한국연소학회:학술대회논문집

The Korean Society of Combustion (한국연소학회)
권호 표지

Fabrication of capacitance sensor for real time harmful substance mass fraction mesurement

유독물질 질량분율 실시간 측정용 정전용량센서 제작

  • 김영수 (한국가스안전공사 기기연구개발부) ;
  • 오정석 (한국가스안전공사 기기연구개발부)
  • Published : 2014.11.27
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Abstract

In this study, a method of using a capacitance sensor was investigated as a means to measure the mass fraction of a type of harmful substance. Using MEMS process, we developed a capacitance sensor and studied the real time mass fraction with harmful substance mixture liquid.

Keywords