• Journal of the Korean Society for Precision Engineering
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• v.28 no.3
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• pp.315-322
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• 2011

High-accuracy micropatterns such as V-shaped microgrooves are increasingly in demand for various engineering areas. And the technical trend goes for large surface areas in precision machining technology. So micropatterns with large surface areas are expected to play an increasingly important role in today's manufacturing technology In this study, we focused on developing machining technologies. First, a machine vision system for precise tool setting is developed. Second, an on-machine measurement (OMM) system for large-area measurement is implemented. And also software for tool path generation and simulation is developed. With these technologies we fabricated large-surface micropatterns in an electroless nickel-plated workpiece with single-crystal diamond tools and a 32-in, $675mm{\times}450mm$ mold with tens of V-and pyramid-shaped micropatterns.

• Bulletin of the Korean Chemical Society
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• v.34 no.3
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• pp.815-819
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• 2013

Micropatterns of streptavidin and human epidermal carcinoma A431 cells were successfully imaged, as received and without any labeling, using cluster $Au_3{^+}$ ion beam-based time-of-flight secondary ion mass spectrometry (TOF-SIMS) together with a principal component analysis (PCA). Three different analysis ion beams ($Ga^+$, $Au^+$ and $Au_3{^+}$) were compared to obtain label-free TOF-SIMS chemical images of micropatterns of streptavidin, which were subsequently used for generating cell patterns. The image of the total positive ions obtained by the $Au_3{^+}$ primary ion beam corresponded to the actual image of micropatterns of streptavidin, whereas the total positive-ion images by $Ga^+$ or $Au^+$ primary ion beams did not. A PCA of the TOF-SIMS spectra was initially performed to identify characteristic secondary ions of streptavidin. Chemical images of each characteristic ion were reconstructed from the raw data and used in the second PCA run, which resulted in a contrasted - and corrected - image of the micropatterns of streptavidin by the $Ga^+$ and $Au^+$ ion beams. The findings herein suggest that using cluster-ion analysis beams and multivariate data analysis for TOF-SIMS chemical imaging would be an effectual method for producing label-free chemical images of micropatterns of biomolecules, including proteins and cells.

• Carbon letters
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• v.24
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• pp.55-61
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• 2017

Carbon micropatterns (CMs) were fabricated from a negative-type SU-8 photoresist by proton ion beam lithography and pyrolysis. Well-defined negative-type SU-8 micropatterns were formed by proton ion beam lithography at the optimized fluence of $1{\times}10^{15}ions\;cm^{-2}$ and then pyrolyzed to form CMs. The crosslinked network structures formed by proton irradiation were converted to pseudo-graphitic structures by pyrolysis. The fabricated CMs showed a good electrical conductivity of $1.58{\times}10^2S\;cm^{-1}$ and a very low surface roughness.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.39 no.1
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• pp.71-77
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• 2015

Ultrasonic imprinting is a micropattern replication technology for a thermoplastic polymer surface that uses ultrasonic vibration energy; it has the advantages of a short cycle time and low energy consumption. Recently, ultrasonic imprinting has been further developed to extend its functionality: (i) selective ultrasonic imprinting using mask films and (ii) repetitive ultrasonic imprinting for composite pattern development. In this study, selective ultrasonic imprinting was combined with repetitive imprinting in order to replicate versatile micropatterns. For this purpose, a repetitive imprinting technology was further extended to utilize mask films, which enabled versatile micropatterns to be replicated using a single mold with micro-prism patterns. The replicated hybrid micropatterns were optically evaluated through laser light images, which showed that versatile optical diffusion characteristics can be obtained from the hybrid micropatterns.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.2
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• pp.236-240
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• 2013

In this presentation, we propose a fabrication method of PDMS stencil to apply into a localized culture of NIH/3T3 cells. PDMS stencil was fabricated by nitrogen gas blowing and soft lithography from preparing SU-8 master mold by photolithography. PDMS stencil pattern was production of the circle size 20 to $500{\mu}m$. In the culture test of PDMS stencil, a stencil was placed on a glass disk. The NIH/3T3 cells were successfully cultured into micropatterns by using the PDMS stencil. The results showed that cells could be cultured into micropatterns with precisely controlled manner at any shapes and specific size for bioscience study and bioengineering applications.

• Rapid Communication in Photoscience
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• v.2 no.1
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• pp.24-27
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• 2013

A polymeric photobase generator containing oxime-urethane groups is applied to a fluorescence micropatterning material. Polymer bearing oxime-urethane groups was prepared by copolymerization of methyl methacrylate with methacryloyloxyethyl benzophenoneoxime urethane (MBU). The reaction of amino groups in the irradiated copolymer film with dansyl chloride (Dns-Cl) was monitored by using UV absorption, IR absorption and fluorescence spectroscopy. The fluorescence spectrum of the Dns-Cl-treated irradiated copolymer film shows a strong fluorescence with a fluorescence maximum wavelength at 510 nm. A blue fluorescent micropattern with a line width of $2{\sim}3{\mu}m$ was obtained. Treatment of the irradiated copolymer film with Dns-Cl and rhodamine B mixture led to the formation of green, red, and orange-colored fluorescence micropatterns. Thus, various colored micropatterns on a single polymer film can be obtained by selective excitation of each dye molecules.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.1
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• pp.51-57
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• 2014

Ultrasonic imprinting is a novel process for replicating micropatterns on thermoplastic polymer substrates with low energy consumption and short cycle time. The polymer substrate is softened by the frictional heat and repetitive deformation energy under ultrasonic excitation; thus, a number of micropatterns are replicated on the softened polymer substrate. In the present work, the effect of mold temperature on the replication characteristics of ultrasonic imprinting is investigated. The temperature change in the patterned region is measured by varying the mold temperature. Numerical simulation is then performed for investigating pattern replication characteristics under various mold temperatures. In addition, pattern replication ratio and uniformity are compared through various experimental measurements. Through the results of these comparisons, it is found that the mold temperature has a significant positive effect on the replication characteristics of ultrasonic imprinting.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.703-704
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• 2010

• Proceedings of the Korean Vacuum Society Conference
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• 2005.02a
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• pp.37-37
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• 2005

• Bulletin of the Korean Chemical Society
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• v.34 no.12
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• pp.3541-3542
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• 2013