• Structural Engineering and Mechanics
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• 제30권2호
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• pp.191-209
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• 2008

A structural monitoring system based on cheap and wireless monitoring system is investigated in this paper. Due to low-cost and low power consumption, micro-electro-mechanical system (MEMS) is suitable for wireless monitoring and the use of MEMS and wireless communication can reduce system cost and simplify the installation for structural health monitoring. For system identification using wireless MEMS, a finite element (FE) model updating method through correlation with the initial analytical model of the structure to the measured one is used. The system identification using wireless MEMS is evaluated experimentally using a three storey frame model. Identification results are compared to ones using data measured from traditional accelerometers and results indicate that the system identification using wireless MEMS estimates system parameters with reasonable accuracy. Another smart sensor considered in this paper for structural health monitoring is Lead Zirconate Titanate (PZT) which is a type of piezoelectric material. PZT patches have been applied for the health monitoring of structures owing to their simultaneous sensing/actuating capability. In this paper, the system identification for building structures by using PZT patches functioning as sensor only is presented. The FE model updating method is applied with the experimental data obtained using PZT patches, and the results are compared to ones obtained using wireless MEMS system. Results indicate that sensing by PZT patches yields reliable system identification results even though limited information is available.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2014년도 제49회 KOSCO SYMPOSIUM 초록집
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• pp.337-338
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• 2014

In this study, a method of using a capacitance sensor was investigated as a means to measure the mass fraction of a type of harmful substance. Using MEMS process, we developed a capacitance sensor and studied the real time mass fraction with harmful substance mixture liquid.

• 센서학회지
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• 제26권2호
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• pp.91-95
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• 2017

Recently, infrared (IR) spectrometers have been required in various fields such as environment, safety, mobile, automotive, and military. This IR dispersive sensor detection method of substances is widely used. In this study, we fabricated a silicon (Si) prism-based near infrared (NIR) spectrometer utilizing micro electro mechanical system (MEMS) technology. Si prism-based NIR spectrometer utilizing MEMS technology consists of upper, middle, and lower substrates. The upper substrate passes through the incident IR ray selectively. The middle substrate, acting as a prism, disperses and separates the incident IR beam. The lower substrate has an amorphous Si (a-Si)-based bolometer array to detect the IR spectrum. The fabricated Si prism-based NIR spectrometer utilizing MEMS technology has the advantage of a simple structure, easy fabrication steps, and a wide NIR region operating range.

• 센서학회지
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• 제19권6호
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• pp.462-468
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• 2010

A low power gas sensor with microheater was fabricated by MEMS technology. In order to heat up the gas sensing material to a operating temperature, a platinum(Pt) micro heater was built on to the micromachined Si substrate. The width and gap of microheater were $20\;{\mu}m$ and $4.5\;{\mu}m$, respectively. ZnO nanowhisker arrays were fabricated on a sensor device by hydrothermal method. The sensor device was deposited with ZnO seeds using PLD systems. A 200 ml aqueous solution of 0.1 mol zinc nitrate hexahydrate, 0.1 mol hexamethylenetetramine, and 0.02 mol polyethylenimine was used for growthing ZnO nanowhiskers. The power consumption to heat up the gas sensor to a operating temperature was measured and temperature distribution of sensor was analyzed by a Infrared Thermal Camera. The optimum temperature for highest sensitivity was found to be $250^{\circ}C$ although relatively high(64 %) sensitivity was obtained even at as low as $150^{\circ}C$. The power consumption was 72 mW at $250^{\circ}C$ and was only 25 mW at $150^{\circ}C$.

• Transactions on Electrical and Electronic Materials
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• 제13권1호
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• pp.27-30
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• 2012

This paper proposes a micro gas sensor for measuring $H_2S$ gas. This is based on a $SnO_2$-CuO multi-layer thin film. The sensor has a silicon diaphragm, micro heater, and sensing layers. The micro heater is embedded in the sensing layer in order to increase the temperature to an operating temperature. The $SnO_2$-CuO multi layer film is prepared by the alternating deposition method and thermal oxidation which uses an electron beam evaporator and a thermal furnace. To determine the effect of the number of layers, five sets of films are prepared, each with different number of layers. The sensitivities are measured by applying $H_2S$ gas. It has a concentration of 1 ppm at an operating temperature of $270^{\circ}C$. At the same total thickness, the sensitivity of the sensor with multi sensing layers was improved, compared to the sensor with one sensing layer. The sensitivity of the sensor with five layers to 1 ppm of $H_2S$ gas is approximately 68%. This is approximately 12% more than that of a sensor with one-layer.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.511-512
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• 2012

• 마이크로전자및패키징학회지
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• 제24권1호
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• pp.51-56
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• 2017

최근 계측기의 소형화, 전자화에 따라 차압식 유량계의 경우 기존에 기계가공을 통해 개발하던 센서부를 전자식 MEMS 차압센서로 대체하려는 많은 노력이 있으나, MEMS 차압센서의 경우 고압이 인가시 실리콘 다이아프램의 파괴 및 센서의 접합부의 파괴가 발생하는 문제점이 있다. 따라서 본 논문에서는 proof pressure 이상의 압력에서 센서의 다이아프램이 파괴되지 않는 구조를 제안하였으며, 그에 따른 차압식 압력센서를 설계 및 제작하였다. 센서 동작압력(0-3 bar)의 3배 이상의 압력에서 센서의 동작특성을 평가하였다. 개발된 센서는 $3.0{\times}3.0mm$이며, 0~3 bar 사이의 압력에서 LCR meter (HP 4284a)로 측정한 결과 3.67 pF at 0bar, 5.13 pF at 3 bar를 나타내었으며, 센서의 동작압력(0-3 bar)에서 0.37%의 hysteresis를 나타내는 압력센서를 개발하였다.

• 한국전산구조공학회논문집
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• 제26권4호
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• pp.271-274
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• 2013

경사계 센서는 여러분야에서 널리 적용되고 있는 센서 중의 하나이다. 특히 건축분야에서는 초고층 건물의 수직도와 수평도를 계측하고 모니터링하는데 적용되어 왔다. 최근 미소전기기계 시스템(MEMS: Micro Electro-Mechanical System)기술의 발달로 인해 많은 센서들이 개발되었다. 본 논문에서 논하고자 하는 MEMS형 경사계는 MEMS형 가속도계를 기반으로 한다. 정지한 상태에서 가속도계로 계측되는 정적 가속도와 중력가속도 사이의 관계를 이용하면 센서에 발생하는 경사를 계측할 수 있기 때문이다. 이러한 원리 때문에 좀 더 정확하고 이점을 갖는 경사계가 개발되었다. 보 실험을 통하여서 레이저 변위계와의 차이를 검증하였다. 실험결과 무선 MEMS형 경사계 센서 시스템은 높은 정확도, 안정성, 장기모니터링에 대한 경제성을 갖는 유용한 시스템임을 확인할 수 있었다. 결론적으로 무선 MEMS형 경사계 센서 시스템은 건축분야에서 그리고 다른 여러 산업분야에서 정확하고 편리한 모니터링 시스템으로 적용될 수 있을 것으로 판단된다.

• 대한공간정보학회지
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• 제20권1호
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• pp.65-72
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• 2012

MEMS(Micro Electro Mechanical System)기술이 발전하여 작고 저렴한 IMU(Initial Measurement Unit)와 GPS(Global Positioning System)통합센서가 생산되어 다양한 분야에서 활용되고 있다. 본 연구에서는 모바일매핑시스템을 경량화하기 위해서 MEMS 기반 IMU/GPS 통합센서가 적합할 것으로 판단하고 XSens사 MEMS 기반 IMU/GPS 통합센서(MTi-G)의 특성 분석을 위한 실험을 수행하였다. 차량 대시보드에 통합센서를 고정하고 인천 송도 국제도시 도로구간과 터널구간을 주행하여 후처리 과정을 거치지 않은 좌표성과를 취득하였다. 전반적으로 위치결정 성과가 양호했지만 일부 구간(정지구간, 과속방지턱, 터널구간 등)에서 센서 특성, XKF(칼만필터) 특성 및 GPS 신호 수신환경 제한으로 인해 양호하지 못한 부분이 확인되었다. 실험결과 경량 모바일매핑시스템의 활용 가능성을 확인할 수 있었으며, 향후 다양한 GPS 신호 수신환경과 주행 조건에서의 실험과 보다 정밀한 정확도 분석이 요구된다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.592-595
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• 2004

This paper presents a study on the development of a multi-sensing inertial sensor with a single mechanical structure, which can be used both as a gyroscope and an accelerometer. The proposed MEMS gyro-accelerometer is designed to detect the angular rate and the acceleration at the same time using two separate detection circuits for one proof mass. In this study, the detection and signal processing circuit for an effective signal processing of different inertial measurements is designed, fabricated, and tested. The experimental results show that the performances of the gyro-accelerometer have resolutions of 1mg and 0.025deg/sec and nonlinearities of less than 0.5% for the accelerometer and the gyroscope, respectively, which are similar results with those of sensors with different structures and different detection circuits. The size of the sensor is reduced almost by 50% comparing with the sensors of separated proof mass.