Applied Science and Convergence Technology

The Korean Vacuum Society (한국진공학회)
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The Effect of Anodizing on the Electrical Properties of ZrO2 Coated Al Foil for High Voltage Capacitor

  • Chen, Fei (School of Nano Materials Engineering, Kyungpook National University) ;
  • Park, Sang-Shik (School of Nano Materials Engineering, Kyungpook National University)
  • Received : 2015.02.10
  • Accepted : 2015.02.28
  • Published : 2015.03.30
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Abstract

$ZrO_2$ and Al-Zr composite oxide film was prepared by vacuum assisted sol-gel dip coating method and anodizing. $ZrO_2$ films annealed above $400^{\circ}C$ have tetragonal structure. $ZrO_2$ layers inside etch pits were successfully coated from the $ZrO_2$ sol. The double layer structures of samples were obtained after being anodized at 100 V to 600 V. From the TEM images, it was found that the outer layer was $Al_2O_3$, the inner layer was multi-layer of $ZrO_2$, Al-Zr composite oxide and Al hydrate. The capacitance of $ZrO_2$ coated foil exhibited about 28.3% higher than that of non-coating foil after being anodized at 100 V. The high capacitance of $ZrO_2$ coated foils anodized at 100 V can be attributed to the relatively high percentage of inner layer in total thickness. The electrical properties, such as withstanding voltage and leakage current of coated and non-coated Al foils showed similar values. From the results, $ZrO_2$ and Al-Zr composite oxide is promising to be used as the partial dielectric of high voltage capacitor to increase the capacitance.

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References

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