Browse > Article
http://dx.doi.org/10.3795/KSME-A.2015.39.1.071

Replication of Hybrid Micropatterns Using Selective Ultrasonic Imprinting  

Lee, Hyun Joong (Dept. of Mechanical System Design Engineering, Seoul Nat'l Univ. of Science and Technology)
Jung, Woosin (Dept. of Mechanical System Design Engineering, Seoul Nat'l Univ. of Science and Technology)
Park, Keun (Dept. of Mechanical System Design Engineering, Seoul Nat'l Univ. of Science and Technology)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.39, no.1, 2015 , pp. 71-77 More about this Journal
Abstract
Ultrasonic imprinting is a micropattern replication technology for a thermoplastic polymer surface that uses ultrasonic vibration energy; it has the advantages of a short cycle time and low energy consumption. Recently, ultrasonic imprinting has been further developed to extend its functionality: (i) selective ultrasonic imprinting using mask films and (ii) repetitive ultrasonic imprinting for composite pattern development. In this study, selective ultrasonic imprinting was combined with repetitive imprinting in order to replicate versatile micropatterns. For this purpose, a repetitive imprinting technology was further extended to utilize mask films, which enabled versatile micropatterns to be replicated using a single mold with micro-prism patterns. The replicated hybrid micropatterns were optically evaluated through laser light images, which showed that versatile optical diffusion characteristics can be obtained from the hybrid micropatterns.
Keywords
Ultrasonic Imprinting; Micropattern; Selective Imprinting; Repetitive Imprinting;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
연도 인용수 순위
1 Lin, C. H. and Chen, R., 2007, "Effects of Mold Geometries and Imprinted Polymer Resist Thickness on Ultrasonic Nanoimprint Lithography," J. Micromech. Microeng., Vol.17, No. 7, pp. 1220-1231.   DOI   ScienceOn
2 Lan, H., Ding, Y., Liu, H. and Lu, B., 2007, "Review of the Wafer Stage for Nanoimprint Lithography," Microelec. Eng., Vol. 82, No. 4, pp. 684-688.
3 Becker, J. and Heim, U., 2000, "Hot Embossing as a Method for the Fabrication of Polymer High Aspect Ratio Structures," Sens. Actuators A., Vol. 83, No. 1-3, pp. 130-135.   DOI   ScienceOn
4 Gibo, J., Copponnex, T. and Mele, P., 2007, "Micro Injection Molding of Thermoplastic Polymers: a Review," J. Micromech. Microeng., Vol. 17, R96-109.   DOI   ScienceOn
5 Yu, H. W., Lee, C. H., Ko, J. S., Shin, B. and Rho, C. H., 2008, "Polymer Replication Using Ultrasonic Vibration," Trans. Korean Soc. Mech. Eng. A, Vol. 23, No. 5, pp. 419-423.   과학기술학회마을   DOI   ScienceOn
6 Mekaru, H. and Takahashi, M., 2009, "Frequency and Amplitude Dependences of Molding Accuracy in Ultrasonic Nanoimprint Technology," J. Micromech. Microeng., Vol. 19, No. 12, 125026.   DOI   ScienceOn
7 Mekaru, H. and Takahashi, M., 2007, "Development of Ultrasonic Micro Hot Embossing Technology," J. Micromech. Microeng., Vol. 85, No. 5, pp. 1282-1287.
8 Jung, W. and Park, K., 2014, "Selective Ulrasonic Imprinting for Micropattern Replication on Predefined Area," Ultrasonics., Vol. 54, No. 6, pp. 1495-1503.   DOI   ScienceOn
9 Lee, H. J. and Park, K., 2014, "Development of Hybrid Micropatterns on a Polymer Film using Repetitive Ultrasonic Imprinting," Int. J. Precis. Engng. Manuf. Green Technol., Vol. 1, No. 4, pp. 341-345.   DOI   ScienceOn
10 Seo, Y. S., Lee, K. Y., Cho, Y. H. and Park, K., 2012, "Replication Characteristics of Micro-Patterns According to the Vibration Transmission Direction in the Ultrasonic Imprinting Process," J. Kor. Soc. Precis. Engng., Vol. 29, No. 11, pp. 1256-1263.   과학기술학회마을   DOI   ScienceOn
11 Min, K, B., Park, J. H., Park, C. Y. and Park, K., 2014, "Replication Characteristics of Micropatterns According to Mold Temperature in Ultrasonic Imprinting," Trans. Korean Soc. Mech. Eng. A, Vol. 38, No. 1, pp. 51-57.   과학기술학회마을   DOI   ScienceOn