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http://dx.doi.org/10.6117/kmeps.2017.24.1.051

Fabrication of Single Capacitive type Differential pressure sensor for Differential Flow meter  

Shin, Kyu-Sik (Smart Sensor Research Center of Korea Electronics Technology Institute)
Song, Sangwoo (Smart Sensor Research Center of Korea Electronics Technology Institute)
Lee, Kyungil (Smart Sensor Research Center of Korea Electronics Technology Institute)
Lee, Daesung (Smart Sensor Research Center of Korea Electronics Technology Institute)
Jung, Jae Pil (Department of Materials Science and Engineering, University of Seoul)
Publication Information
Journal of the Microelectronics and Packaging Society / v.24, no.1, 2017 , pp. 51-56 More about this Journal
Abstract
In this paper, we have developed a differential pressure flow sensor designed as a single capacitive type. And the sensor was fabricated using a MEMS process. Differential pressure flow sensors are the most commonly used sensors for industrial applications. The sensing diaphragm and bonding joint of the MEMS pressure sensor are easily broken at high pressure. In this paper, we proposed a structure in which the diaphragm of the sensor was not broken at a pressure exceeding the proof pressure, and the differential pressure sensor was designed and manufactured accordingly. The operating characteristics of the sensor were evaluated at a pressure three times higher than the sensor operating pressure (0-3 bar). The developed sensor was $3.0{\times}3.0mm$ and measured with a LCR meter (HP 4284a) at a pressure between 0 and 3 bar. It showed 3.67 pF at 0 bar and 5.13 pF at 3 bar. The sensor operating pressure (0-3 bar) developed a pressure sensor with hysteresis of 0.37%.
Keywords
MEMS; sensor; differential pressure; packaging;
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Times Cited By KSCI : 1  (Citation Analysis)
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