International Journal of Precision Engineering and Manufacturing

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

An Intelligent Nano-positioning Control System Driven by an Ultrasonic Motor

  • Fan, Kuang-Chao (Department of Mechanical Engineering, National Taiwan University) ;
  • Lai, Zi-Fa (Department of Mechanical Engineering, National Taiwan University)
  • Published : 2008.07.01
Download PDF
⟨ Previous Next ⟩

Abstract

This paper presents a linear positioning system and its control algorithm design with nano accuracy/resolution. The basic linear stage structure is driven by an ultrasonic motor and its displacement feedback is detected by a LDGI (Laser Diffraction Grating Interferometer), which can achieve nanometer resolution. Due to the friction driving property of the ultrasonic motor, the driving situation differs in various ranges along the travel. Experiments have been carried out in order to observe and realize the phenomena of the three main driving modes: AC mode (for mm motion), Gate mode (for ${\mu}m$ motion), and DC mode (for nm motion). A proposed FCMAC (Fuzzy Cerebella Model Articulation Controller) control algorithm is implemented for manipulating and predicting the velocity variation during the motion of each mode respectively. The PCbased integral positioning system is built up with a NI DAQ Device by a BCB (Borland $C^{++}$ Builder) program to accomplish the purpose of an intelligent nanopositioning control.

Keywords

References

  1. Mckeown, P., "Nanotechnology-Special article," Proc. of the Nano-metrology in Precision Engineering, pp. 5-55, 1998
  2. Juluri, B.K., Lin, W. and Lim, L., "Long range and high axial load capacity nanopositioner using single piezoelectric actuator and translating supports," International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 4, pp. 3-9, 2007
  3. Peng, Y. F., Wai, R. J. and Lin, C. M., "Implementation of LLCC-Resonant Driving Circuit and Adaptive CMAC Neural Network Control for Linear Piezoelectric Ceramic Motor," IEEE Trans. on Industrial Electronics, Vol. 51, No. 1, pp. 35-48, 2004 https://doi.org/10.1109/TIE.2003.822078
  4. Shyu, K. K. and Chang, C. Y., "Anti-windup Controller Design for Piezoelectric Ceramic Linear Ultrasonic Motor Drive," IECON Proceedings (Industrial Electronics Conference), Vol. 1, pp. 341-346, 2003
  5. Fan, K.C., Cheng, F. and Chen, Y.J., "Nanopositioning control on a commercial linear stage by software error compensation," Nanotechnology and Precision Engineering of China (ISSN 1672-6030), Vol. 4, No. 1, pp. 1-9, 2006
  6. Nishimura, T., Kubota, Y., Ishii, S., Ishizuka and Tsukiji S. M., "Encoder Incorporating a Displaceable Diffraction Grating," U. S. Patent No. 5038032, 1991
  7. Wu, C. C., Chen, Y. C., Lee, C. K., Hsieh, C. T., Wu, W. J. and Lu, S. S., "Design Verifications of a Linear Laser encoder with High Head-to-scale Tolerance," Proceedings of SPIE: The International Society for Optical Engineering, Vol. 3779, pp. 73-82, 1999
  8. Kimura, A., Gao, W. and Kiyono, S., "Design and Construction of a Surface Encoder with Dual Sine-Grids," International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 2, pp. 20-25, 2007
  9. Nanomotion Ltd. "AB2 driver user manual," P/N: AB02458000A, www.nanomotion.com, 2003
  10. Fan, K. C., Fei. Y. T., Yu, X. F., Chen, Y. J., Wang, W. L., Chen, F. and Liu, Y. S., "Development of a Low Cost Micro-CMM for 3D Micro/nano Measurements," Measurement Science & Technology, Vol. 17, Issue 3, pp. 524-532, 2006 https://doi.org/10.1088/0957-0233/17/3/S12
  11. Heydemann, P. L. M., "Determination and Correction of Quadrature Fringe Measurement Errors in Interferometers," Applied Opt., Vol. 20, No. 19, pp. 3382-3384, 1981 https://doi.org/10.1364/AO.20.003382
  12. Albus, J. S., "A New Approach to Manipulator Control: The Cerebellar Model Articulation Controller (CMAC)," Journal of Dynamic System, Measurement and Control, Transaction of ASME, Vol. 97, Series G, No. 3, pp. 220-227, 1975 https://doi.org/10.1115/1.3426922
  13. Kwan, C. M., Xu, H., Lewis, F. L., Haynes, L. and Pryor, J. D., "Robust Spacecraft Attitude Control using Fuzzy CMAC," IEEE International Symposium on Intelligent Control, pp. 43-48, 1996
  14. Yin, S.N., Hwang, Y.T. and Yi, W., "Applying an artificial neural network to the control system for electrochemical gear-tooth profile modifications," International Journal of Precision Engineering and Manufacturing, Vol.8, No.4, pp. 27-32, 2007
  15. Lin, F.J., Wai, R.J. and Chen, M.P., "Wavelet neural network control for linear ultrasonic motor drive via adaptive sliding-mode technique," IEEE TRANSACTIONS on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 50: No. 6, pp. 686-698, 2003 https://doi.org/10.1109/TUFFC.2003.1209556
  16. Fan, K. C., Liu, C. L., Wu, P. T., Chen Y. C. and Wang, W. L., "The structure design of a micro-CMM with Abbé principle," Proc. of the 35th International Matador Conf., pp. 297-300, 2007
  17. Henmi, N. and Tanaka, M., "An open-loop method for point-to-point positioning of a piezoelectric actuator," International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 2, pp. 9-13, 2007