• Title/Summary/Keyword: Integrated photonics

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Point-diffraction interferometer for 3-D profile measurement of light scattering rough surfaces (광산란 거친표면의 고정밀 삼차원 형상 측정을 위한 점회절 간섭계)

  • 김병창;이호재;김승우
    • Korean Journal of Optics and Photonics
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    • v.14 no.5
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    • pp.504-508
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    • 2003
  • We present a new point-diffraction interferometer, which has been devised for the three-dimensional profile measurement of light scattering rough surfaces. The interferometer system has multiple sources of two-point-diffraction and a CCD camera composed of an array of two-dimensional photodetectors. Each diffraction source is an independent two-point-diffraction interferometer made of a pair of single-mode optical fibers, which are housed in a ceramic ferrule to emit two spherical wave fronts by means of diffraction at their free ends. The two spherical wave fronts then interfere with each other and subsequently generate a unique fringe pattern on the test surface. A He-Ne source provides coherent light to the two fibers through a 2${\times}$l optical coupler, and one of the fibers is elongated by use of a piezoelectric tube to produce phase shifting. The xyz coordinates of the target surface are determined by fitting the measured phase data into a global model of multilateration. Measurement has been performed for the warpage inspection of chip scale packages (CSPs) that are tape-mounted on ball grid arrays (BGAs) and backside profile of a silicon wafer in the middle of integrated-circuit fabrication process. When a diagonal profile is measured across the wafer, the maximum discrepancy turns out to be 5.6 ${\mu}{\textrm}{m}$ with a standard deviation of 1.5 ${\mu}{\textrm}{m}$.

Tunable Polymeric Bragg Grating filter Using Nanoimprint Technique (나노 임프린트 기술을 이용한 폴리머 도파로 기반의 브래그 격자형 파장 가변 필터)

  • Kim, Do-Hwan;Chin, Won-Jun;Lee, Sang-Shin;Ahn, Seh-Won;Lee, Ki-Dong
    • Korean Journal of Optics and Photonics
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    • v.17 no.1
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    • pp.99-103
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    • 2006
  • A tunable wavelength filter was proposed and demonstrated by using the UV nanoimprint technique. It consists of a Bragg grating in polymer waveguides and a heating electrode. The manufacturing of the grating was substantially simplified with the introduction of a smart imprint stamp containing a waveguide pattern integrated with the grating pattern. The center wavelength of the filter was successfully tuned by taking advantage of the thermooptic effect in polymers, which was induced by supplying electrical power to the electrode. For the fabricated device, a transmission dip of ${\~}$15 dB and a 3-dB bandwidth of 0.8 nm were obtained at the Bragg wavelength of ${\~}$l560 nm. The achieved thermooptic tuning efficiency was ${\~}$0.28 nm/mW, while the center wavelength was shifted from 1560 nm to 1558 nm with the electrical power consumption of 7 mW.

Fabrication of Ti-doped BSG Waveguide Films by Flame Hydrolysis Deposition (불꽃가수분해 증착에 의한 Ti-doped BSG 도파박막의 제작)

  • 전영윤;이용태;전은숙;정석종;이형종
    • Korean Journal of Optics and Photonics
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    • v.5 no.4
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    • pp.499-504
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    • 1994
  • Ti-doped BSG (borosilicate glass) soot films on the silicone substrate have been deposited in the mixture of $SiCl_{4}$, TMB, $TiCL_{4}$ by flame hydrolysis deposition technique. The soot films are melted to form integrated fine glass films. We can fabricate thick films of serveral $10{\mu}m$ with deposition rate,more than $0.5{\mu}m$/min. Refractive index difference of BSG films are increased to more than 0.3% as function of the amount of Ti dopant. As a result of the process an optical waveguide which is simmilar with dimmension and refractive difference of optical fiber is produced. $BCl_{3}$ is widely used for B dopant, but we abtained the good results by the use of TMB in place of $BCl_{3}$. The melting point of silica soot glass is reduced to $1200^{\circ}C$ increasing B dopant. From FTIR analysis $B_2O_3$ content up to about lOmol% in BSG films. films.

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A Study on Fabrication and Performance Evaluation of Ti:LiNbO3 Polarization Mode Controllers (Ti:LiNbO3 편광모드 조절기 제작 및 성능 평가에 관한 연구)

  • Moon, Je-Young;Jung, Hong-Sik
    • Korean Journal of Optics and Photonics
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    • v.15 no.6
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    • pp.547-554
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    • 2004
  • We investigated a LiNbO$_3$ based integrated-optic polarization controller with the Ti-indiffused waveguide along the z-axis utilizing the electro-optic effect. The device consists of a first quarter-wave (λ / 4) followed by a half-wave (λ / 2) and a second quarter-wave (λ / 4) wave-plate. We analyzed the amount of phase change and the transformation of the polarized mode as a function of the combination of wave-plates and of their applied voltages. The operation has been systematically measured utilizing a polarimeter and Poincare sphere. We confirmed that the fabricated device controls the transformations from any arbitrary input state of polarization (SOP) into any general output SOP.

Optical power splitters and optical intensity modulators utilizing Strain-Optic Waveguides of LiNbO3 (LiNbO3의 스트레인광학형 광도파로를 이용한 세기 광 변조기와 광 파워 분배기)

  • 정홍식
    • Korean Journal of Optics and Photonics
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    • v.14 no.1
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    • pp.38-43
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    • 2003
  • Fabrication process of strain-induced channel waveguides in $LiNbO_3$ was developed using strain-optic effect and compressional strain due to ~1.4 $\mu\textrm{m}$ surface Mo/Pt metal film. Characterization of the channel waveguides revealed a single transverse and depth mode in both TE and TM polarizations. Measurements showed total insertion loss of 6.2 and 7.7 ㏈/cm for TM and TE polarizations. respectively. Electro-optic intensity modulators with 11 mm long electrode length and 21 $\mu\textrm{m}$ electrode gap at $\lambda$ = 1.15 ${\mu}{\textrm}{m}$have been produced in $LiNbO_3$ substrates using strain-induced channel waveguides. Modulation depth of 100% at $\pi$-radian voltage of 16.1V has been demonstrated. Also, 1$\times$2 on/off power splitters at $\lambda$ = 0.63 $\mu\textrm{m}$ have been produced using strain-induced channel waveguides. On/off voltage of $\pm$ 25V has been demonstrated.

Tunable Optical Delay Line Based on Polymer Single-Ring Add/Drop Filters and Delay Waveguides (폴리머 단일 링 Add/Drop 필터와 지연 도파로로 구성된 튜닝 가능 광 신호 지연기)

  • Kim, Kyoungrae;Moon, Hyunseung;Chung, Youngchul
    • Korean Journal of Optics and Photonics
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    • v.27 no.5
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    • pp.174-180
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    • 2016
  • A tunable optical delay line is designed, fabricated, and characterized. The tunable delay line consists of four polymer-ring add/drop filters with delay waveguides between adjacent ones. The polymer waveguide is a buried structure, designed to be square with core width and height of $1.8{\mu}m$. The refractive indices of the core and cladding polymer are 1.48 and 1.37 respectively. The large index difference and small cross section of the waveguide enable us to realize a compact device using a small radius of curvature. Four pairs of electrodes are evaporated above the add/drop filters to provide heating currents for thermal tuning. In measurements we can identify variable time delays of 110, 225, and 330 ps in proportion to the number of delay lines.

Fabrication and Characterization of LPCVD $P_2O_5-SiO_2$ Films for Inegrated Optics (1) -LPCVD of TEOS and TMPite (LPCVD $P_2O_5-SiO_2$ 집적광학박막의 제작 및 특성 연구(1) -TEOS와 TMPite의 LPCVD-)

  • 정환재
    • Korean Journal of Optics and Photonics
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    • v.4 no.3
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    • pp.266-275
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    • 1993
  • We made $P_2O_5-SiO_2$ films on silicon for integrated optics application by low pressure chemical vapor deposition using TEOS (tetraethylorthosilicate) and TMPite (trimethylphosphite) and studied the deposition characteristics. The activation energy of the reaction was changed from 54.6 kcal/mole to 39.2 kcal/mole by incorporating the TMPite into the reaction of TEOS. The deposition rate and the P concentration of films increased in proportion to the flow of TMPite. As the deposition temperature increased, the deposition rate of the films increased but the P concentration decreased. The fabricated films showed the increase of refractive index of 0.0019 per 1 wt% of P concentration. The nonuniformity of films was ${\pm}$7% in thickness and ${\pm}$0.5wt% in P concentration and we showed this'nonuniformity is due to the nonuniform transport of TMPite. The films of more than 10wt% P concentration developed phosphoric acid on its surface when exposed to air for long time.

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Design and Analysis of Mach-Zehnder-Interferometer-Based Silica Planar Lightwave Circuit Triplexer (마하젠더 간섭계로 구성된 실리카 평판 광 도파회로 트라이플렉서의 설계 및 분석)

  • Lee, Tae-Hyung;Lee, Dong-Hyun;Chung, Young-Chul
    • Korean Journal of Optics and Photonics
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    • v.18 no.6
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    • pp.447-451
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    • 2007
  • A triplexer based on a silica planar lightwave circuit Mach-Zehnder nterferometer(MZI) is proposed and its characteristics are analyzed through simulations. To separate 1310 nm band and $1480{\sim}1560nm$ band properly, the path length difference of an MZI is set to be the multiple and half of the wavelength 1310 nm and the balance of the directional coupler is optimized in the $1480{\sim}1560nm$ band. The same MZI is additionally cascaded to provide good crosstalk characteristics. The 1490 nm band and 1550 nm band are further separated using additional two stage MZI's. A three-dimensional BPM and transfer matrix method analysis predicts the low crosstalk characteristics and the fabrication-error-tolerance of the proposed triplexer.

Thermal Analysis and Design of AlGaInP-based Light Emitting Diode Arrays

  • Ban, Zhang;Liang, Zhongzhu;Liang, Jingqiu;Wang, Weibiao;JinguangLv, JinguangLv;Qin, Yuxin
    • Current Optics and Photonics
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    • v.1 no.2
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    • pp.143-149
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    • 2017
  • LED arrays with pixel numbers of $3{\times}3$, $4{\times}4$, and $5{\times}5$ have been studied in this paper in order to enhance the optical output power and decrease heat dissipation of an AlGaInP-based light emitting diode display device (pixel size of $280{\times}280{\mu}m$) fabricated by micro-opto-electro-mechanical systems. Simulation results showed that the thermal resistances of the $3{\times}3$, $4{\times}4$, $5{\times}5$ arrays were $52^{\circ}C/W$, $69.7^{\circ}C/W$, and $84.3^{\circ}C/W$. The junction temperature was calculated by the peak wavelength shift method, which showed that the maximum value appears at the center pixel due to thermal crosstalk from neighboring pixels. The central temperature would be minimized with $40{\mu}m$ pixel pitch and $150{\mu}m$ substrate thickness as calculated by thermal modeling using finite element analysis. The modeling can be used to optimize parameters of highly integrated AlGaInP-based LED arrays fabricated by micro-opto-electro-mechanical systems technology.

Integrated Photonic Channel Selective Microwave Bandpass Filter Incorporating a 1×2 Switch Based on Tunable Polymeric Ring Resonators (폴리머 링 공진기 기반의 스위치를 이용한 집적광학 채널 선택 마이크로웨이브 대역통과 필터)

  • Kim, Gun-Duk;Lee, Sang-Shin
    • Korean Journal of Optics and Photonics
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    • v.18 no.1
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    • pp.79-83
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    • 2007
  • A reconfigurable photonic microwave (MW) channel selective filter was demonstrated incorporating a $1{\times}2$ switch based on two tunable polymeric resonators with different free spectral ranges. Each resonator, consisting of two cascaded rings with an electrode formed on one of them, plays a role as an on/off switch through the thermooptic effect. The optical signal carrying the MW signal is routed to either port of the switch and detected to show the filtered output at the frequency determined by the free spectral range of the corresponding resonator. When the channel centered at 10 GHz was chosen, the extinction ratio was ${\sim}30dB$, the bandwidth 1 GHz, and the electrical power consumption 4.1 mW. For the other channel located at 20 GHz, we have achieved the extinction ratio of ${\sim}30dB$, the bandwidth of 2 GHz, and the required power of 8.0 mW. Finally the crosstalk between the selected and blocked channels was higher than 24 dB.