Proceedings of the Optical Society of Korea Conference (한국광학회:학술대회논문집)

Optical Society of Korea (한국광학회)
권호 표지

A study on scattering in low loss mirror with superpolished ZERODUR

ZERODUR의 저손실거울의 산란에 대한 연구

  • 이범식 (청주대학교 레이저 광정보광학과) ;
  • 유연석 (청주대학교 레이저 광정보공학과) ;
  • 이재철 (고등기술연구원)
  • Published : 2007.07.01
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Abstract

Four kinds of mirror substrates with same surface roughness were fabricated. On those substrates, a dielectric multi-layer coating with high reflectivity was deposited by ion beam sputtering technique. Most of the fused silica mirrors showed lower scattering than the ZERODUR mirrors one, which deposited on substrates similar in surface roughness. The ZERODUR mirrors scattering strongly depend on the micro-structure of $Ta_2O_5/SiO_2$ thin films wear deposited on ZERODUR substrates.

Keywords