow ratio and RF power. After the deposition process, the samples were annealed in a furnace at $1150^{\circ}$C, in N2 atmosphere, for 2h. As the $N_2O/SiH_4$ flow ratio increased, deposition rate decreased from 9.4 to 2.9 ${\mu}m/h$. As the RF power increased, deposition rate increased from 4.7 to 6.9 ${\mu}m/h$. The thickness and the refractive index measurements were measured by prism coupler. X-ray Photoelectron Spectroscopy(XPS) and Fourier Transform-infrared Spectroscopy(FT-IR) were used to determine the chemical states. The cross-section of films was observed by Scanning Electron Microscopy(SEM).

• Journal of the Korean Vacuum Society
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• v.17 no.1
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• pp.51-57
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• 2008

we have demonstrated structural evolution and optical properties of Si-nanowires (NWs) synthesized on Si (111) substrates with nanoscale Au-Si islands by rapid thermal chemical vapor deposition (RTCVD). The Au-Si nano-islands (10-50nm in diameter) were employed as a liquid-droplet catalysis to grow Si-NWs via vapor-liquid-solid mechanism. The Si-NWs were grown by a mixture gas of SiH4 and H2 at a pressure of 1.0 Torr and temperatures of $500{\sim}600^{\circ}C$. Scanning electron microscopy measurements showed that the Si-NWs are uniformly sized and vertically well-aligned along <111> direction on Si (111) surfaces. The resulting NWs are ${\sim}60nm$ in average diameter and ${\sim}5um$ in average length. High resolution transmission microscopy measurements indicated that the NWs are single crystals covered with amorphous SiOx layers of ${\sim}3nm$ thickness. In addition, the optical properties of the NWs were investigated by micro-Raman spectroscopy. The downshift and asymmetric broadening of the Si main optical phonon peak were observed in Raman spectra of Si-NWs, which indicates a minute stress effects on Raman spectra due to a slight lattice distortion led by lattice expansion of Si-NW structures.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.10a
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• pp.455-458
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• 2009

In this research, the effect of Sc on the micro structure and mechanical properties of Al-20Si alloy powders and their extruded bar was investigated. The Al-20wt%Si and Al-20wt%Si-0.6wr%Sc powders were produced by gas atomization. The micro structures of the alloy powders and extrude was examined by optical microscopy (OM), scanning electron microscopy (SEM), and transmission electron microscopy (TEM). The alloy powders were subsequently canned, degassed and extruded in order to produce the alloy bulk. It was found that the micro structure of the Al-20Si alloy powder was refined and the mechanical properties was significantly improved by the addition of 0.6Sc.

• Korean Journal of Materials Research
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• v.20 no.6
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• pp.338-343
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• 2010

As an alternative to the W plug used in MOSFETs, a Cu plug with a NiSi contact using Ta / TaN as a diffusion barrier is currently being considered. Conventionally, Ni was first deposited and then NiSi was formed, followed by the barrier and Cu deposition. In this study, Ti was employed as a barrier material and simultaneous formation of the NiSi contact and Cu plug / Ti barrier was attempted. Cu(100 nm) / Ti / Ni(20 nm) with varying Ti thicknesses were deposited on a Si substrate and annealed at $4000^{\circ}C$ for 30 min. For comparison, Cu/Ti/NiSi thin films were also formed by the conventional method. Optical Microscopy (OM), Scanning Probe Microscopy (SPM), X-Ray Diffractometry (XRD), and Auger Electron Microscopy (AES) analysis were performed to characterize the inter-diffusion properties. For a Ti interlayer thicker than 50 nm, the NiSi formation was incomplete, although Cu diffusion was inhibited by the Ti barrier. For a Ti thickness of 20 nm and less, an almost stoichiometric NiSi contact along with the Cu plug and Ti barrier layers was formed. The results were comparable to that formed by the conventional method and showed that this alternative process has potential as a formation process for the Cu plug/Ti barrier/NiSi contact system.

• Korean Journal of Optics and Photonics
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• v.17 no.4
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• pp.335-341
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• 2006

A modified Michelson interferometer type digital holography microscopy system is developed. There is a problem about recording and numerical reconstruction area at the microscopy application of Michelson type interferometer structure in the digital holography field. In this paper, to overcome this problem, we developed a new reflection type digital holography microscope system and increased recording and numerical reconstruction area of target object.

• Applied Microscopy
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• v.42 no.3
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• pp.174-178
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• 2012

In the present study, the oxidation behavior of $Cu_{50}Zr_{50}$ and $Cu_{46}Zr_{46}Al_8$ metallic glasses has been investigated using transmission electron microscopy with a particular attention on the oxidation behavior in the supercooled liquid state. Identification of the oxidation product after continuous heating treatment shows that in $Cu_{50}Zr_{50}$ metallic glass, $ZrO_2$ with the monoclinic structure forms on the supercooled liquid as well as on the crystallized matrix. On the contrary, in $Cu_{46}Zr_{46}Al_8$ metallic glass, $ZrO_2$ with the tetragonal structure forms on the supercooled liquid, but that with the monoclinic structure forms on the crystallized matrix. The result indicates that the $Cu_{50}Zr_{50}$ metallic glass exhibits far better oxidation resistance in the supercooled liquid state than the $Cu_{46}Zr_{46}Al_8$ metallic glass.

• Journal of the Korean Vacuum Society
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• v.7 no.s1
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• pp.37-43
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• 1998

The mechanism of interaction between low energy ions and biological organisms has been paid much attention recently. In order to clarify the microstructural response to low energy ion irradiation embryonic cells of Paeonia rockii L. implanted by $Fe^{1+}$ ions with the energy of 80KeV were investigated by Optical Microscopy (OM), Scanning electron Microscopy(SEM) and Transmission Electron Microscopy(TEM). At the dose of 1$\times$1015 ions/$\textrm{cm}^2$, apparent cellular damage was observed in the outer several layers of the radicle. The shape of the cells was obviously deformed from regular polygon to irregular. The cell walls became obscure. SEM micrographs showed that the surface of the radicle was etched severely. It was observed by TEM that nucleus of the implanted cell was elongated and tended to fracture. Nuclear envelope lost its integrity. The implanted $Fe^{1+}$ ions were detected by Energy Dispersive Spectroscopy (EDS). These observations showed that low energy ions could damage to the plant organisms with the thickness of about 30~50$\mu\textrm{m}$. The possible reasons for radiation damage in the biological organisms were discussed.

• Transactions of the Korean Society of Pressure Vessels and Piping
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• v.10 no.1
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• pp.82-89
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• 2014

In this study, the metallurgical analysis and mechanical property measurement have been performed to investigate the effect of long-term thermal aging on the microstructural evolution in the fusion boundary region between weld metal and low alloy steel in dissimilar metal welds. A representative dissimilar weld mock-up made of Alloy 690-Alloy 152-A533 Gr. B was fabricated and aged at $450^{\circ}C$ for 2,750 hours. The microstructural characterization was conducted mainly near in a weld root region by using optical microscopy, scanning electron microscopy, transmission electron microscopy. And the mechanical properties were measured with Vickers microhardness test and nanoindentation method. A steep gradient was shown in the chemical composition profile across the interface between A533 Gr. B and Alloy 152. Type-II boundaries were found in weld side of DMW and the hardness was the highest at the narrow zone between Type-II boundary and fusion boundary.

• Proceedings of the KWS Conference
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• 2002.10a
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• pp.38-42
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• 2002

HAZ(Heat Affected Zone of weldm ents) properties were investigated for a high nitrogen austenitic stainless steel with a chemical composition of Fe-0.02C-0.15Si-6.00Mn-10.0Ni-23.0Cr-2.00Mo-0.48N-0.14V. Thermal cycle of HAZ was simulated by the thermal cycle simulator (Gleeble 1500). The heat treatment was applied to the Charpy test size sample without notch under various peak temperatures and/or the holding times condition. V-notch Charpy test was performed at the temperature range of 273~77 K. Metallographic examination also was carried out by using optical microscopy, scanning electron microscopy and transmission electron microscopy. The simulated specimens revealed a slight embrittlement compared with the base materials. The impact toughness of the specimens deteriorated with the decreasing test temperature. The results from Charpy V-notch test, however, showed that significant degradation of absorbed energy caused by brittle fracture was not observed for the specimen tested in the test temperature range.