Fabrication of Single Capacitive type Differential pressure sensor for Differential Flow meter |
Shin, Kyu-Sik
(Smart Sensor Research Center of Korea Electronics Technology Institute)
Song, Sangwoo (Smart Sensor Research Center of Korea Electronics Technology Institute) Lee, Kyungil (Smart Sensor Research Center of Korea Electronics Technology Institute) Lee, Daesung (Smart Sensor Research Center of Korea Electronics Technology Institute) Jung, Jae Pil (Department of Materials Science and Engineering, University of Seoul) |
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