한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제28권3호
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  • Pages.315-322
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  • 2011
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

32" 대면적 V-형상 미세 패턴을 위한 초정밀 가공기술 개발

Development of Ultra-Precision Machining Technology for V-Shape Micropatterns with 32" Large Surface Area

  • 이성근 (삼성전자) ;
  • 김현철 (고안전 차량 핵심기술 연구소, 인제대학교 기계자동차공학부)
  • 투고 : 2010.06.10
  • 심사 : 2010.12.13
  • 발행 : 2011.03.01
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초록

High-accuracy micropatterns such as V-shaped microgrooves are increasingly in demand for various engineering areas. And the technical trend goes for large surface areas in precision machining technology. So micropatterns with large surface areas are expected to play an increasingly important role in today's manufacturing technology In this study, we focused on developing machining technologies. First, a machine vision system for precise tool setting is developed. Second, an on-machine measurement (OMM) system for large-area measurement is implemented. And also software for tool path generation and simulation is developed. With these technologies we fabricated large-surface micropatterns in an electroless nickel-plated workpiece with single-crystal diamond tools and a 32-in, $675mm{\times}450mm$ mold with tens of V-and pyramid-shaped micropatterns.

키워드

참고문헌

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