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http://dx.doi.org/10.7734/COSEIK.2013.26.4.271

Development of MEMS Inclinometer Sensor System  

Ha, Dae Woong (Department of Architectural Engineering, Yonsei University)
Kim, Jong Moon (Destek)
Park, Hyo Seon (Department of Architectural Engineering, Yonsei University)
Publication Information
Journal of the Computational Structural Engineering Institute of Korea / v.26, no.4, 2013 , pp. 271-274 More about this Journal
Abstract
Inclinometer sensors are widely applied in many fields. Especially in the field of construction of high-rise buildings also measure the horizontal and vertical help has been applied to monitor. Recent micro electro-mechanical system(MEMS) technology with the development of the many sensors have been developed. In this paper, a MEMS inclinometer is based on a MEMS accelerometer. The sensor can measure the angle of inclination using the relationship between static acceleration and gravity acceleration from an accelerometer. From this principle, inclinometer has been developed that has more accurate. The accuracy is proved by the experiment with laser displacement. Results in the experiment express high-accuracy, stability and economics of MEMS inclinometer. In conclusion, wireless MEMS inclinometer sensor is expected to be applicable in the areas of construction and many other industries with accurate and convenient monitoring system.
Keywords
inclinometer; microelectromechanical system(MEMS); structure health monitoring;
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