• Title/Summary/Keyword: Hot-carrier-induced degradation

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Hot carrier effects and device degradation in deep submicrometer PMOSFET (Deep submicrometer PMOSFET의 hot carrier 현상과 소자 노쇠화)

  • 장성준;김용택;유종근;박종태;박병국;이종덕
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.33A no.4
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    • pp.129-135
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    • 1996
  • In this paper, the hot carrier effect and device degradation of deep submicrometer SC-PMOSFETs have been measured and characterized. It has been shown that the substrate current of a 0.15$\mu$m PMOSFET increases with increasing of impact ionization rate, and the impact ionization rate is a function of the gate length and gate bias voltage. Correlation between gate current and substrate current is investigated within the general framework of the lucky-electron. It is found that the impact ionization rate increases, but the device degradation is not serious with decreasing effective channel length. SCIHE is suggested as the possible phusical mechanism for enhanced impact ionization rate and gate current reduction. Considering the hot carrier induced device degradation, it has been found that the maximum supply voltage is about -2.6V for 0.15$\mu$m PMOSFET.

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Hot Electron Induced Device Degradation in Gate-All-Around SOI MOSFETs (Gate-All-Around SOI MOSFET의 소자열화)

  • 최낙종;유종근;박종태
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.40 no.10
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    • pp.32-38
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    • 2003
  • This works reports the measurement and analysis results on the hot electron induced device degradation in Gate-All-Around SOI MOSFET's, which were fabricated using commercially available SIMOX material. It is observed that the worst-case condition of the device degradation in nMOSFETs is $V_{GS}$ = $V_{TH}$ due to the higher impact ionization rate when the parasitic bipolar transistor action is activated. It is confirmed that the device degradation is caused by the interface state generation from the extracted degradation rate and the dynamic transconductance measurement. The drain current degradation with the stress gate voltages shows that the device degradation of pMOSFETs is dominantly governed by the trapping of hot electrons, which are generated in drain avalanche hot carrier phenomena.r phenomena.

Hot electron induced degradation model of the DC and RF characteristics of RF-nMOSFET (Hot electron에 의한 RF-nMOSFET의 DC및 RF 특성 열화 모델)

  • 이병진;홍성희;유종근;전석희;박종태
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.35D no.11
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    • pp.62-69
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    • 1998
  • The general degradation model has been applied to analyze the hot carrier induced degradation of the DC and RF characteristics of RF-nMOSFET. The degradation of cut-off frequency has been severer than the degradation of bulk MOSFET drain current. The value of the degradation rate n and the degradation parameter m for RF-nMOSFET has been equal to those for bulk MOSFET. The decrease of device degradation with the increase of fingers could be explained by the large source/drain parasitic resistance and drain saturation voltage. It has been also found that the RF performance degradation could be explained by the decrease of $g_{m}$ and $C_{gd}$ and the increase of $g_{ds}$ after stress. The degradation of the DC and RF characteristics of RF-nMOSFET could be predicted by the measurement of the substrate current.t.

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A Study on the Effect of Device Degradation Induced by Hot-Carrier to Analog Circuits (Hot-Carrier에 의한 소자 외쇠화가 아날로그 회로에 미치는 영향)

  • 류동렬;박종태;김봉렬
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.31A no.12
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    • pp.91-99
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    • 1994
  • We used CMOS current mirror and differenial amplifier to find out how the degradation of each devices in circuit affect total circuit performance. The devices in circuit wer degraded by hot-carrier generated during circuit operation and total circuit performance were changed according to the change of each device parameters. To examine the circuit performance phenomena of current mirror, we analyzed three diffent kinds of current mirrors and made correlation model between circuit performance and stressed device parameters, and compare hot-carrier immunity of these circuits. Also we analyzed how the performance of differential amplifier degraded from the initial value after hot-carrier stress incircuit operations.

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Impact of Gate Structure On Hot-carrier-induced Performance Degradation in SOI low noise Amplifier (SOI LAN에서 게이트구조가 핫캐리어에 의한 성능저하에 미치는 영향)

  • Ohm, Woo-Yong;Lee, Byong-Jin
    • 전자공학회논문지 IE
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    • v.47 no.1
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    • pp.1-5
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    • 2010
  • This paper presents new results of the impact of gate structure on hot-carrier-induced performance degradation in SOI low noise amplifier. Circuit simulations were carried out using the measured S-parameters of H--gate and T-gate SOI MOSFETs and Agilent's Advanced Design System (ADS) to compare the performance of H-gate LNA and T-gate LNA before and after stress. We will discuss the figure of merit for the characterization of low noise amplifier in terms of impedance matching (S11), noise figure, and gain as well as the relation between device degradation and performance degradation of LNA.

A study on Effect of Surface ion Implantation for Suppression of Hot carrier Degradation of LDD-nMOSFETs (LDD-nMOSFET의 핫 캐리어 열화 억제를 위한 표면 이온주입 효과에 대한 연구)

  • Seo, Yong-Jin;An, Tae-Hyun;Kim, Sang-Yong;Kim, Tae-Hyung;Kim, Chang-Il;Chang, Eui-Goo
    • Proceedings of the KIEE Conference
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    • 1998.11c
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    • pp.735-736
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    • 1998
  • Reduction of hot carrier degradation in MOS devices has been one of the most serious concerns for MOS-ULSIs. In this paper, three types of LDD structure for suppression of hot carrier degradation, such as spacer-induced degradation and decrease of performance due to increase of series resistance will be investigated. LDD-nMOSFETs used in this study had three different drain structure. (1) conventional ${\underline{S}}urface$ type ${\underline{L}}DD$(SL), (2) ${\underline{B}}uried$ type ${\underline{L}}DD$(BL), (3) ${\underline{S}}urface$urface ${\underline{I}}mplantation$ type LDD(SI). As a result, the surface implantation type LDD structure showed that improved hot carrier lifetime to comparison with conventional surface and buried type LDD structure.

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Hot-Carrier-Induced Degradation of Lateral DMOS Transistors under DC and AC Stress (DC 및 AC 스트레스에서 Lateral DMOS 트랜지스터의 소자열화)

  • Lee, In-Kyong;Yun, Se-Re-Na;Yu, Chong-Gun;Park, J.T.
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.44 no.2
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    • pp.13-18
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    • 2007
  • This paper presents the experimental findings on the different degradation mechanism which depends on the gate oxide thickness in lateral DMOS transistors. For thin oxide devices, the generation of interface states in the channel region and the trapped holes in the drift region is found to be the causes of the device degradation. For thick devices, the generation of interface states in the channel region is found to be the causes of the device degradation. We confirmed the different degradation mechanism using device simulation. From the comparison of device degradation under DC and AC stress, it is found that the device degradation is more significant under DC stress than one under AC stress. The device degradation under AC stress is more significant in high frequency. Therefore the hot carrier induced degradation should be more carefully considered in the design of RF LDMOS transistors and circuit design.

MOSFET Characteristics and Hot-Carrier Reliability with Sidewall Spacer and Post Gate Oxidation (Sidewall Spacer와 Post Gate Oxidation에 따른 MOSFET 특성 및 Hot Carrier 신뢰성 연구)

  • 이상희;장성근;이선길;김선순;최준기;김용해;한대희;김형덕
    • Proceedings of the IEEK Conference
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    • 1999.06a
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    • pp.243-246
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    • 1999
  • We studied the MOSFET characteristics and the hot-carrier reliability with the sidewall spacer composition and the post gate oxidation thickness in 0.20${\mu}{\textrm}{m}$ gate length transistor. The MOSFET with NO(Nitride+Oxide) sidewall spacer exhibits the large degradation of hot-carrier lifetime because there is no buffering oxide against nitride stress. When the post gate oxidation is skipped, the hot-carrier lifetime is improved, but GIDL (Gate Induced Drain Leakage) current is also increased.

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Hot-Carrier Effects of $BF_2$ Ion-Implanted Surface-Channel LDD PMOSFET ($BF_2$ 이온 주입한 표면 채널 LDD PMOSFET의 Hot-Carrier 효과)

  • 양광선;박훈수;김봉렬
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.28A no.12
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    • pp.53-58
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    • 1991
  • Hot-carrier induced degradation has been studied for the BF$_2$ ion-implanted surface-channel LDD(P$^{+}$ polysilicon gate) PMOSFET in comparison to the buried-channel structure(N$^{+}$ polysilicon gate) PMOSFET. The conditions for maximum degradation better correlated to I$_{g}$ than I$_{sub}$ for both PMOSFET's. Due to the use of LDD structure on SC-PMOSFET, the substrate current for SC-PMOSFET was shown to be smaller than that of BC-PMOSFET. The gate current was smaller as well, due to the gate material work-function difference between p$^{+}$ and n$^{+}$ polysilicon gates. From the results, it was shown that the surface-channel LDD PMOSFET is more resistant to short channel effect than the buried-channel PMOSFET.

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Analysis of Hot-Carrier Effects in High-Voltage LDMOSFETs (고전압 LDMOSFET의 Hot-Carreir 효과에 의한 특성분석)

  • Park, Hoon-Soo;Lee, Young-Ki;Kwon, Young-Kyu
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.199-200
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    • 2005
  • In this paper, the electrical characteristics and hot-carrier induced electrical performance degradations of high-voltage LDMOSFET fabricated by the existing CMOS technology were investigated. Different from the low voltage CMOS device, the only specific on-resistance was degraded due to hot-carrier stressing in LDMOS transistor. However, other electrical parameters such as threshold voltage, transconductance, and saturated drain current were not degraded after stressing. The amount of on-resistance degradation of LDMOS transistor that was implanted n-well with $1.0\times10^{13}/cm^2$ was approximately 1.6 times more than that of LDMOS transistor implanted n-well with $1.0\times10^{12}/cm^2$. Similar to low voltage CMOS device, the peak on-resistance degradation in LDMOS device was observed at gate voltage of 2.2V while the drain applied voltage was 50V. It means that the maximum impact ionization at the drain junction occurs at the gate voltage of 2.2V applying the drain voltage of 50V.

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