• Applied Microscopy
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• 제45권4호
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• pp.214-217
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• 2015

This study introduces metal coating as an effective sample preparation method to remove charge-up caused by the shadow effect during field emission scanning electron microscope (FE-SEM) analysis of dynamic structured samples. During a FE-SEM analysis, charge-up occurs when the primary electrons (input electrons) that scan the specimens are not equal to the output electrons (secondary electrons, backscattered electrons, auger electrons, etc.) generated from the specimens. To remove charge-up, a metal layer of Pt, Au or Pd is applied on the surface of the sample. However, in some cases, charge-up still occurs due to the shadow effect. This study developed a coating method that effectively removes charge-up. By creating a converted sample stage capable of simultaneous tilt and rotation, the shadow effect was successfully removed, and image data without charge-up were obtained.

• Transactions on Electrical and Electronic Materials
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• 제6권3호
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• pp.87-90
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• 2005

$SiO_2$ via-hole etching with a high aspect ratio is a key process in fabricating ULSI devices; however, accumulated charge during plasma etching can cause etching stop, micro-loading effects, and charge build-up damage. To alleviate this concern, charge-up damage sensor was fabricated for the ultimate goal of real-time monitoring of accumulated charge. As an effort to reach the ultimate goal, fabricated sensor was used for electrical potential measurements of via holes between two poly-Si electrodes and roughly characterized under various plasma conditions using statistical design of experiment (DOE). The successful identification of potential difference under various plasma conditions not only supports the evidence of potential charge-up damage, but also leads the direction of future study.

• Journal of information and communication convergence engineering
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• 제3권4호
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• pp.187-190
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• 2005

High aspect ratio via-hole etching process has emerged as one of the most crucial means to increase component density for ULSI devices. Because of charge accumulation in via-hole, this sophisticated and important process still hold several problems, such as etching stop and loading effects during fabrication of integrated circuits. Indeed, the concern actually depends on accumulated charge. For monitoring accumulated charge during plasma etching process, charge-up monitoring sensor was fabricated and tested under some plasma conditions. This paper presents a neural network-based technique for analyzing and modeling several electrical performance of plasma charge-up monitoring sensor.

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2005년도 추계종합학술대회
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• pp.303-306
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• 2005

High aspect ration via-hole etching process has emerged as one of the most crucial means to increase component density for ULSI devices. Because of charge accumulation in via hole, this sophisticated and important process still hold several problems, such as etching stop, loading effects during fabrication of integrated circuits. Indeed, the concern actually depends on accumulated charge. For monitoring accumulated charge during plasma etching process, charge-up monitoring sensor was fabricated and tested under some plasma conditions. This paper presents a neural network-based technique for analyzing and modeling several electrical performance of plasma charge-up monitoring sensor.

• 대한전자공학회논문지SD
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• 제49권5호
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• pp.37-42
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• 2012

기존의 전류 스티어링 전하 펌프의 타이밍 부정합 감소를 위한 새로운 전하 펌프를 제안한다. 기존의 전류 스티어링 전하 펌프는 UP, DOWN 신호의 입력단에 NMOS를 사용하여 서로 다른 지연단 수를 갖게 된다. 제안한 전하 펌프에서는 DOWN 신호의 입력단에 PMOS를 사용함으로써 UP, DOWN 신호의 지연단 수를 동등하게 한다. 기존의 전류 스티어링 전하 펌프를 최적화하여 시뮬레이션한 결과 턴온과 턴오프에 대하여 지연시간의 차이는 각각 14ns, 6ns 이다. 반면에 제안한 전하 펌프는 타이밍 부정합이 향상되어 턴온과 턴오프에 대하여 지연시간의 차이는 각각 6ns, 5ns 이다. 타이밍 부정합의 감소로 인하여 기준 스퍼는 -26dBc에서 -39dBc로 줄어들었다. 제안하는 전하 펌프는 CMOS $0.18{\mu}m$ 공정을 사용하여 설계하였다. 측정 결과 전하 펌프 출력 전압 범위 0.3~1.5V에서 최대 1.5%의 전류 부정합을 보인다.

• Journal of Electrical Engineering and Technology
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• 제10권3호
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• pp.1124-1130
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• 2015

Moisture and high temperature are the most important factors that lead to the ageing of oil-paper insulation, but the research about space charge characteristics of oil-paper insulation does not take the combined effect of ambient temperature, moisture and thermal ageing into account. The pulsed electroacoustic (PEA) method was used to investigate the influence of moisture and temperature on space charge characteristics of oil paper at different ageing stages. The results showed that moisture could speed up formation of space charge in oil paper when water concentration was low, but the formation was restrained if the water concentration was high. At the beginning of thermal ageing, heterogeneous charge accumulation had predominance, but it gradually changed to homogeneous charge injection with ageing. It was believed that moisture concentration could speed up ageing and enhance charge accumulation on one hand, and accelerate or slow down the establishment speed of space charge on the other hand, therefore, charge accumulation type changed with ageing. The more seriously the oil-paper insulation was thermally aged, the deeper the trap energy level was, hence more space charge was trapped, which could be speeded up by increasing the ageing temperature, but the effect of ambient temperature did not fit the Arrhenius law.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2008년도 하계종합학술대회
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• pp.472-473
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• 2008

This paper presents a charge pump used in frequency synthesizer for PHS application. The up/down current mismatch of charge pump has a critical effect on the phase noise and spur performance in frequency synthesizer. Therefore, the mismatch compensation scheme is proposed in this paper. And, the measurement results show that the mismatch can be reduced below 5 %.

• Journal of Power Electronics
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• 제16권4호
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• pp.1277-1287
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• 2016

This study proposes a novel isolated high step-up galvanic converter, which is suitable for renewable energy applications and integrates a boost converter, a coupled inductor, a charge pump capacitor cell, and an LC snubber. The proposed converter comprises an input inductor and thus features a continuous input current, which extends the life of the renewable energy chip. Furthermore, the proposed converter can achieve a high voltage gain without an extremely large duty cycle and turn ratio of the coupled inductor by using the charge pump capacitor cell. The leakage inductance energy can be recycled to the output capacitor of the boost converter via the LC snubber and then transferred to the output load. As a result, the voltage spike can be suppressed to a low voltage level. Finally, the basic operating principles and experimental results are provided to verify the effectiveness of the proposed converter.

• 한국기술혁신학회:학술대회논문집
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• 한국기술혁신학회 2004년도 춘계학술대회
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• pp.25-36
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• 2004

The key objective of this paper is to suggest a pilot model for mobile network interconnection charge calculation by bottom-up long-run incremental costing methodology. Interconnection issues have lately attracted considerable attention by network operators and regulators. However there is no standard by all the network operators' agreement. The costing method is an acute problem because the interconnection charge is directly related to the network operators' revenue. Thus Korea has planned to launch the new interconnection policy based on the current traffic distribution and then we simulate the model in a sample area with virtual data. The results propose objective and reasonable guideline for the mobile network element cost calculation. It can be helpful for calculating price floor or bottom-up long run incremental interconnection charge by regulator.

• 한국군사과학기술학회지
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• 제18권5호
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• pp.566-573
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• 2015

The most important factor for the penetration performance of shaped charge is the liner design. By designing the liner to have properties of both high jet tip velocity and long jet break-up time, the better penetration performance could be acquired. Usually it is very difficult to satisfy above two conditions simultaneously. In this study, the liner with the shape of ogive was developed to have relatively larger jet mass compared to the conventional trumpet liner. The designed shaped charge showed jet properties with high jet tip velocity and long jet break-up time by using ogive liner and wave shaper. A commercially available hydro-dynamic code AUTODYN-2D was used for numerical analysis of jet formation. The flash X-ray test and the static penetration test were conducted to verify the results of numerical analysis.