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Influence of Rolling Friction in Linear Ball Guideways on Positioning Accuracy  

Tanaka, Toshiharu (Graduate School of Science and Engineering, Shizuoka University)
Ikeda, Kyohei (Mechanical Engineering, Shizuoka Institute of Science and Technology)
Otsuka, Jiro (Mechanical Engineering, Shizuoka Institute of Science and Technology)
Masuda, Ikuro (Mechanical Engineering, Shizuoka Institute of Science and Technology)
Oiwa, Takaaki (Mechanical Engineering, Shizuoka University)
Publication Information
International Journal of Precision Engineering and Manufacturing / v.8, no.2, 2007 , pp. 85-89 More about this Journal
Abstract
Linear ball guideways have been used recently in precision or ultra-precision positioning devices. However, when the inner balls begin to roll or the moving direction reverses, these guideways are subject to rolling friction or nonlinear spring behavior. An ultra-precision device with a linear motor, referred to as a 'tunnel actuator' (TA), has been constructed to measure these phenomena. The application of a TA is beneficial for two reasons: it mostly cancels the attractive magnetic force between the stator and mover (armature), and its magnetic flux leakage is very low. The influence of the nonlinear spring behavior in ball guideways was investigated in this study using the pure driving force from a TA. The equilibrium between the driving force from the TA and the nonlinear spring force provided great accuracy for a positioning stage using a linear ball guideway.
Keywords
Linear ball guideway; Rolling friction; Linear motor; Nonlinear spring behavior; Precision positioning;
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Times Cited By Web Of Science : 3  (Related Records In Web of Science)
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  • Reference
1 Futami, S. and Furutani, H., 'Nanometer Positioning Using AC Linear Motor and Rolling Guide (2nd Report): Tribology of the Rolling Guide,' Journal of the Japan Society of Precision Engineering, Vol. 57, No. 10, pp. 1808-1813, 1991   DOI
2 Kim, H. J., Nakatsugawa, J., Sakai, K. and Shibata, H., 'High-Acceleration Linear Motor, 'Tunnnel Actuator',' Journal of the Magnetics Society of Japan, Vol. 29, No. 3, pp. 199-204, 2005
3 Johnson, K. L., 'Contact Mechanics,' Cambridge University Press, pp. 268, 1996
4 Otsuka, J. and Masuda, T., 'The Influence of Nonlinear Spring Behavior of Rolling Elements on Ultraprecision Positioning Control Systems,' Nanotechnology, Vol. 9, No. 2, pp. 85-92, 1998   DOI   ScienceOn
5 Tanaka, T., Oiwa, T. and Otsuka, J., 'Study on Friction Model of Linear Ball Guideway for Precision Positioning,' The Japan Society of Precision Engineering, Vol. 72, No.4, pp. 470-474, 2006
6 Futami, S. and Furutani, H., 'Nanometer Positioning Using AC Linear Motor and Rolling Guide (1st Report): System Set-up and Coarse/Fine Positioning,' Journal of the Japan Society of Precision Engineering, Vol. 57, No. 3, pp. 556-561, 1991   DOI