Browse > Article
http://dx.doi.org/10.3740/MRSK.2007.17.4.185

Fabrication of Thin Film Dielectric by Hybrid Sol  

Kim, Yong-Suk (Electro Material & Device LAB, Samsung Electro-Mechanics Co., LTD.)
Yoo, Won-Hee (Electro Material & Device LAB, Samsung Electro-Mechanics Co., LTD.)
Chang, Byeung-Gyu (Electro Material & Device LAB, Samsung Electro-Mechanics Co., LTD.)
Oh, Yong-Soo (Electro Material & Device LAB, Samsung Electro-Mechanics Co., LTD.)
Publication Information
Korean Journal of Materials Research / v.17, no.4, 2007 , pp. 185-191 More about this Journal
Abstract
The purpose of this study is to evaluate the thin fihn dielectric made of hybrid sol, which consist of barium titanate powder, polymeric sol and other polymers. This sol will be used dielectric applied to small, thin electric passive components such as MLCC(Multi Layer Ceramic Condenser), resister, inductor. This sol is composed of mixed fine barium titanate powder and polymeric sol including Ba, Ti-precursor, solvent, chelating agent, chemical reaction catalyst, the additive sols to improve fired densification and temperature reliability. First at all, we mixed hybrid sol to be dispersed and be stabilized by ball milling for 24hrs. By spin coating method, we makes thin film dielectric on the convectional green sheet for MLCC. After heat treatments, we analyzes the structure morphology, physical, electrical properties and X5R Temperature properties.
Keywords
Hybrid sol; spin coating; The additive sols; X5R Temperature properties;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
Times Cited By SCOPUS : 0
연도 인용수 순위
1 J.D. Mackenzie, E. Bescher, J. Sol-Gel Sci. Tech., 27, 7 (2003)   DOI   ScienceOn
2 J. Yamamatsu, N. Kawano and T. Arashi, A. Sato and Y. Nakano, T. Nomura, J, Power Sources, 60, 199 (1996)   DOI   ScienceOn
3 H. Kumazawa, K. Masuda, Thin Solid Films, 353, 144 (1999)   DOI   ScienceOn
4 H. Kishi, N. Kohzu and J. Sugino, H. Ohsato and Y. Iguchi, T. Okuda, J. Eu. Ceram. Soc., 19, 1043 (1999)   DOI   ScienceOn
5 Y. H. Han, D. J. Shin, J. Kor. Ceram. Soc., 4, (2), 68 (1998)   과학기술학회마을
6 S.H. Yoon, J. H. Lee and D. Y. Kim, J, Am. Ceram. Soc., 85 (12), 3111-3112 (2002)   DOI   ScienceOn
7 R. Chen, A. Cui and X. Wang, Z. Gui, Li, Mater. Lett., 54, 314 (2002)   DOI   ScienceOn
8 N.V. Golubko, M. I. Yanovskaya and L. A. Golubko, E. P. Kovsman, J. Sol-Gel Sci. Tech., 20, 135 (2001)   DOI   ScienceOn
9 Y. Hwang, Y. H. Kim and S. J. Park, J. Kor. Ceram. Soc., Vol. 27, 6, 741 (1990)   과학기술학회마을
10 H. Matsuda, N. Kobayashi and T. Kobayashi, K. Miyazawa and M. Kuwabara, J. Non-Cryst. Solids, 271, 162 (2000)   DOI   ScienceOn
11 H. B. Sharma, H. N. K. Sharma Thin Solid Films, 330, 178 (1998)   DOI   ScienceOn