• Applied Microscopy
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• v.45 no.4
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• pp.214-217
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• 2015

This study introduces metal coating as an effective sample preparation method to remove charge-up caused by the shadow effect during field emission scanning electron microscope (FE-SEM) analysis of dynamic structured samples. During a FE-SEM analysis, charge-up occurs when the primary electrons (input electrons) that scan the specimens are not equal to the output electrons (secondary electrons, backscattered electrons, auger electrons, etc.) generated from the specimens. To remove charge-up, a metal layer of Pt, Au or Pd is applied on the surface of the sample. However, in some cases, charge-up still occurs due to the shadow effect. This study developed a coating method that effectively removes charge-up. By creating a converted sample stage capable of simultaneous tilt and rotation, the shadow effect was successfully removed, and image data without charge-up were obtained.

• Transactions on Electrical and Electronic Materials
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• v.6 no.3
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• pp.87-90
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• 2005

$SiO_2$ via-hole etching with a high aspect ratio is a key process in fabricating ULSI devices; however, accumulated charge during plasma etching can cause etching stop, micro-loading effects, and charge build-up damage. To alleviate this concern, charge-up damage sensor was fabricated for the ultimate goal of real-time monitoring of accumulated charge. As an effort to reach the ultimate goal, fabricated sensor was used for electrical potential measurements of via holes between two poly-Si electrodes and roughly characterized under various plasma conditions using statistical design of experiment (DOE). The successful identification of potential difference under various plasma conditions not only supports the evidence of potential charge-up damage, but also leads the direction of future study.

• Journal of information and communication convergence engineering
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• v.3 no.4
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• pp.187-190
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• 2005

High aspect ratio via-hole etching process has emerged as one of the most crucial means to increase component density for ULSI devices. Because of charge accumulation in via-hole, this sophisticated and important process still hold several problems, such as etching stop and loading effects during fabrication of integrated circuits. Indeed, the concern actually depends on accumulated charge. For monitoring accumulated charge during plasma etching process, charge-up monitoring sensor was fabricated and tested under some plasma conditions. This paper presents a neural network-based technique for analyzing and modeling several electrical performance of plasma charge-up monitoring sensor.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• v.9 no.2
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• pp.303-306
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• 2005

High aspect ration via-hole etching process has emerged as one of the most crucial means to increase component density for ULSI devices. Because of charge accumulation in via hole, this sophisticated and important process still hold several problems, such as etching stop, loading effects during fabrication of integrated circuits. Indeed, the concern actually depends on accumulated charge. For monitoring accumulated charge during plasma etching process, charge-up monitoring sensor was fabricated and tested under some plasma conditions. This paper presents a neural network-based technique for analyzing and modeling several electrical performance of plasma charge-up monitoring sensor.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.49 no.5
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• pp.37-42
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• 2012

In this paper, a new charge pump is proposed to reduce the timing mismatch in the conventional current-steering charge pumps. Conventional current-steering charge pumps used NMOS input stages both for UP and DOWN signals, which resulted in different numbers of stage for UP and DOWN delay paths. The proposed charge pump has equalized the numbers of stages for UP and DOWN signals by using a PMOS stage for the DOWN signal. The simulation results show that the conventional current-steering charge pump has 14ns and 6ns for optimized timing mismatches between UP and DOWN signals for turn-on and turn-off, respectively. On the other hand, the proposed charge pump has improved timing mismatches of 6ns and 5ns for turn-on and turn-off, respectively. As a result, the reference spurs are reduced from -26dBc to -39dBc for the proposed charge pump. The proposed charge pump was designed by using $0.18{\mu}m$ CMOS technology. The measurement results show that the maximum variation of the charging and discharging current over the charge pump output voltage range of 0.3~1.5V is approximately 1.5%.

• Journal of Electrical Engineering and Technology
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• v.10 no.3
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• pp.1124-1130
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• 2015

Moisture and high temperature are the most important factors that lead to the ageing of oil-paper insulation, but the research about space charge characteristics of oil-paper insulation does not take the combined effect of ambient temperature, moisture and thermal ageing into account. The pulsed electroacoustic (PEA) method was used to investigate the influence of moisture and temperature on space charge characteristics of oil paper at different ageing stages. The results showed that moisture could speed up formation of space charge in oil paper when water concentration was low, but the formation was restrained if the water concentration was high. At the beginning of thermal ageing, heterogeneous charge accumulation had predominance, but it gradually changed to homogeneous charge injection with ageing. It was believed that moisture concentration could speed up ageing and enhance charge accumulation on one hand, and accelerate or slow down the establishment speed of space charge on the other hand, therefore, charge accumulation type changed with ageing. The more seriously the oil-paper insulation was thermally aged, the deeper the trap energy level was, hence more space charge was trapped, which could be speeded up by increasing the ageing temperature, but the effect of ambient temperature did not fit the Arrhenius law.

• Proceedings of the IEEK Conference
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• 2008.06a
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• pp.472-473
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• 2008

This paper presents a charge pump used in frequency synthesizer for PHS application. The up/down current mismatch of charge pump has a critical effect on the phase noise and spur performance in frequency synthesizer. Therefore, the mismatch compensation scheme is proposed in this paper. And, the measurement results show that the mismatch can be reduced below 5 %.

• Journal of Power Electronics
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• v.16 no.4
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• pp.1277-1287
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• 2016

This study proposes a novel isolated high step-up galvanic converter, which is suitable for renewable energy applications and integrates a boost converter, a coupled inductor, a charge pump capacitor cell, and an LC snubber. The proposed converter comprises an input inductor and thus features a continuous input current, which extends the life of the renewable energy chip. Furthermore, the proposed converter can achieve a high voltage gain without an extremely large duty cycle and turn ratio of the coupled inductor by using the charge pump capacitor cell. The leakage inductance energy can be recycled to the output capacitor of the boost converter via the LC snubber and then transferred to the output load. As a result, the voltage spike can be suppressed to a low voltage level. Finally, the basic operating principles and experimental results are provided to verify the effectiveness of the proposed converter.

• Proceedings of the Korea Technology Innovation Society Conference
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• 2004.05a
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• pp.25-36
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• 2004

The key objective of this paper is to suggest a pilot model for mobile network interconnection charge calculation by bottom-up long-run incremental costing methodology. Interconnection issues have lately attracted considerable attention by network operators and regulators. However there is no standard by all the network operators' agreement. The costing method is an acute problem because the interconnection charge is directly related to the network operators' revenue. Thus Korea has planned to launch the new interconnection policy based on the current traffic distribution and then we simulate the model in a sample area with virtual data. The results propose objective and reasonable guideline for the mobile network element cost calculation. It can be helpful for calculating price floor or bottom-up long run incremental interconnection charge by regulator.

• Journal of the Korea Institute of Military Science and Technology
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• v.18 no.5
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• pp.566-573
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• 2015

The most important factor for the penetration performance of shaped charge is the liner design. By designing the liner to have properties of both high jet tip velocity and long jet break-up time, the better penetration performance could be acquired. Usually it is very difficult to satisfy above two conditions simultaneously. In this study, the liner with the shape of ogive was developed to have relatively larger jet mass compared to the conventional trumpet liner. The designed shaped charge showed jet properties with high jet tip velocity and long jet break-up time by using ogive liner and wave shaper. A commercially available hydro-dynamic code AUTODYN-2D was used for numerical analysis of jet formation. The flash X-ray test and the static penetration test were conducted to verify the results of numerical analysis.