• 한국정밀공학회지
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• 제31권10호
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• pp.929-934
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• 2014

Reaction force compensation (RFC) mechanism can relieve the vibration of base system caused by acceleration and deceleration of mover. In this paper, we propose a new passive RFC mechanism with a movable additional mass to reduce vibration of the system base as well as displacement of the magnet track. First, equation of motion for the new passive RFC mechanism is derived and simulated to tune design parameters such as masses and spring coefficients. Simulation results show that the vibration of the system base of the stage with the new RFC mechanism.

• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.85-89
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• 2007

Linear ball guideways have been used recently in precision or ultra-precision positioning devices. However, when the inner balls begin to roll or the moving direction reverses, these guideways are subject to rolling friction or nonlinear spring behavior. An ultra-precision device with a linear motor, referred to as a 'tunnel actuator' (TA), has been constructed to measure these phenomena. The application of a TA is beneficial for two reasons: it mostly cancels the attractive magnetic force between the stator and mover (armature), and its magnetic flux leakage is very low. The influence of the nonlinear spring behavior in ball guideways was investigated in this study using the pure driving force from a TA. The equilibrium between the driving force from the TA and the nonlinear spring force provided great accuracy for a positioning stage using a linear ball guideway.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 추계학술대회 논문집 학회본부
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• pp.626-629
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• 1997

The urban transit propelled by single sided linear induction motor(SLIM) have been in stage for practical application. Also, the use of the linear induction motor in traction systems enables large forces to be achieved without friction between wheels and rails. In this paper we discuss the linear induction motor (LIM) drive system (300KVA) for magnetic levitation vehicles.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 하계학술대회 논문집 D
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• pp.2138-2139
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• 2002

In this paper we presents a speed controller for separately excited DC motor using adaptive backstepping technique. The motor was modeled in two local areas the first model is a linear one when speed is under base speed, the other is nonlinear one when field weakening is used to obtain the speed well above base speed. Then linear robust state feedback controller was designed for the linear model while adaptive backstepping controller was designed for the nonlinear model. The adaptive backstepping technique takes system nonlinearity into account in the control system design stage. The proposed controller is proved to be asymptotically stable by the Lyapunov stability theory and some simulations have been carried out to test.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2000년도 추계학술대회논문집
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• pp.249-255
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• 2000

The design and test of an magnetostrictive linear motor(MLM) that operates based on self-moving cell concept is presented. The moving cell is composed of Terfenol-D linear actuator and a ring structure, and a cell train is constructed by connecting two cells in series. Since this motor uses the stroke of Terfenol-D actuators and friction force of the cells, it can essentially produce long stroke and large force. The overall performance of the MLM was measured in terms of speed and force. The pushing force is directly related with the friction force. This work is a proof-of-concept stage and investigation is necessary for realistic application.

• 한국정밀공학회지
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• 제25권6호
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• pp.134-142
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• 2008

In this paper, we propose a precise linear motion stage supported by magnetically preloaded air bearings. The eight aerostatic bearings with rectangular carbon porous pads were located only one side of vertical direction under the platen where four bearings are in both sides of horizontal direction as wrap-around-design, and this gives simpler configuration than which constrained by air bearings for all direction. Each of the magnetic actuators has a permanent magnet generating static magnetic flux far required preload and a coil to perturb the magnetic farce resulting adjustment of air- bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder was designed and built to verify this design concept. The load capacity, stiffness and preload force were examined and compared with analysis. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed. It was shown that motion control far three DOF motions were linear and independent after calibration of the control gains.

• 대한기계학회논문집A
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• 제34권11호
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• pp.1613-1622
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• 2010

본 연구는 고진공 환경중 초음파 리니어 스테이지의 나노미터 위치제어를 기술하고 있다. 고진공 환경 중 초정밀 위치 제어 시스템에 응용하기 위해 3 차 종진동 모드와 6 차 횡진동 모드를 가지는 BLT를 개발 했다. 안정적인 고출력을 위해 BLT 는 하나의 공진 주파수로 두 개의 모드 진동을 발생 시켜야 한다. 하나의 공진 주파수를 이용 하기 위해 어드미턴스를 변화시켜 각 모드의 공진 주파수를 일치시켜 조건이 다른 대기 환경에서 안정적인 고출력을 얻을 수 있었다. 기압 변화에 따라 구동 특성이 달라지는 시스템을 제어하기 위해 마찰력 변화에 따른 비선형 특성을 보상한 NCTF 제어를 사용했다. 설계된 제어기를 이용해 고진공 환경에서 시스템을 나노미터 정도로 제어하는 결과를 얻을 수 있었다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.1059-1063
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• 2005

Development of a feed drive-system with high speed, positioning accuracy and thrust has been an important issue in modern automation systems and machine tools. Linear motors can be used as an efficient system to achieve such technical demands. By eliminating mechanical transmission mechanisms such as ball screw or rack-pinion, much higher speeds and greater acceleration can be achieved without backlash or excessive friction. However, due to great power loss and magnetic attraction of the linear motors heating and deflection problems occur. Therefore, it is necessary to design strong structure, cooling device with high efficiency and light weight construction in designing stage of linear motors. This paper presents an investigation into a structural design of linear motor system. In this research, a new concept of moving table with high stiffness and of cooling plate is also introduced. Structure analyses are performed by using a commercial code ANSYS in order to evaluate the design safety.

• International Journal of Precision Engineering and Manufacturing
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• 제9권3호
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• pp.40-45
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• 2008

This paper presents a linear positioning system and its control algorithm design with nano accuracy/resolution. The basic linear stage structure is driven by an ultrasonic motor and its displacement feedback is detected by a LDGI (Laser Diffraction Grating Interferometer), which can achieve nanometer resolution. Due to the friction driving property of the ultrasonic motor, the driving situation differs in various ranges along the travel. Experiments have been carried out in order to observe and realize the phenomena of the three main driving modes: AC mode (for mm motion), Gate mode (for ${\mu}m$ motion), and DC mode (for nm motion). A proposed FCMAC (Fuzzy Cerebella Model Articulation Controller) control algorithm is implemented for manipulating and predicting the velocity variation during the motion of each mode respectively. The PCbased integral positioning system is built up with a NI DAQ Device by a BCB (Borland $C^{++}$ Builder) program to accomplish the purpose of an intelligent nanopositioning control.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.133-134
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• 2011