• 제목/요약/키워드: Metal doping.

검색결과 315건 처리시간 0.036초

VT-Modulation of Planar Tunnel Field-Effect Transistors with Ground-Plane under Ultrathin Body and Bottom Oxide

  • Sun, Min-Chul;Kim, Hyun Woo;Kim, Hyungjin;Kim, Sang Wan;Kim, Garam;Lee, Jong-Ho;Shin, Hyungcheol;Park, Byung-Gook
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제14권2호
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    • pp.139-145
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    • 2014
  • Control of threshold voltage ($V_T$) by ground-plane (GP) technique for planar tunnel field-effect transistor (TFET) is studied for the first time using TCAD simulation method. Although GP technique appears to be similarly useful for the TFET as for the metal-oxide-semiconductor field-effect transistor (MOSFET), some unique behaviors such as the small controllability under weak ground doping and dependence on the dopant polarity are also observed. For $V_T$-modulation larger than 100 mV, heavy ground doping over $1{\times}10^{20}cm^{-3}$ or back biasing scheme is preferred in case of TFETs. Polarity dependence is explained with a mechanism similar to the punch-through of MOSFETs. In spite of some minor differences, this result shows that both MOSFETs and TFETs can share common $V_T$-control scheme when these devices are co-integrated.

비균일 100V 급 초접합 트랜치 MOSFET 최적화 설계 연구 (A Study on Optimal Design of 100 V Class Super-junction Trench MOSFET)

  • 노영환
    • 전자공학회논문지
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    • 제50권7호
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    • pp.109-114
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    • 2013
  • 전력 MOSFET(산화물-반도체 전위 효과 트랜지스터)는 BLDC 모터와 전력 모듈 등에 광범위하게 사용하고 있다. 기존 전력 MOSFET 구조는 온-저항과 항복전압사이에 절충(tradeoff)이 필요하다. 이러한 절충을 하지 않고 최적화를 하기위해 비균일 초접합 트랜치 MOSFET 를 설계하는데 동일한 항복전압에서 균일 초접합 트랜치 MOSFET보다 낮은 온-저항을 갖도록한다. 이를 위해 드리프트 영역에서 우수한 전기장 분포를 달성하기 위하여 선형구조의 도핑 프로파일을 제안하고, 단위 셀 설계, 도핑농도의 특성분석, 전위분포를 SILVACO TCAD 2D인 Atlas 소자 소프트웨어를 사용하여 시뮬에이션을 수행하였다. 결과로 100V 급 MOSFET에서 비균일 초접합 트랜치 MOSFET가 균일 초접합 트랜치 MOSFET보다 온-저항에서 우수한 특성을 보여주고 있다.

Improved Electrical Properties of Graphene Transparent Conducting Films Via Gold Doping

  • Kim, Yoo-Seok;Song, Woo-Seok;Kim, Sung-Hwan;Jeon, Cheol-Ho;Lee, Seung-Youb;Park, Chong-Yun
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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    • pp.388-388
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    • 2011
  • Graphene, with its unique physical and structural properties, has recently become a proving ground for various physical phenomena, and is a promising candidate for a variety of electronic device and flexible display applications. The physical properties of graphene depend directly on the thickness. These properties lead to the possibility of its application in high-performance transparent conducting films (TCFs). Compared to indium tin oxide (ITO) electrodes, which have a typical sheet resistance of ~60 ${\Omega}/sq$ and ~85% transmittance in the visible range, the chemical vapor deposition (CVD) synthesized graphene electrodes have a higher transmittance in the visible to IR region and are more robust under bending. Nevertheless, the lowest sheet resistance of the currently available CVD graphene electrodes is higher than that of ITO. Here, we report an ingenious strategy, irradiation of MeV electron beam (e-beam) at room temperature under ambient condition,for obtaining size-homogeneous gold nanoparticle decorated on graphene. The nano-particlization promoted by MeV e-beam irradiation was investigated by transmission electron microscopy, electron energy loss spectroscopy elemental mapping, and energy dispersive X-ray spectroscopy. These results clearly revealed that gold nanoparticle with 10~15 nm in mean size were decorated along the surface of the graphene after 1.0 MeV-e-beam irradiation. The fabrication high-performance TCF with optimized doping condition showed a sheet resistance of ~150 ${\Omega}/sq$ at 94% transmittance. A chemical transformation and charge transfer for the metal gold nanoparticle were systematically explored by X-ray photoelectron spectroscopy and Raman spectroscopy. This approach advances the numerous applications of graphene films as transparent conducting electrodes.

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SiGe 에피 공정기술을 이용하여 제작된 초 접합 금속-산화막 반도체 전계 효과 트랜지스터의 시뮬레이션 연구 (Simulation Studies on the Super-junction MOSFET fabricated using SiGe epitaxial process)

  • 이훈기;박양규;심규환;최철종
    • 반도체디스플레이기술학회지
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    • 제13권3호
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    • pp.45-50
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    • 2014
  • In this paper, we propose a super-junction MOSFET (SJ MOSFET) fabricated through a simple pillar forming process by varying the Si epilayer thickness and doping concentration of pillars using SILVACO TCAD simulation. The design of the SJ MOSFET structure is presented, and the doping concentration of pillar, breakdown voltage ($V_{BR}$) and drain current are analyzed. The device performance of conventional Si planar metal-oxide semiconductor field-effect transistor(MOSFET), Si SJ MOSFET, and SiGe SJ MOSFET was investigated. The p- and n-pillars in Si SJ MOSFET suppressed the punch-through effect caused by drain bias. This lead to the higher $V_{BR}$ and reduced on resistance of Si SJ MOSFET. An increase in the thickness of Si epilayer and decrease in the former is most effective than the latter. The implementation of SiGe epilayer to SJ MOSFET resulted in the improvement of $V_{BR}$ as well as drain current in saturation region, when compared to Si SJ MOSFET. Such a superior device performance of SiGe SJ MOSFET could be associated with smaller bandgap of SiGe which facilitated the drift of carriers through lower built-in potential barrier.

국가 바이오모니터링 프로그램을 위한 소변 중 금속류 동시분석법 개발 및 검증 (Development and Validation of the Simultaneous Analytical Method of Urinary Metals and Metalloids for the National Biomonitoring Programs)

  • 조용민;양민호;임호섭;차상원;이재익;김기훈;한상범
    • 한국환경보건학회지
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    • 제45권6호
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    • pp.594-604
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    • 2019
  • Objectives: This study developed and validated an analysis method of urinary metals and metalloids that can be applied inductively with coupled plasma mass spectrometry (ICP-MS). Methods: 0.3 mL of urine was used to analyze 25 metal and metalloid compounds using ICP-MS. The validation of the analytical method included linearity, accuracy, precision, and the calculation of detection limits. In addition, a comparison test was performed with the graphite furnace atomic absorption spectrometry (GF-AAS) method, which is the current standard method, with urine samples of 66 healthy subjects. Results: The linearities (R2) of calibration curves of all 25 compounds were ≥ 0.999. Of the 25 compounds, the intra-day and inter-day accuracy% of 17 and 20 met ≤15%, respectively. In addition, fifteen compounds showed ≤15% recovery% for certificated reference materials. Intraclass correlation coefficients of the comparison between the current methods and new methods in this study were 0.952 (p-value<0.001) and 0.911 (p-value<0.001) for urinary cadmium and mercury, respectively. Conclusion: This study proposes an efficient simultaneous methodology that can analyze multi elements in smaller sample amounts. More reproduction experiments are needed in the future.

산소환원반응을 위한 탄화철이 내재된 질소 도핑된 탄소의 제조 (Synthesis of Fe3C-Embedded Nitrogen Doped Carbon for Oxygen Reduction Reaction)

  • 이영근;안건형;안효진
    • 한국재료학회지
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    • 제28권11호
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    • pp.640-645
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    • 2018
  • The design of non-precious electrocatalysts with low-cost, good stability, and an improved oxygen reduction reaction(ORR) to replace the platinium-based electrocatalyst is significant for application of fuel cells and metal-air batteries with high energy density. In this study, we synthesize iron-carbide($Fe_3C$) embedded nitrogen(N) doped carbon nanofiber(CNF) as electrocatalysts for ORRs using electrospinning, precursor deposition, and carbonization. To optimize electrochemical performance, we study the three stages according to different amounts of iron precursor. Among them, $Fe_3C$-embedded N doped CNF-1 exhibits the most improved electrochemical performance with a high onset potential of -0.18 V, a high $E_{1/2}$ of -0.29 V, and a nearly four-electron pathway (n = 3.77). In addition, $Fe_3C$-embedded N doped CNF-1 displays exellent long-term stabillity with the lowest ${\Delta}E_{1/2}=8mV$ compared to the other electrocatalysts. The improved electrochemical properties are attributed to synergestic effect of N-doping and well-dispersed iron carbide embedded in CNF. Consequently, $Fe_3C$-embedded N doped CNF is a promising candidate for non-precious electrocatalysts for high-performance ORRs.

고효율 TOPCon 태양전지의 SiOX/poly-Si박막 형성 기법과 passivating contact 특성 (Passivating Contact Properties based on SiOX/poly-Si Thin Film Deposition Process for High-efficiency TOPCon Solar Cells)

  • 김성헌;김태용;정성진;차예원;김홍래;박소민;주민규;이준신
    • 신재생에너지
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    • 제18권1호
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    • pp.29-34
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    • 2022
  • The most prevalent cause of solar cell efficiency loss is reduced recombination at the metal electrode and silicon junction. To boost efficiency, a a SiOX/poly-Si passivating interface is being developed. Poly-Si for passivating contact is formed by various deposition methods (sputtering, PECVD, LPCVD, HWCVD) where the ploy-Si characterization depends on the deposition method. The sputtering process forms a dense Si film at a low deposition rate of 2.6 nm/min and develops a low passivation characteristic of 690 mV. The PECVD process offers a deposition rate of 28 nm/min with satisfactory passivation characteristics. The LPCVD process is the slowest with a deposition rate of 1.4 nm/min, and can prevent blistering if deposited at high temperatures. The HWCVD process has the fastest deposition rate at 150 nm/min with excellent passivation characteristics. However, the uniformity of the deposited film decreases as the area increases. Also, the best passivation characteristics are obtained at high doping. Thus, it is necessary to optimize the doping process depending on the deposition method.

플루오린 함량 제어를 통한 LiVPO4O1-xFx 합성 및 리튬 이차전지 양극소재 전기화학 특성 분석 (Synthesis and Investigation of LiVPO4O1-xFxvia Control of the Fluorine Content for Cathode of Lithium-ion Batteries)

  • 김민경;이동휘;여찬규;최수연;최치원;윤현민
    • 한국분말재료학회지
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    • 제30권6호
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    • pp.516-520
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    • 2023
  • Highly safe lithium-ion batteries (LIBs) are required for large-scale applications such as electrical vehicles and energy storage systems. A highly stable cathode is essential for the development of safe LIBs. LiFePO4 is one of the most stable cathodes because of its stable structure and strong bonding between P and O. However, it has a lower energy density than lithium transition metal oxides. To investigate the high energy density of phosphate materials, vanadium phosphates were investigated. Vanadium enables multiple redox reactions as well as high redox potentials. LiVPO4O has two redox reactions (V5+/V4+/V3+) but low electrochemical activity. In this study, LiVPO4O is doped with fluorine to improve its electrochemical activity and increase its operational redox potential. With increasing fluorine content in LiVPO4O1-xFx, the local vanadium structure changed as the vanadium oxidation state changed. In addition, the operating potential increased with increasing fluorine content. Thus, it was confirmed that fluorine doping leads to a strong inductive effect and high operating voltage, which helps improve the energy density of the cathode materials.

플로팅 금속 가드링 구조를 이용한 Ga2O3 쇼트키 장벽 다이오드의 항복 특성 개선 연구 (Improved breakdown characteristics of Ga2O3 Schottky barrier diode using floating metal guard ring structure)

  • 최준행;차호영
    • 전기전자학회논문지
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    • 제23권1호
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    • pp.193-199
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    • 2019
  • 본 연구에서는 TCAD 시뮬레이션을 사용하여 산화갈륨 ($Ga_2O_3$) 기반 수직형 쇼트키 장벽 다이오드 고전압 스위칭 소자의 항복전압 특성을 개선하기 위한 가드링 구조를 이온 주입이 필요 없는 간단한 플로팅 금속 구조를 활용하여 제안하였다. 가드링 구조를 도입하여 양극 모서리에 집중되던 전계를 감소시켜 항복전압 성능 개선을 확인하였으며, 이때 금속 가드링의 폭과 간격 및 개수에 따른 항복전압 특성 분석을 전류-전압 특성과 내부 전계 및 포텐셜 분포를 함께 분석하여 최적화를 수행하였다. N형 전자 전송층의 도핑농도가 $5{\times}10^{16}cm^{-3}$이고 두께가 $5{\mu}m$인 구조에 대하여 $1.5{\mu}m$ 폭의 금속 가드링을 $0.2{\mu}m$로 5개 배치하였을 경우 항복전압 2000 V를 얻었으며 이는 가드링 없는 구조에서 얻은 940 V 대비 두 배 이상 향상된 결과이며 온저항 특성의 저하는 없는 것으로 확인되었다. 본 연구에서 활용한 플로팅 금속 가드링 구조는 추가적인 공정단계 없이 소자의 특성을 향상시킬 수 있는 매우 활용도가 높은 기술로 기대된다.

Fe 도핑된 β-Ni(OH)2 마이크로결정 합성과 산소발생반응 특성 (Synthesis of Fe-doped β-Ni(OH)2 microcrystals and their oxygen evolution reactions)

  • 박제홍;유시범;정승원;김병준;김강민;유정호
    • 한국결정성장학회지
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    • 제33권5호
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    • pp.196-201
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    • 2023
  • 수소에너지 생산을 위한 물분해 시스템의 효율을 향상시키기 위해서는, 수소발생반응 (HER)과 산소발생반응(OER) 각각에서 촉매로 인한 전기화학적 반응에서의 높은 과전압의 감소가 수반되어야 한다. 그 중에서도 전이금속 기반의 화합물(수산화물, 황화물 등)은 현재 상용되고 있는 백금 등의 귀금속을 대체할 촉매 재료로써 주목받고 있다. 본 연구에서는, 저렴한 금속 다공성 소재인 Ni foam을 지지체로 사용하고, 수열합성 공정을 통해 β-Ni(OH)2 마이크로결정을 합성하고자 하였다. 또한 전기화학적 특성을 향상시키기 위하여 Fe을 도핑하여 합성된 β-Ni(OH)2 마이크로 결정의 형상, 결정구조 및 물분해 특성의 변화를 관찰하였으며, 상용 수전해 시스템의 촉매로서의 적용가능성을 검토하였다.