• 제목/요약/키워드: Multi-layer dielectric coating

검색결과 15건 처리시간 0.035초

Relationship of the Distribution Thickness of Dielectric Layer on the Nano-Tip Apex and Distribution of Emitted Electrons

  • Al-Qudah, Ala'a M.;Mousa, Marwan S.
    • Applied Microscopy
    • /
    • 제46권3호
    • /
    • pp.155-159
    • /
    • 2016
  • This paper analyses the relationship between the distribution of a dielectric layer on the apex of a metal field electron emitter and the distribution of electron emission. Emitters were prepared by coating a tungsten emitter with a layer of epoxylite resin. A high-resolution scanning electron microscope was used to monitor the emitter profile and measure the coating thickness. Field electron microscope studies of the emission current distribution from these composite emitters (Tungsten-Clark Electromedical Instruments Epoxylite resin [Tungsten/CEI-resin emitter]) have been carried out. Two forms of image have been observed: bright single-spot images, thought to be associated with a smooth substrate and a uniform dielectric layer; and multi-spot images, though to be associated with irregularity in the substrate or the dielectric layer.

유전체가 다층으로 코팅된 평행 2선식 전송선로 해석 (Analysis of a Parallel-Two-Wire Transmission Line Coated with Multi-layer Dielectric Material)

  • 천동완;김원기;신철재
    • 대한전자공학회논문지TC
    • /
    • 제41권12호
    • /
    • pp.131-137
    • /
    • 2004
  • 본 논문에서는 등각사상 법을 이용해 유전체가 다층으로 코팅된 평행 2선식 전송선로의 특성임피던스 및 유효 유전상수 등을 계산하는 방법을 제안하였다. 먼저 두께 및 유전상수가 다른 유전체가 임의의 N 층으로 코팅되었을 때 평행 2선식 전송선로의 정전용량을 계산하였으며, 이를 이용해 임피던스 및 유효 유전상수 등을 계산하였다. Ansoft 사의 Maxwell 2D를 이용한 시뮬레이션 결과와 비교하였을 때, 계산 결과가 오차범위 4% 이내로 거의 일치함을 알 수 있었다.

구축함에 탑재되는 통합마스트의 RCS 저감 구조 설계 (Design of RCS Reduction Structure of Integrated Mast on the Destroyer)

  • 이종학;라영은;이건민;장주수
    • 전기전자학회논문지
    • /
    • 제24권1호
    • /
    • pp.238-242
    • /
    • 2020
  • 본 논문에서는 구축함에 탑재되는 통합 마스트의 RCS(Radar Cross Section) 값을 저감시키기 위해 다층 구조로 되어있는 유전체 코팅을 이용한 기법을 제시한다. 제시된 다층 구조는 특별히 고유전율을 요구하거나 전자기파 흡수 차단에 많이 사용되는 자성체성분을 포함하지 않은 일반적인 유전체를 사용할 수 있도록 유전율의 범위를 정했기 때문에 제작에 용이하다는 장점이 있다. 제시된 다층 유전체 구조를 통합 바스트 형상에 적용시킨 후 시뮬레이션을 진행한 결과 다층 구조가 없는 구조물과 비교하여 6GHz에서 10.9dB, 12GHz에서 11.95dB, 18GHz에서 11.63dB의 RCS 저감 성능이 있는 것을 확인하였다.

Multi-coating법으로 제조된 두꺼운 PZT막의 두께 변화에 따른 미세구조 및 전기적 특성 (Microstructures and Electrical Properties of Thick PZT Films with Thickness Variation Fabricated by Multi-coating Method)

  • 박준식;장연태;박효덕;최승철;강성군
    • 한국재료학회지
    • /
    • 제12권3호
    • /
    • pp.211-214
    • /
    • 2002
  • Properties of 52/48 PZT films with various thicknesses for piezoelectric micro-electro mechanical systems (MEMS) devices fabricated by multi-coating method on $Pt(3500{\AA})/Ti(400{\AA})/SiO_2(3000{\AA})/Si$(525$\mu\textrm{m}$) substrates were investigated. PZT films were deposited by spin-coating process at 3500 rpm for 30 sec, followed by pyrolysis at 45$0^{\circ}C$ for 10 min producing the thickness of about 120nm. These processes were repeated 4, 8, 12, 16 and 20 times in order to have various thicknesses, respectively. Finally, they were crystallized at $650^{\circ}C$ for 30 min. All thick PZT films showed dense and homogeneous surface microstructures. Thick PZT films showed crystalline structures of random orientations with increasing thickness. Dielectric constants of thick PZT films were increased with increasing film thickness and reached 800 at 100kHz for 2.3$\mu\textrm{m}$ thick PZT film. $P_r\; and\; E_c$ of 2.3$\mu\textrm{m}$ thick PZT films were about 20$\mu$C/$\textrm{cm}^2$ and 63kV/cm. Depth profile analysis by Auger Electron Spectroscopy (AES) of 4800 $\AA$ thick PZT film showed the formation of the perovskite phase on Pt layer by Pb diffusion behavior. It was considered that Pb-Pt intermediate layer promoted PZT (111) columnar structures.

The Effect of Anodizing on the Electrical Properties of ZrO2 Coated Al Foil for High Voltage Capacitor

  • Chen, Fei;Park, Sang-Shik
    • Applied Science and Convergence Technology
    • /
    • 제24권2호
    • /
    • pp.33-40
    • /
    • 2015
  • $ZrO_2$ and Al-Zr composite oxide film was prepared by vacuum assisted sol-gel dip coating method and anodizing. $ZrO_2$ films annealed above $400^{\circ}C$ have tetragonal structure. $ZrO_2$ layers inside etch pits were successfully coated from the $ZrO_2$ sol. The double layer structures of samples were obtained after being anodized at 100 V to 600 V. From the TEM images, it was found that the outer layer was $Al_2O_3$, the inner layer was multi-layer of $ZrO_2$, Al-Zr composite oxide and Al hydrate. The capacitance of $ZrO_2$ coated foil exhibited about 28.3% higher than that of non-coating foil after being anodized at 100 V. The high capacitance of $ZrO_2$ coated foils anodized at 100 V can be attributed to the relatively high percentage of inner layer in total thickness. The electrical properties, such as withstanding voltage and leakage current of coated and non-coated Al foils showed similar values. From the results, $ZrO_2$ and Al-Zr composite oxide is promising to be used as the partial dielectric of high voltage capacitor to increase the capacitance.

Hybrid Sol을 이용한 박막 유전체 제작 (Fabrication of Thin Film Dielectric by Hybrid Sol)

  • 김용석;유원희;장병규;오용수
    • 한국재료학회지
    • /
    • 제17권4호
    • /
    • pp.185-191
    • /
    • 2007
  • The purpose of this study is to evaluate the thin fihn dielectric made of hybrid sol, which consist of barium titanate powder, polymeric sol and other polymers. This sol will be used dielectric applied to small, thin electric passive components such as MLCC(Multi Layer Ceramic Condenser), resister, inductor. This sol is composed of mixed fine barium titanate powder and polymeric sol including Ba, Ti-precursor, solvent, chelating agent, chemical reaction catalyst, the additive sols to improve fired densification and temperature reliability. First at all, we mixed hybrid sol to be dispersed and be stabilized by ball milling for 24hrs. By spin coating method, we makes thin film dielectric on the convectional green sheet for MLCC. After heat treatments, we analyzes the structure morphology, physical, electrical properties and X5R Temperature properties.

PLZT박막의 제조 및 유전 특성에 관한 연구 (A Study on the Preparation and Dielectric Properties of the PLZT Thin Films.)

  • 박준열;박인길;이성갑;이영희
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 1995년도 춘계학술대회 논문집
    • /
    • pp.187-191
    • /
    • 1995
  • Thin film of the (Pb$\_$1-x/La.sub x/)(Zr$\_$0.25/Ti/Sub 0.48/) O$_3$(x=0~13[at%]) were prepared by Sol - Gel method. Multi-layer PLZT thin films were fabricated by spin-coating on Pt/Ti/SiO$_2$/Si substrate. The crystallinity and microstructure of the films were investigated with the sintering condition. At the sintering temperature of of 600[$^{\circ}C$], the perovskite phase was dominat. PLZT(11/52/48)thin films sintered at 600[$^{\circ}C$], 1[hr] had good dielectric constant (1236), dielectric loss (2.2[%]), remanent polarization (1.38[${\mu}$C/$\textrm{cm}^2$] and coercive field(16.86[ kV/cm]) respectively.

  • PDF

ZERODUR의 저손실거울의 산란에 대한 연구 (A study on scattering in low loss mirror with superpolished ZERODUR)

  • 이범식;유연석;이재철
    • 한국광학회:학술대회논문집
    • /
    • 한국광학회 2007년도 하계학술발표회 논문집
    • /
    • pp.187-188
    • /
    • 2007
  • Four kinds of mirror substrates with same surface roughness were fabricated. On those substrates, a dielectric multi-layer coating with high reflectivity was deposited by ion beam sputtering technique. Most of the fused silica mirrors showed lower scattering than the ZERODUR mirrors one, which deposited on substrates similar in surface roughness. The ZERODUR mirrors scattering strongly depend on the micro-structure of $Ta_2O_5/SiO_2$ thin films wear deposited on ZERODUR substrates.

  • PDF

Cu/Sn 비아를 적용한 일괄적층 방법에 의한 다층연성기판의 제조 (Fabrication of Laminated Multi-layer Flexible Substrate with Cu/Sn Via)

  • 이혁재;유진
    • 마이크로전자및패키징학회지
    • /
    • 제11권4호
    • /
    • pp.1-5
    • /
    • 2004
  • 다층 연성기판은 높은 전기 전도성과 낮은 절연상수로 잘 알려진 구리와 폴리이미드로 구성되어 있다. 본 연구에서는 이러한 다층연성기판을 패턴된 스테인리스 스틸 위에 구리선을 전기도금하고 폴리이미드를 코팅함에 의해서 균일한 형태의 $5{\mu}m$-pitch의 전도선을 제조하는데 성공하였다. 또한, 다층기판 형성시 비아흘은 UV 레이저로 형성시켰으며 구리와 주석을 전기 도금함으로 이를 채웠다. 그런다음 비아와 전도선이 붙은 채로 스테인리스 스틸에서 벗겨냈다. 이렇게 형성된 각각의 층을 한번에 적층하여 다층연성기판을 완성하였다. 적층시 주석과 구리사이에 고체상태 반응(Solid state reaction)이 발생하여 $Cu_6Sn_5$ and $Cu_3Sn$을 형성하였으며 비아패드에 비아가 수직으로 위치한 완전한 형태의 층간 연결을 형성하였다. 이러한 비아 형성 공정은 V형태의 비아나 페이스트 비아와 비교할 때 좋은 전기적 특성, 저가공정등의 여러 장점을 가지고 있다.

  • PDF

SiO2의 첨가를 통한 Polyfluorene계 Polymer-OLED의 발광 동작 개선 가능성 (Improved On-off Property of SiO2 Embedded Polyfluorene Polymer-OLED)

  • 전병주;김효준;김종수;정용석
    • 반도체디스플레이기술학회지
    • /
    • 제16권1호
    • /
    • pp.40-44
    • /
    • 2017
  • The effect of weak dielectric silicone dioxide($SiO_2$) embedded in polyfluorene(PFO) emitting layer of polymer-based multi structure OLED was investigated. Indium tin oxide(ITO)/poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate) (PEDOT:PSS)/poly(9,9-di-n-octylfluorenyl-2,7-diyl)(PFO)/2,2,2"-(1,3,5-benzinetriyl)-tris(1-phenyl-1-H-benzimidazole) (TPBi)/aluminum(Al) structure OLED was fabricated by spin-coating method. Applied electric field causes some effect on $SiO_2$ in PFO layer. Thus, interaction between polymers and affected $SiO_2$ might generate electrical and luminance properties change. Experimental results, show the reduced threshold voltage of 6 V(from 23 V to 17 V). The maximum current density was rather increased from $71A/m^2$ to $610A/m^2$ and maximum brightness was also increased from $7.19cd/m^2$ to $41.03cd/m^2$, 9 and 6 times each. Additionally we obtained colour broadening result due to the increasing of blue-green band emission. Consequently we observed that electrical and luminance properties are enhanced by adding $SiO_2$ and identified the possibility of controlling the emission colour of OLED device according to colour broadening.

  • PDF