Browse > Article

Thermal Analysis of Highly Integrated Gas Sensor Array with Advanced Thermal Stability Properties  

정완영 (동서대학교 인터넷공학부)
임준우 (대구과학대학 인터넷정보계열)
이덕동 (경북대학교 전자전기컴퓨터공학부)
Publication Information
Journal of the Institute of Electronics Engineers of Korea SD / v.40, no.12, 2003 , pp. 17-23 More about this Journal
Abstract
A sensor array (3${\times}$5$\textrm{mm}^2$ in diaphragm dimension) of 12 sensing clements with different operating temperatures was optimized with respect to thermal operation. This sensor array with single heater on a glass diaphragm over back-etched silicon bulk realizes a novel concept of a sensor array: an array of sensor clements operated at different temperatures can yield more information than single measurement. The proposed micro sensor array could provide well-integrated array structure because it had only single heater at the center of the diaphragm and used the various sensing properties of two kinds of metal oxide layers with various operating temperatures.
Keywords
Gas sensor; Micro gas sensor; Gas sensor array; SnO2; Thermal analysis;
Citations & Related Records
연도 인용수 순위
  • Reference
1 W.P. Carey, K.R. Beebe, E. Sanchez, P. Geladi and B.R. Kowalski, 'Chemometric analysis of multisensor arrays', Sensors and Actuators, vol.9, pp. 223-234, 1986   DOI   ScienceOn
2 D. Bednarczyk, S.P. DeWeerth, 'Smart chemical sensing arrays using tin oxide sensors and analog winner-take all signal processing', Sensors and Actuators B, vol.26-27, pp, 271-274, 1995   DOI   ScienceOn
3 X. Wang, W. Patyrick Carey, Sinclair S. Yee, 'Monolithic thin-film metal-oxide gas-sensor arrays with application to monitoring of organic vapors', Sensors and Actuators B, vol.28, pp. 63-70, 1995   DOI   ScienceOn
4 S. Semancik, R. E. Cavicchi, K. G. Kreider, J. S. Suehle, P. Chaparala, 'Selected-area deposition of multiple active films for conducto-metric microsensor arrays', Sensors and Actuators B, vol.34, pp.209-212, 1996   DOI   ScienceOn
5 Introduction to ANSYS-Revision 5.51, Ansys Inc., U.S.A., 2000
6 W-Y. Chung, J.-W Lim, D.-D. Lee, N. Miura and N. Yamazoe, 'Thermal and gas-sensing properties of planar-type micro gas sensor', Sensors and Actuators B. vol.64, pp.118-123, 2000   DOI   ScienceOn
7 V.Demame and A. Grisel, 'Domestic gas detection system using two integrated sensors', Sensors and Actuators B, vol.19, no.1 3, pp. 658-660, 1994   DOI   ScienceOn
8 W.-Y. Chung, J.-W. Lim, D.-D. Lee and N. Yamazoe, 'Fabrication of low power micro-heater for micro-sensor I.The thermal distribu-tion analysis by the finite element method', J. Korean Sensors Society, vol.6(4), pp.337-344, 1997   과학기술학회마을
9 임준우, 온도 구배를 갖는 마이크로 가스센서 어레이의 제조 및 특성. 경북대학교 박사학위논문, 2000. 12