• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1893-1895
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• 2001

In this paper, novel release technique using wet etch is proposed. The results of this technique and the results of SAMs (Self-Assembled monolayers) coated after release using this technique are compared. Fabricated structure have 100 um in width and experimental length is from 100 um to 1 mm. Thickness of aluminum sacrificial layer is 2 um and structure thickness is 2.5 um. Cantilevers and bridges are fabricated with electroplated gold and silicon nitride deposited on substrate. An aluminium sacrificial layer was evaporated thermally and removed in various wet etching solutions. Detachment length of cantilever is 200 um and detachment length of bridge is 1 mm after isooctane rinsing. And the SAMs coating condition which is appropriate for gold and nitride are studied respectively.

• Journal of the Microelectronics and Packaging Society
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• v.20 no.4
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• pp.65-68
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• 2013

A novel bumping process using solder bump maker (SBM) is developed for fine-pitch flip chip bonding. It features maskless screen printing process. A selective solder bumping mechanism without the mask is based on the material design of SBM. Maskless screen printing process can implement easily a fine-pitch, low-cost, and lead-free solder-on-pad (SoP) technology. Its another advantage is ternary or quaternary lead-free SoP can be formed easily. The process includes two main steps: one is the thermally activated aggregation of solder powder on the metal pads on a substrate and the other is the reflow of the deposited powder on the pads. Only a small quantity of solder powder adjacent to the pads can join the first step, so a quite uniform SoP array on the substrate can be easily obtained regardless of the pad configurations. Through this process, an SoP array on an organic substrate with a pitch of 130 ${\mu}m$ is, successfully, formed.

• Structural Engineering and Mechanics
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• v.60 no.1
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• pp.91-110
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• 2016

Tube hydroforming (THF) under pulsating hydraulic pressures is a novel technique that applies pulsating hydraulic pressures that are periodically increased to deform tubular materials. The deformation behaviours of tubes in pulsating THF may differ compared to those in conventional non-pulsating THF due to the pulsating hydraulic pressures. The equivalent stress-strain relationship of metal materials is an ideal way to describe the deformation behaviours of the materials in plastic deformation. In this paper, the equivalent stress-strain relationships of SS304 tubes in pulsating hydroforming are determined based on experiments and simulation of free hydraulic bulging (FHB), and compared with those of SS304 tubes in non-pulsating THF and uniaxial tensile tests (UTT). The effect of the pulsation parameters, including amplitude and frequency, on the equivalent stress-strain relationships is investigated to reveal the plastic deformation behaviours of tubes in pulsating hydroforming. The results show that the deformation behaviours of tubes in pulsating hydroforming can be well described by the equivalent stress-stain relationship obtained by the proposed method. The amplitude and frequency of pulsating hydraulic pressure have distinct effects on the equivalent stress-strain relationships-the equivalent stress becomes augmented and the formability is enhanced with the increase of the pulsation amplitude and frequency.

• JSTS:Journal of Semiconductor Technology and Science
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• v.13 no.5
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• pp.473-481
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• 2013

A fractional folding analog-to-digital converter (ADC) with a novel arithmetic digital encoding technique is discussed. In order to reduce the asymmetry errors of the boundary conditions for the conventional folding ADC, a structure using an odd number of folding blocks and fractional folding rate is proposed. To implement the fractional technique, a new arithmetic digital encoding technique composed of a memory and an adder is described. Further, the coding errors generated by device mismatching and other external factors are minimized, since an iterating offset self-calibration technique is adopted with a digital error correction logic. A prototype 8-bit 1GS/s ADC has been fabricated using an 1.2V 0.13 um 1-poly 6-metal CMOS process. The effective chip area is $2.1mm^2$(ADC core : $1.4mm^2$, calibration engine : $0.7mm^2$), and the power consumption is 88 mW. The measured SNDR is 46.22 dB at the conversion rate of 1 GS/s. Both values of INL and DNL are within 1 LSB.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.7
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• pp.72-78
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• 1998

This paper is focused on the fabrication of reliable novel antifuse, which could operate at low voltage along with the improvement in OFF and ON-state properties. The fabricated antifuse consists of Al/BaTi$_{2}$O$_{3}$/SiO$_{2}$/TiW-silicide structure. Through the systematic analyses for bottom metal and the intermetallic insulator, material and electri cproperties were investiaged. TiW-silicide as the bottom electrode had smooth surface with average roughness of 11.angs. at 10X10.mu.m$^{2}$ and was bing kept as-deposited SiO$_{2}$ film stable. Amorphous BaTi$_{2}$O$_{3}$ film as the another insulator was chosen because of its low breakdown strength (2.5MV/cm). breakdown voltage of antifuse is remarkably reduced by using BaTi$_{2}$O$_{3}$ film, and leakage current of that maintained low level due to the SiO$_{2}$ film. Low ON-resistance (46.ohm./.mu.m$^{2}$) and low programming voltage(9.1V) can be obtained in theses antifuses with 220.angs. double insulator layer and 19.6X10$^{-6}$ cm$^{2}$ area, while keeping sufficient OFF-state reliability (less than 1nA).

• Journal of Energy Engineering
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• v.19 no.1
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• pp.21-24
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• 2010

We present a novel electrochemical method to fabricate a single Pd nanowire based on direct current assisted dielectropheresis (DEP) process between two predefined metal electrodes. The electrochemical methods was investigated as functions of frequency and voltage for optimal growth conditions of Pd nanowire. The synthesized Pd nanowire have a good resistance of $1\;k{\Omega}$, diameters of several hundred nanometers on average and lengths of $8\;{\mu}m$. Finally, the single Pd nanowire was capable of detecting hydrogen in the concentration range from 100 to 2500 ppm with high sensitivity and response time, thus demonstrating its suitability for use as a hydrogen sensor.

• Journal of the Korean Ceramic Society
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• v.31 no.5
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• pp.552-560
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• 1994

A composite of TiB2-Al2O3 system was successfully prepared from a mixture of TiO2, B2O3, and Al by self-propagating high temperature synthesis (SHS) with a novel characteristic, utilizing the internal oxidation heat of aluminium metal of the mixture, instead of by a conventional technique, externally heating a mixture of Ti, B and Al2O3. From a mixture with B/Ti molar ratio of =2.0, pure two phases of TiB2 and $\alpha$-Al2O3 with good crystallinity and small, uniform sizes were formed. However, when the B/Ti molar ratio of the mixture goes to a value less than 2.0, in addition to the above main minerals, a small smounts of metastable phases such as TiB and Ti3B4 were formed. It was found that about 60%, the optimum green density of compacts gave their highest reaction rate and temperature during SHS process. TiB2-Al2O3 system composite with B/Ti molar ratio of =2.0 could be pressurelessly sintered even at 190$0^{\circ}C$ under Ar gas flows without any addition of sintering aids, showing their good properties such as 91.2% in relative density, 2750 kgf/$\textrm{mm}^2$ in Vickers hardness and 2620 kgf/$\textrm{cm}^2$ in flexural strength.

• Journal of the Korean Ceramic Society
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• v.51 no.3
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• pp.139-144
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• 2014

Activated carbon fiber (ACF) was modified with MnS nanoparticles to prepare MnS-ACF, and it was employed for preparation of MnS-$ACF/TiO_2$ composites with titanium (IV) n-butoxide (TNB). The properties of MnS-$ACF/TiO_2$ composites were characterized by XRD, SEM, and EDX. EDX results showed the presence of C, O, and Ti as major elements and traces of the metal elements Mn and S. The photocatlytic activity was evaluated by degradation of methyl blue (MB) and methyl orange (MO) dye. The results demonstrated that as-prepared samples could effectively photodegrade MB and MO under UV irradiation. Subsequently, the decomposition of MB solution showed the combined effects of adsorptions by ACF and enhanced photocatalytic effect by $TiO_2$. Finally, the photocatalytic effect increased due to photo-induced-electron absorption effect by ACF and electron trap effect by comodified MnS nanoparticles.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.40 no.12
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• pp.17-23
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• 2003

A sensor array (3${\times}$5$\textrm{mm}^2$ in diaphragm dimension) of 12 sensing clements with different operating temperatures was optimized with respect to thermal operation. This sensor array with single heater on a glass diaphragm over back-etched silicon bulk realizes a novel concept of a sensor array: an array of sensor clements operated at different temperatures can yield more information than single measurement. The proposed micro sensor array could provide well-integrated array structure because it had only single heater at the center of the diaphragm and used the various sensing properties of two kinds of metal oxide layers with various operating temperatures.

• Advances in environmental research
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• v.5 no.2
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• pp.141-151
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• 2016

Large amounts of aluminum hydroxide ($Al(OH)_3$) exist in water purification sludge (WPS) because of the added aluminum coagulant in water treatment process. Notably, $Al(OH)_3$ is an amphoteric compound, can be dissolved in its basic condition using sodium hydroxide to form aluminate ions ($Al(OH)_4{^-}$). However, in a process in which pH is increasing, the humid acid can be dissolved easily from WPS and will inhibit the recovery and reuse of the dissolved aluminate ions. This study attempts to fix this problem by a novel approach to separate $Al(OH)_4{^-}$ ions using nanofiltration (NF) technology. Sludge impurity in a alkaline solution is retained by the NF membrane, such that the process recovers $Al(OH)_4{^-}$ ions, and significantly decreases the organic matter or heavy metal impurities in the permeate solution. The $Al(OH)_4{^-}$ ion is an alkaline substance. Experimental results confirm that a recovered coagulant of $Al(OH)_4{^-}$ ion can effectively remove kaolin particles from slightly acidic synthetic raw water.