• Journal of the Institute of Electronics Engineers of Korea SD
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• v.38 no.2
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• pp.9-9
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• 2001

Nano-scale의 게이트 길이를 가지는 MOSFET소자는 접합 깊이가 20∼30㎚정도로 매우 얕은 소스/드레인 확장 영역을 필요로 한다. 본 연구에서는 $As₂^ +$ 이온의 10keV이하의 낮은 에너지 이온 주입과 RTA(rapid thermal annealing)공정을 적용하여 20㎚이하의 얕은 접합 깊이와 1.O㏀/□ 이하의 낮은 면저항 값을 가지는 $n ^+$-p접합을 구현 하였다. 이렇게 형성된 $n^ +$-p 접합을 nano-scale MOSFET소자 제작에 적용 시켜서 70㎚의 게이트 길이를 가지는 NMOSFET을 제작하였다. 소스/드레인 확장 영역을 $As₂^ +$ 5keV의 이온 주입으로 형성한 100㎚의 게이트 길이를 가지는 NMOSFET의 경우, 60mV의 낮은 $V_ T$(문턱 전압감소) 와 87.2㎷의 DIBL (drain induced barrier lowering) 특성을 확인하였다. $10^20$$㎝^ -3$이상의 도핑 농도를 가진 abrupt한 20㎚급의 얕은 접합, 그리고 이러한 접합이 적용된 NMOSFET소자의 전기적 특성들은 As₂/sup +/의 낮은 에너지의 이온 주입 기술이 nano-scale NMOSFET소자 제작에 적용될 수 있다는 것을 제시한다.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.41 no.7
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• pp.21-29
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• 2004

Hot carrier degradation characteristics of Nano-scale CMOSFETs with dual gate oxide have been analyzed in depth. It is shown that, PMOSFET lifetime dominate the device lifetime than NMOSFET In Nano-scale CMOSFETs, that is, PMOSFET lifetime under CHC (Channel Hot Carrier) stress is much lower than NMOSFET lifetime under DAHC (Dram Avalanche Hot Carrier) stress. (In case of thin MOSFET, CHC stress showed severe degradation than DAHC for PMOSFET and DAHC than CHC for NMOSFET as well known.) Therefore, the interface trap generation due to enhanced hot hole injection will become a dominant degradation factor in upcoming Nano-scale CMOSFET technology. In case of PMOSFETs, CHC shows enhanced degradation than DAHC regardless of thin and thick PMOSFETs. However, what is important is that hot hole injection rather than hot electron injection play a important role in PMOSFET degradation i.e. threshold voltage increases and saturation drain current decreases due to the hot carrier stresses for both thin and thick PMOSFET. In case of thick MOSFET, the degradation by hot carrier is confirmed using charge pumping current method. Therefore, suppression of PMOSFET hot carrier degradation or hot hole injection is highly necessary to enhance overall device lifetime or circuit lifetime in Nano-scale CMOSFET technology

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.40 no.7
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• pp.474-480
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• 2003

We designed and tested a new scan driver output stage. Compared to conventional CMOS structured scan driver IC′s, the new NMOSFET-only scan driver circuit can reduce the chip area and therefore, the chip cost considerably. We confirmed the circuit operation with open drain power NMOSFET IC′s by driving 2"PDP test panel. We defined critical device parameters and their optimization methods lot the best circuit performance.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.10
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• pp.60-66
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• 1998

The hot carrier induced performance degradation of 0.8${\mu}{\textrm}{m}$ RF NMOSFET has been investigated within the general framework of the degradation mechanism. The device degradation model of an unit finger gate MOSFET could be applied for the device degradation of the multi finger gate RF NMOSFET. The reduction of cut-off frequency and maximum frequency can be explained by the transconductance reduction and the drain output conductance increase, which are due to the interface state generation after the hot carrier stressing. From the correlation between hot carrier induced DC and RF performance degradation, we can predict the RF performance degradation just by the DC performance degradation measurement.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.38 no.2
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• pp.95-102
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• 2001

Nano-scale gate length MOSFET devices require extremely shallow source/drain eftension region with junction depth of 20∼30nm. In this work, 20nm $n^{+}$-p junctions that are realized by using this $As_{2}^{+}$ low energy ($\leq$10keV) implantation show the lower sheet resistance of the $1.0k\Omega$/$\square$ after rapid thermal annealing process. The $As_{2}^{+}$ implantation and RTA process make it possible to fabricate the nano-scale NMOSFET of gate length of 70nm. $As_{2}^{+}$ 5 keV NMOSFET shows a small threshold voltage roll-off of 60mV and a DIBL effect of 87.2mV at 100nm gate length devices. The electrical characteristics of the fabricated devices with the heavily doped and abrupt $n^{+}$-p junctions ($N_{D}$〉$10^{20}$$cm^{-3}$, $X_{j}$$\leq$20nm) suggest the feasibility of the nano-scale NMOSFET device fabrication using the $As_{2}^{+}$ low energy ion implantation.

• Proceedings of the IEEK Conference
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• 1998.06a
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• pp.511-513
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• 1998

본 연구는 영상소자의 감도를 향상 시키기 위하여 전압 분배 회로를 가진 감지 회로를 설계하였다. 전압분배 회로는 NMOSFET과 Poly 저항의 두 경우로 설계하였으며 감지 회로에 흐르는 전류는 전압 분배 회로를 NMOSFET으로 설게하였을때가 Poly 저항으로 구성한 경우보다 적게 흐르며 감도 특성도 좋은 것으로 나타났다. 또한 poly 저항보다 NMOSFET을 이용한 전압 분배 회로가 동작 주파수에 따른 특성이 우수하였다.

• Proceedings of the IEEK Conference
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• 2003.07b
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• pp.1109-1112
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• 2003

본 연구는 switching mode 의 Power NMOSFET failure mode 에 관하여 분석하고 원인을 규명하였다. 분석된 power NMOSFET은 30V급이며, vender A의 상용화 제품이다. 발생한 failure mode는 power switch 회로에서 특정 ID 를 detect 하지 못하는 mode 였다. 측정결과 source voltage 가 저하되었으며, power NMOSFET DC 동작특성 분석 결과 Vgs 변화에 따라 Id 가 저하되었다. Fail 된 power MOSFET 특성값 reference는 동일 LOT의 양품을 선정하였다. De-cap후 Inversion 과 Accumulation mode 별로 Photoemission spectrum analyzer(PSA) 분석 방법을 적용하였다. 결과 accumulation mode 에서 intensity가 감소하였으며, forward diode mode에서 국소적으로 변화하는 영역이 검출되었다. SEM 분석결과 gate metal 과 source metal 의 micro-contact 이 이루어져 있었다. 이 경우 gate metal 과 source metal 사이 close loop 를 형성하여 gate charge량을 변화시켜 power NMOSFET의 출력을 저하하는 failure mode가 발생됨을 분석할 수 있었다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.7
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• pp.583-590
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• 2002

In this paper, a new Silicon on Insulator (SOI)-based photodetector was proposed, and its basic operation principle was explained. Fabrication steps of the detector are compatible with those of conventional SOI CMOS technology. With the proposed structure, RGB (Read, Green, Blue) which are three primary colors of light can be realized without using any organic color filters. It was shown that the characteristics of the SOI-based detector are better than those of bulk-based detector. To see the response characteristics to the green (G) among RGB, SOI and bulk NMOSFETS were fabricated using $1.5\mu m$ CMOS technology and characterized. We obtained optimum optical response characteristics at $V_{GS}=0.35 V$ in NMOSFET with threshold voltage of 0.72 V. Drain bias should be less than about 1.5 V to avoid any problem from floating body effect, since the body of the SOI NMOSFET was floated. The SOI and the bulk NMOSFETS shown maximum drain currents at the wavelengths of incident light around 550 nm and 750 nm, respectively. Therefore the SOI detector is more suitable for the G color detector.

• The KIPS Transactions:PartA
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• v.15A no.4
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• pp.211-216
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• 2008

In this paper we fabricated and measured the $0.26{\mu}m$ NMOSFET with wet gate oxide and nitride oxide gate to compare that the charateristics of hot carrier effect, charge to breakdown, transistor Id_Vg curve, charge trapping, and SILC(Stress Induced Leakage Current) using the HP4145 device tester. As a result we find that the characteristics of nitride oxide gate device better than wet gate oxide device, especially hot carrier lifetime(nitride oxide gate device satisfied 30 years, but the lifetime of wet gate oxide was only 0.1 year), variation of Vg, charge to breakdown, electric field simulation and charge trapping etc.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.12
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• pp.944-948
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• 2011

In this paper, flicker noise characteristic and channel hot carrier degradation of NMOSFETs with plasma nitrided oixde (PNO) and thermally nitrided oxide (TNO) are analyzed in depth. Compared with NMOSFET with TNO, flicker noise characteristic of NMOSFET with PNO is improved significantly because nitrogen density in PNO near the Si/$SiO_2$ interface is less than that in TNO. However, device degradation of NMOSFET with PNO by channel hot carrier stress is greater than that with TNO although PMOSFET with PNO showed greater immunity to NBTI degradation than that with TNO in previous study. Therefore, concurrent investigation of the reliability as well as low frequency noise characteristics of NMOSFET and PMOSFET is required for the development of high performance analog MOSFET technology.