1 |
Cho, K. J., Choi, D. S., and Ahn, H. J., "Mechanism and Control of Reaction Force Compensation of XY Linear Motion Stage System," Trans. Korean Soc. Mech. Eng. A, Vol. 35, No. 6, pp. 583-699, 2011.
과학기술학회마을
DOI
|
2 |
You, Y. H. and Ahn, H. J., "A Passive Reaction Force Compensation (RFC) Mechanism for a Linear Motor Motion Stage, Int. J. Precis. Eng. Manuf., Vol. 15, No. 5, pp 1-5, 2014.
|
3 |
Park, A. Y., Lim, J. G., and Hong, S. W., "Modeling and Countermeasure for Positioning Stage Base Vibration," J. of the Korean Society of Manufacturing Technology Engineers, Vol. 19, No. 4, pp. 476-484, 2010.
과학기술학회마을
|
4 |
Hong, S. W. and Bae G. H., "Method of Effective Vibration Reduction for Positioning Systems Undergoing Frequent Short-distance Movement," J. of the Korean Society of Manufacturing Technology Engineers, Vol. 22, No. 3, pp. 421-428, 2013.
과학기술학회마을
DOI
|
5 |
Greene, P. M., Hero, S., and Bitter, D., "Reaction Force Transfer System," US Patent, No. US006844635B2, 2005.
|
6 |
Dijkstra, B. G., Rambaratsingh, N. J., Scherer, C. W., Bosgra, O. H., Steinbuch, M., and Kerssemakers, S., "Input Design for Optimal Discrete Time Point-To-Point Motion of an Industrial XY-Positioning Table," Selected Topics in Signals, Systems and Control, Vol. 12, pp. 9-14, 2001.
|
7 |
Tseng, Y. T. and Liu, J. H., "High-speed and Precise Positioning an X-Y Table," Control Engineering Practice, Vol. 11, No. 4, pp. 357-365, 2003.
DOI
ScienceOn
|
8 |
Jang, J. W., Park, S. W., and Hong, S. W., "Command Generation Method for High-speed and Precise Positioning of Positioning Stage," J. Korean Soc. Precis. Eng., Vol. 25, No. 10, pp. 122-129, 2008.
과학기술학회마을
|
9 |
Lee, M. E., "Guideless Stage with Isolated Reaction Frame," US Patent, No. US005744924A, 1998.
|
10 |
Qsanai, E. and Akutsu, K., "Stage Apparatus and Exposure Apparatus and Device Producing Method Using the Same," US Patent, No. US005864389A, 1999.
|
11 |
Galburt, D. N., "Method, System, and Apparatus for Management of Reaction Loads in a Lithography System," US Patent, No. US006784978B2, 2004.
|
12 |
Ka, A., Poon. T., Wai, L., Kho, F., Yang, P.-H., and Chang, P.-W., "Modular Stage with Reaction Force Cancellation," US Patent, No. US006917412B2, 2005.
|