Microstructures and Electrical Properties of Thick PZT Films with Thickness Variation Fabricated by Multi-coating Method
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Park, Jun-Sik
(MEMS Research Center, Korea Electronics Technoogy Institute)
Jang, Yeon-Tae (Dept. of Materials Science and Eng. Ajou Univ.) Park, Hyo-Deok (MEMS Research Center, Korea Electronics Technoogy Institute) Choe, Seung-Cheol (Dept. of Materials Science and Eng. Ajou Univ.) Gang, Seong-Gun (Dept. of Materials Science and Eng. Ajou Univ.) |
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