• 제목/요약/키워드: Hot carrier stress

검색결과 74건 처리시간 0.03초

Hot Carrier Stress로 인한 SOI MOSFET의 전력 성능 저하 (Effect of Hot Carrier Stress on The Power Performance Degradation in SOI MOSFET)

  • 이병진;박성욱;박종관
    • 전자공학회논문지 IE
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    • 제45권4호
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    • pp.7-10
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    • 2008
  • 본 연구에서는 load-pull 장비를 이용하여 hot carrier 현상에 따른 RF 전력 성능 저하를 측정 분석하였다. 스트레스를 인가한 주에 RF 전력 지수들은 감소하였으며, 고정 전압 조건에서 관찰한 SOIl MOSFET의 DC 성능 지수들 또한 hot carrier stress로 인하여 감소함을 할 수 있었다. 또한 Hot carrier stress로 인한 DC 성능 저하로 인하여 RF 전력 성능 저하의 감소를 알 수 있었다.

p-채널 Poly-Si TFT s 소자의 Hot-Carrier 효과에 관한 연구 (A Study on the Hot-Carrier Effects of p-Channel Poly-Si TFT s)

  • 진교원;박태성;백희원;이진민;조봉희;김영호
    • 한국전기전자재료학회논문지
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    • 제11권9호
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    • pp.683-686
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    • 1998
  • Hot carrier effects as a function of bias stress time and bias stress consitions were syste-matically investigated in p-channel poly-Si TFT s fabricated on the quartz substrate. The device degradation was observed for the negative bias stress, while improvement of electrical characteristic except for subthreshold slope was observed for the positive bias stress. It was found that these results were related to the hot-carrier injection into the gate oxide and interface states at the poly-Si/$SiO_2$interface rather than defects states generation within the poly-Si active layer under bias stress.

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PMOSFET에서 Hot Carrier Lifetime은 Hole injection에 의해 지배적이며, Nano-Scale CMOSFET에서의 NMOSFET에 비해 강화된 PMOSFET 열화 관찰 (PMOSFET Hot Carrier Lifetime Dominated by Hot Hole Injection and Enhanced PMOSFET Degradation than NMOSFET in Nano-Scale CMOSFET Technology)

  • 나준희;최서윤;김용구;이희덕
    • 대한전자공학회논문지SD
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    • 제41권7호
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    • pp.21-29
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    • 2004
  • 본 논문에서는 Dual oxide를 갖는 Nano-scale CMOSFET에서 각 소자의 Hot carrier 특성을 분석하여 두 가지 중요한 결과를 나타내었다. 하나는 NMOSFET Thin/Thick인 경우 CHC stress 보다는 DAHC stress에 의한 소자 열화가 지배적이고, Hot electron이 중요하게 영향을 미치고 있는 반면에, PMOSFET에서는 특히 Hot hole에 의한 영향이 주로 나타나고 있다는 것이다. 다른 하나는, Thick MOSFET인 경우 여전히 NMOSFET의 수명이 PMOSFET의 수명에 비해 작지만, Thin MOSFET에서는 오히려 PMOSFET의 수명이 NMOSFET보다 작다는 것이다. 이러한 분석결과는 Charge pumping current 측정을 통해 간접적으로 확인하였다. 따라서 Nano-scale CMOSFET에서의 NMOSFET보다는 PMOSFET에 대한 Hot camel lifetime 감소에 관심을 기울여야 하며, Hot hole에 대한 연구가 진행되어야 한다고 할 수 있다.

채널 폭에 따른 나노와이어 GAA MOSFET의 GIDL 전류 특성 (GIDL current characteristic in nanowire GAA MOSFETs with different channel Width)

  • 제영주;신혁;지정훈;최진형;박종태
    • 한국정보통신학회:학술대회논문집
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    • 한국정보통신학회 2015년도 추계학술대회
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    • pp.889-893
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    • 2015
  • 본 연구에서는 채널 폭 변화에 따른 나노와이어 GAA 소자의 GIDL 전류 (Gate Induced Drain Leakage Current)를 측정하고, hot carrier 스트레스를 인가하였을 때 소자의 GIDL전류특성 변화를 분석하였다. 소자의 길이는 250nm로 고정시키고 채널 폭이 10nm, 50nm, 80nm, 130nm인 소자들을 사용하여 측정하였다. 스트레스 전의 소자를 측정한 결과 채널 폭이 감소할수록 GIDL전류가 증가하였고, 채널 폭이 증가할수록 구동전류는 증가함을 확인하였다. Hot carrier 스트레스에 따른 GIDL 전류 측정값의 변화율은 채널 폭이 감소할수록 큰 변화율을 보였다. 또한, 채널 폭이 감소할수록 또 hot carrier 스트레스 후 GIDL 전류가 증가하는 이유를 소자 시뮬레이션을 통하여 확인하였다.

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나노급 소자의 핫캐리어 특성 분석 (Characterization of Hot Carrier Mechanism of Nano-Scale CMOSFETs)

  • 나준희;최서윤;김용구;이희덕
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2004년도 하계종합학술대회 논문집(2)
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    • pp.327-330
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    • 2004
  • It is shown that the hot carrier degradation due to enhanced hot holes trapping dominates PMOSFETs lifetime both in thin and thick devices. Moreover, it is found that in 0.13 ${\mu}m$ CMOSFET the PMOS lifetime under CHC (Channel Hot Carrier) stress is lower than the NMOSFET lifetime under DAHC (Drain Avalanche Hot Carrier) stress. Therefore. the interface trap generation due to enhanced hot hole injection will become a dominant degradation factor. In case of thick MOSFET, the degradation by hot carrier is confirmed using charge pumping current method and highly necessary to enhance overall device lifetime or circuit lifetime in upcoming nano-scale CMOS technology.

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장시간 스트레스 조건에서 submicron MOSFET의 열전자 트래핑에 의한 노화현상에 대한 연구 (A study on the degradation by the hot carrier trapping of the submicron MOSFET with long stress condition)

  • 홍순석
    • E2M - 전기 전자와 첨단 소재
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    • 제8권3호
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    • pp.357-361
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    • 1995
  • An experiment on characteristics of nMOSFET's in the long stress condition with the maximum of the substrate current has been carried out in order to study on the degradation due to the hot-carrier effect. Based on the measured result of the threshold voltage, the damage is mostly due to the hole injection into the oxide. After long stress, it was shown that the drain current increased at low gate voltages and hence decreased at high gate voltages.

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p-채널 po1y-Si TFT 소자의 Hot-Carrier효과에 관한 연구 (A Study on the Hot-Carrier Effects of p-channel poly-Si TFT)

  • 진교원;박태성;이제혁;백희원;변문기;김영호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1997년도 추계학술대회 논문집
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    • pp.266-269
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    • 1997
  • Hot carrier effects as a function of bias stress time and bias stress conditions were syste-matica1ly investigated in p-channel po1y-Si TFT's fabricated on the quartz substrate. The device degradation was observed for the negative bias stress. After positive bias stressing, Improvement of electrical characteristic except for subthreshold slope was observed. It was found that these results were related to the hot carrier injection into the gate oxide and interface states at the poly-Si/SiO$_2$interface rather than defects states generation under bias stress.

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NO기반 게이트절연막 NMOS의 AC Hot Carrier 특성 (Characteristics of AC Hot-carrier-induced Degradation in nMOS with NO-based Gate Dielectrics)

  • 장성근;김윤장
    • 한국전기전자재료학회논문지
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    • 제17권6호
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    • pp.586-591
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    • 2004
  • We studied the dependence of hot-tarrier-induced degradation characteristics on nitrogen concentration in NO(Nitrided-Oxide) gate of nMOS, under ac and dc stresses. The $\Delta$V$_{t}$ and $\Delta$G$_{m}$ dependence of nitrogen concentration were observed, We observed that device degradation was suppressed significantly when the nitrogen concentration in the gate was increased. Compared to $N_2$O oxynitride, NO oxynitride gate devices show a smaller sensitivity to ac stress frequency. Results suggest that the improved at-hot carrier immunity of the device with NO gate may be due to the significantly suppressed interface state generation and neutral trap generation during stress.ess.

STI구조를 갖는 nMOSFET의 채널 너비에 따른 Hot-Carrier 열화 현상에 관한 연구 (A Study on the Channel-Width Dependent Hot-Carrier Degradation of nMOSFET with STI)

  • 이성원;신형순
    • 대한전자공학회논문지SD
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    • 제40권9호
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    • pp.638-643
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    • 2003
  • Channel width dependence of hot-carrier effect in nMOSFET with shallow trench isolation is analyzed. $I_{sub}$- $V_{G}$ and $\Delta$ $I_{ㅇ}$ measurement data show that MOSFETs with narrow channel-width are more susceptible to the hot-carrier degradation than MOSFETs with wide channel-width. By analysing $I_{sub}$/ $I_{D}$, linear $I_{D}$- $V_{G}$ characteristics, thicker oxide-thickness at the STI edge is identified as the reason for the channel-width dependent hot-carrier degradation. Using the charge-pumping method, $N_{it}$ generation due to the drain avalanche hot-carrier (DAHC) and channel hot-electron (CHE) stress are compared. are compared.

직류 및 교류스트레스 조건에서 발생된 Hot-Carrier가 PMOSFET의 누설전류에 미치는 영향 (Hot-Carrier Induced GIDL Characteristics of PMOSFETs under DC and Dynamic Stress)

  • 류동렬;이상돈;박종태;김봉렬
    • 전자공학회논문지A
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    • 제30A권12호
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    • pp.77-87
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    • 1993
  • PMOSFETs were studied on the effect of Hot-Carrier induced drain leakage current (Gate-Induced-Drain-Leakage). The result turned out that change in Vgl(drain voltage where 1pA/$\mu$m of drain leadage current flows) was largest in the Channel-Hot-Hole(CHH) injection condition and next was in dynamic stress and was smallest in electron trapping (Igmax) condition under various stress conditions. It was analyzed that if electron trapping occurrs in the overlap region of gate and drain(G/D), it reduces GIDL current due to increment of flat-band voltage(Vfb) and if CHH is injected, interface states(Nit) were generated and it increases GIDL current due to band-to-defect-tunneling(BTDT). Especially, under dynamic stress it was confirmed that increase in GIDL current will be high when electron injection was small and CHH injection was large. Therefore as applying to real circuit, low drain voltage GIDL(BTDT) was enhaced as large as CHH Region under various operating voltage, and it will affect the reliablity of the circuit.

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