• Title/Summary/Keyword: Hot carrier

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Polysilicon Thin Film Transistor for Improving Reliability using by U]D Structure (LDD 구조를 이용한 다결정 실리콘 박막 트랜지스터의 신뢰성 향상)

  • 정은식;장원수;배지철;이용재
    • Proceedings of the IEEK Conference
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    • 2002.06b
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    • pp.185-188
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    • 2002
  • In this paper, Amorphous silicon on glass substrate was recrytallized to poly-crystalline silicon by solid phase crystallization(SPC) technology The active region of thin film transistor(TFT) was fabricated by amorphous silicon. The output and transfer characteristics of thin film transistor with lightly doped drain(LDD) structure was measured and analyzed. As a results, analyzed TFT's reliability with LDD's length by various kinds argument such as sub-threshold swing coefficient, mobility and threshold voltages were evaluated. Stress effects in TFT were able to improve to the characteristics of turn-on current and hot carrier effects by LDD's length variations

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Hot carrier induced device degradation for PD-SOI PMOSFET at elevated temperature (고온에서 PD-SOI PMOSFET의 소자열화)

  • 박원섭;박장우;윤세레나;김정규;박종태
    • Proceedings of the IEEK Conference
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    • 2003.07b
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    • pp.719-722
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    • 2003
  • This work investigates the device degradation p-channel PD SOI devices at various applied voltages as well as stress temperatures with respect to Body-Contact SOI (BC-SOI) and Floating-Body SOI (FB-SOI) MOSFETs. It is observed that the drain current degradation at the gate voltage of the maximum gate current is more significant in FB-SOI devices than in BC-SOI devices. For a stress at the gate voltage of the maximum gate current and elevated temperature, it is worth noting that the $V_{PT}$ Will be decreased by the amount of the HEIP plus the temperature effects. For a stress at $V_{GS}$ = $V_{DS}$ . the drain current decreases moderately with stress time at room temperature but it decreases significantly at the elevated temperature due to the negative bias temperature instability.

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A New Asymmetric SOI Device Structure for High Current Drivability and Suppression of Degradation in Source-Drain Breakdown Voltage (전류구동 능력 향상과 항복전압 감소를 줄이기 위한 새로운 비대칭 SOI 소자)

  • 이원석;송영두;정승주;고봉균;곽계달
    • Proceedings of the IEEK Conference
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    • 1999.06a
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    • pp.918-921
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    • 1999
  • The breakdown voltage in fully depleted SOI N-MOSFET’s have been studied over a wide range of film thicknesses, channel doping, and channel lengths. An asynmmetric Source/Drain SOI technology is proposed, which having the advantages of Normal LDD SOI(Silicon-On-Insulator) for breakdown voltage and gives a high drivability of LDD SOI without sacrificings hot carrier immunity The two-dimensional simulations have been used to investigate the breakdown behavior in these device. It is found that the breakdown voltage(BVds) is almost same with high current drivability as that in Normal LDD SOI device structure.

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1/f Noise Characteristics of Sub-100 nm MOS Transistors

  • Lee, Jeong-Hyun;Kim, Sang-Yun;Cho, Il-Hyun;Hwang, Sung-Bo;Lee, Jong-Ho
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.6 no.1
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    • pp.38-42
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    • 2006
  • We report 1/f noise PSD(Power Spectrum Density) of sub-100 nm MOSFETs as a function of various parameters such as HCS (Hot Carrier Stress), bias condition, temperature, device size and types of MOSFETs. The noise spectra of sub-100 nm devices showed Lorentzian-like noise spectra. We could check roughly the position of a dominant noise source by changing $V_{DS}$. With increasing measurement temperature, the 1/f noise PSD of 50 nm PMOS device decreases, but there is no decrease in the noise of NMOS device. RTN (Random Telegraph Noise) was measured from the device that shows clearly a Lorentzian-like noise spectrum in 1/f noise spectrum.

The Characterization of Poly-Si Thin Film Transistor Crystallized by a New Alignment SLS Process

  • Lee, Sang-Jin;Yang, Joon-Young;Hwang, Kwang-Sik;Yang, Myoung-Su;Kang, In-Byeong
    • Journal of Information Display
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    • v.8 no.4
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    • pp.15-18
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    • 2007
  • In this paper, we investigated the SLS process to control grain boundary(GB) location in TFT channel region, and it has been found to be applicable for locating the GB at the same location in the channel region of each TFT. We fabricated TFT by applying a new alignment SLS process and compared the TFT characteristics with a normal SLS method and the grain boundary location controlled SLS method. Also, we have analysed degradation phenomena under hot carrier stress conditions for n-type LDD MOSFETs.

Fabrication of heterojunction silicon solar cell using HWCVD passivation layer (HWCVD 패시베이션 층을 적용한 이종접합 태양전지 제작)

  • Kang, Min-Gu;Tark, Sung-Ju;Lee, Sung-Hun;Kim, Chan-Seok;Jeong, Dae-Young;Lee, Jeong-Chul;Kim, Dong-Hwan
    • 한국신재생에너지학회:학술대회논문집
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    • 2009.11a
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    • pp.370-370
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    • 2009
  • 이종접합태양전지는 구조적 대칭성 때문에 웨이퍼 두께가 감소하여도 보우잉이 일어나지 않는 특징이 있으며, 산요에서 개발한 이종접합태양전지의 효율이 22% 이상을 보이고 있다. 이종접합태양전지에서 비정질 실리콘과 실리콘 웨이퍼의 계면에 따라 이종접합태양전지의 특성이 크게 변화한다. 본 연구에서는 패시베이션 층으로 사용되는 비정질 실리콘을 hot wire chemical vapor deposition(HWCVD)을 사용하여 이종접합태양전지에 적용하였으며 기존의 plasma-enhanced chemical vapor deposition을 이용한 비정질 실리콘을 적용한 이종접합태양전지와 비교하였다. 패시베이션 특성을 확인하기 위해 quasi-steady state photoconductance로 minority carrier lifetime을 측정하였고, 태양전지 특성평가로는 암전류특성 및 광전류특성을 사용하였다. HWCVD를 사용하여 패시베이션한 태양전지의 경우 16.1%의 효율을 보였다.

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Analysis on Degradation of Poly-Si TFT`s and Fabrication of Depressed Poly-Si TFT (열화가 억제된 다결성 실리콘 박막 트랜지스터의 제작 및 소자의 열화 특성 분석)

  • Kim, Yong-Sang;Park, Jin-Seok;Jo, Bong-Hui;Gil, Sang-Geun;Kim, Yeong-Ho
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.50 no.10
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    • pp.489-493
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    • 2001
  • The on-current of offset and LDD structured devices in slightly decreased while the off-current are remarkably reduced and almost constant independent of gate and drain voltage because offset and LDD regions behave as a series resistance and reduce the lateral electric field in the drain depletion. Degradation of these devices is dependent upon the offset and LDD length rather than doping concentration in these regions. Also, degradation mechanism has been related to the interface generation rather than the hot carrier injection into gate oxide.

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The Characterization of Poly-Si Thin Film Transistor Crystallized by a New Alignment SLS Process

  • Lee, S.J.;Yang, J.Y.;Hwang, K.S.;Yang, M.S.;Kang, I.B.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08a
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    • pp.16-19
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    • 2007
  • In this paper, we present work that has been carried out using the SLS process to control grain boundary(GB) location in TFT channel region and it is possible to locate the GB at the same location in the channel region of each TFT. We fabricated TFT by applying a new alignment SLS process and compared the TFT characteristics with a normal SLS method and the grain boundary location controlled SLS method. Also, we have analyzed degradation phenomena under hot carrier stress conditions for n-type LDD MOSFETs.

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Gate Capacitance Measurement on the Small-Geometry MOSFET's with Bias (Small-Geometry MOSFET에서 Bias에 따른 게이트 Capacitance 측정)

  • 김천수;김광수;김여환;이진효
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.24 no.5
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    • pp.818-822
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    • 1987
  • Gate capacitances have been measured directly on small-geometry MOSFET's with the drain voltage as a parameter for various channel lengths and for p and n channel types and the characteristics have been compared with each other. The influence of 'hot carrier effect' of short channel devices on capaciatance has been compared with long channel devices. The results show that gate capacitance characteristics of short channel device deviate from those of long channel device. The accuracy of the measurement system is less than a few femto Farad, and the minimum geometry (W/L) of device for which reliable measurement can be obtained is 6/3.

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Effects of electrical stress on low temperature p-channel poly-Si TFT′s (저온에서 제작된 p-채널 poly-Si TFT의 전기적 스트레스 효과)

  • 백희원;임동규;임석범;정주용;이진민;김영호
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.324-327
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    • 2000
  • In this paper, the effects of negative and positive bias stress on p-channel poly-Si TFT's fabricated by excimer laser annealing have been investigated After positive and negative bias stress, transcon-ductance(g$_{m}$) is increased because of a reduction of the effective channel length due to the injected electron in the gate oxide. In the positive bias stress, the injection of hole is appeared after stress time of 3600sec and g$_{m}$ is decreased. On the other hand, the gate voltage at the maximum g$_{m}$, S-swing and threshold voltage(V$_{th}$) are decreased because of the interface state generation due to the injection of electrons into the gate oxide.e.ide.e.

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