• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.890-893
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• 2004

The ultra precision machining in industrial field are increased day by day. The diamond turning has been used generally, but now is faced with limitation of use, because of higher requirement of production field. The electron beam lithography is alternative in machining area as semiconductor production. For EB lithography, 5 axis vacuum stage is required to duplicate small and large patterns on wafer. The stage is composed of 2 rotational axis and 3 translational axis with 5 DC servo motors. The positioning repeatability and resolution of Z axis feed unit are 3.21$\mu$m and 0.5 $\mu$m/step enough to apply to lithography.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.659-660
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• 2012

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.775-776
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• 2013

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.435-436
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• 2011

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.575-576
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• 2011

• 한국잠사곤충학회지
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• 제16권2호
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• pp.119-125
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• 1974

정상잠이 3령의 성식기에 이르렀을때(춘잠기 소잠후약 9일 20시간 경과한 무렵) 불면잠으로 인정되는 것과 같은 잠박에서 정상잠을 재료로 하여 이를 고정하였고 또한 4령의 성식기에 1~2령기의 발육정도 밖에 되지 않은 왜소잠을 수집하여 고정하고 이와 동시에 이때의 정상잠도 고정하였다. 불면잠과 정상잠을 형태학적으로 비교하고 그 조직검사에서 얻은 조사내용을 요약하여 보면 다음과 같다. 1. 정상잠이 3령의 성식기에 이르렀음에도 불면잠으로 인정되는 누에는 마치 소잠후 2일이 경과한 정도의 누에의 크기에 불과하였으며 4령의 성식기에 관찰한 불면잠도 이와 대동소리라하였다. 2. 태피선은 타원형의 편평한 낭상체로서 그 크기는 흉부에 위치하는 것이 작고 복부의 것이 일반적으로 큰 경향을 나타냈다. 3. 흉부에 있는 태피선은 흉지의 기부에 있는 것이 배맥관을 끼고 있는 태피선보다 큰것으로 종내에는 보고되었지만 본실험결과에 었어서는 일정한 경향이 없었다. 4. 정상잠이 3령의 성식기에 이르렀을 때의 태피선의 크기는 전흉에 있는 것이 최소로서 151.3$\mu$(major axis)~94.5$\mu$(minor axis)였고 최대로서는 복부제7절의 것이 568.6$\mu$~495.$\mu$였으며 이때에 불면잠으로 인정되는 것은 최소로서 전흉에 있는 태피선이 57.5~51.3$\mu$이였으며 최대로서는 복부제5절의 것이 91.5~75.5$\mu$으였다(표 1. 참조) 5. 정상잠이 4령의 성식기에 이르렀을 때 정상잠과 왜소잠의 태피선의 크기를 비교해 본 바에 의하면 정상잠에 있어서는 전흉의 것이 최소로서 252.2~131.6$\mu$이였고 복부제7절의 것이 최대로서 691.5~493.4$\mu$이였으며 왜소잠에 있어서는 후흉의 것이 최소로서 71.4~61.5$\mu$이였고 복부제8절의 것이 최대로서 94.6~71.5$\mu$이였다(표 2. 참조) 6. 불면잠에 있어서의 태피선의 형태는 그 공포형태피선이 정상잠의 것과 크게 차이가 있어 공흉의 크기가 정상잠의 것에 비하여 몇배에 달하였다. 7. 불면잠과 정상잠과의 분필세포의 구조에는 큰 차이가 없지만 불면잠의 과립형태피선은 정상잠에 비하여 소형이 었다.

• 한국공작기계학회논문집
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• 제16권5호
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• pp.211-217
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• 2007

A nano-imprinting stage has been widely used in various fields of nanotechnology. In this study, an analysis method of a nano-imprinting stage machine using FEM and flexible multi-body kinematics and dynamics has been presented. We have developed a virtual imprinting machine to evaluate the prototype design in the early design stage. The simulation using CAE for the imprinting machine is not only to analyze static and dynamic characteristics of the machine but also to determine design parameters of the components for the imprinting machine, such as dimensions and specifications of actuators and sensors. Structural components as the upper plate, the rotator, the shaft and the translator have been modeled with finite elements to analyze flexibility effects during the precision stage motion. In this paper flexible multi-body dynamic simulation is executed to support robust design of the precision stage mechanism. In addition, we made the 4-axis stage model to compare the dynamic behavior with that of 3-axis stage model.

• 한국정밀공학회지
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• 제23권9호
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• pp.179-189
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• 2006

Recently the electrostatic 2-axis MEMS stages have been fabricated f3r the purpose of an application to PSD (Probe-based Storage Device). However, all of the components (platform, comb electrodes, springs, anchors, etc.) in those stages are placed in-plane so that they have low areal efficiencies such as a few percentage, which is undesirable as data storage devices. In this paper, we present a novel structure of an electrostatic 2-axis MEMS stage that is characterized by having a large areal efficiency of about 25%. For obtaining large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. The structure and operational principle of the MEMS stage are described, followed by a design and analysis, the fabrication and measurement results. Experimental results show that the driving ranges of the fabricated stage along the x and y axis were 27$\mu$m, 38$\mu$m at the supplied voltages of 65V, 70V, respectively and the natural frequencies along x and y axis were 180Hz, 310Hz, respectively. The total size of the stage is about 5.9$\times$6.8mm$^2$ and the platform size is about 2.7$\times$3.6mm$^2$.

• 한국정밀공학회지
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• 제22권11호
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• pp.173-181
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• 2005

We report on the design and fabrication of an electrostatic 2-axis MEMS stage possessing a platform with a size of $5{times}5mm^2$. The stage, as a key component, would be used in developing probe-based storage devices in the future. It was fabricated by forming numerous $5{\times}5{\mu}m^2$ etching holes in the central platform, as a result, reducing the total number of masks to 1, thereby simplifying the whole fabrication process. Experimental results show that the driving range of the stage was $32{\mu}m$ at the supplied voltage of 20V and the natural frequency was approximately 300Hz. The mechanical coupling between x- and y-motion was also measured and verified to be $25\%$.

• 한국정밀공학회지
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• 제22권5호
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• pp.103-112
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• 2005

This paper presents one-axis high precision scanning system and illustrates the design of modified $X-Y-{\theta}$ stage as a tracker using VCM and commercialized air bearings for it. The scanning system for 100nm resolution is composed of the 3-axis stage and one axis long stroke linear motor stage as a follower. In this study a previous proposed and presented structure of VCM for the fine stage is modified. The tracker has 3 DOF($X-Y-{\theta}$ motions by four VCM actuators which are located on the same plane. So 4 actuating forces are suggested and designed to create least pitch and roll motions. This article will show about the design especially about optimal design. The design focus of this fine stage is to have high acceleration to accomplish high throughput. The optimal design of maximizing acceleration is performed in restrained size. The most sensitive constraint of this optimal design is heat dissipation of coil. There are 5 design variables. Because the relationship between design variables and system parameters are quite complicated, it is very difficult to set design variables manually. Due to it, computer based optimal design procedure using MATLAB is used. Then, this paper also describes the procedures of selecting design variables for the optimal design and a mathematical formulation of the optimization problem. Based on the solution of the optimization problem, the final design of the stage is also presented. The results can be verified by MAXWELL. The designed stage has the acceleration of about 5 $m/s^{2}$ with 40kg total mass including wafer chuck and interferometer mirror. And the temperature of coil is increased $50^{\circ}C$. In addition, the tracker is controlled by high precision controller system with HP interferometer for it and linear scaler for the follower. At that time, the scanning system has high precision resolution about 5nm and scanning resolution about 40nm in 25mm/s constant speed